{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,7]],"date-time":"2025-11-07T09:48:24Z","timestamp":1762508904987,"version":"build-2065373602"},"reference-count":18,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2023,1,1]],"date-time":"2023-01-01T00:00:00Z","timestamp":1672531200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100003981","name":"Italian Space Agency Project METAMEMS","doi-asserted-by":"publisher","award":["ASI n. 2019-12-U.0","F84118000380005"],"award-info":[{"award-number":["ASI n. 2019-12-U.0","F84118000380005"]}],"id":[{"id":"10.13039\/501100003981","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Nuove Idee per la Componentistica Spaziale del Futuro (\u201cTRL\u201d)","award":["ASI n. 2019-12-U.0","F84118000380005"],"award-info":[{"award-number":["ASI n. 2019-12-U.0","F84118000380005"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the frequency of resonance. In this paper, we discuss the design approach for potential configurations of U-shaped structures combined with ohmic RF MEMS switches. Owing to their prospective application in RADAR and satellite systems, the devices were assessed for K-Band operation, specifically for 15 GHz, 20 GHz, and 26 GHz. The ON-OFF states determined by an electrostatic actuation of metal beams composing the RF MEMS ohmic switches allow for selecting different path lengths corresponding to different frequencies. In this contribution, initial configurations were designed and manufactured as a proof-of-concept. The advantages and critical aspects of the designs are discussed in detail.<\/jats:p>","DOI":"10.3390\/s23010466","type":"journal-article","created":{"date-parts":[[2023,1,2]],"date-time":"2023-01-02T03:50:32Z","timestamp":1672631432000},"page":"466","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-6009-0103","authenticated-orcid":false,"given":"Flavio","family":"Giacomozzi","sequence":"first","affiliation":[{"name":"Fondazione Bruno Kessler, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9547-4265","authenticated-orcid":false,"given":"Emanuela","family":"Proietti","sequence":"additional","affiliation":[{"name":"CNR-IMM, 00133 Roma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Giovanni","family":"Capoccia","sequence":"additional","affiliation":[{"name":"CNR-IMM, 00133 Roma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3850-2685","authenticated-orcid":false,"given":"Giovanni Maria","family":"Sardi","sequence":"additional","affiliation":[{"name":"CNR-IMM, 00133 Roma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9113-3957","authenticated-orcid":false,"given":"Giancarlo","family":"Bartolucci","sequence":"additional","affiliation":[{"name":"CNR-IMM, 00133 Roma, Italy"},{"name":"Electronic Engineering Department, University of Roma \u201cTor Vergata\u201d, 00133 Roma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6462-4814","authenticated-orcid":false,"given":"Jacopo","family":"Iannacci","sequence":"additional","affiliation":[{"name":"Fondazione Bruno Kessler, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7611-6435","authenticated-orcid":false,"given":"Girolamo","family":"Tagliapietra","sequence":"additional","affiliation":[{"name":"Fondazione Bruno Kessler, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Benno","family":"Margesin","sequence":"additional","affiliation":[{"name":"Fondazione Bruno Kessler, 38123 Trento, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4815-9470","authenticated-orcid":false,"given":"Romolo","family":"Marcelli","sequence":"additional","affiliation":[{"name":"CNR-IMM, 00133 Roma, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,1,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Cao, T., Hu, T., and Zhao, Y. (2020). Research Status and Development Trend of MEMS Switches: A Review. Micromachines, 11.","DOI":"10.3390\/mi11070694"},{"key":"ref_2","unstructured":"Bindhu, V., Chen, J., and Tavares, J. (2020). Review on Radio Frequency Micro Electro Mechanical Systems (RF-MEMS) Switch. Tavares Editors International Conference on Communication, Computing and Electronics Systems Proceedings of ICCCES 2019, Springer. SPRINGER Lecture Notes in Electrical Engineering."},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Han, K., Guo, X., Smith, S., Deng, Z., and Li, W. (2018). Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification. Micromachines, 9.","DOI":"10.3390\/mi9080390"},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Liu, A.Q. (2010). RF MEMS Switches and Integrated Switching Circuits Design, Fabrication, and Test, Springer.","DOI":"10.1007\/978-0-387-46262-2"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"511","DOI":"10.1007\/s00542-017-3419-4","article-title":"Fabrication and test of RF MEMS in LTCC technology","volume":"24","author":"Lucibello","year":"2018","journal-title":"Microsyst. Technol."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"575","DOI":"10.1007\/s00542-017-3583-6","article-title":"Wafer-level micropackaging in thin film technology for RF MEMS applications","volume":"24","author":"Persano","year":"2018","journal-title":"Microsyst. Technol."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"291","DOI":"10.1109\/JPROC.2015.2397832","article-title":"An Introduction to Reconfigurable Systems","volume":"103","author":"Lyke","year":"2015","journal-title":"Proc. IEEE"},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Lysenko, I.E., Tkachenko, A.V., Sherova, E.V., and Nikitin, A.V. (2018). Analytical Approach in the Development of RF MEMS Switches. Electronics, 7.","DOI":"10.3390\/electronics7120415"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"3843","DOI":"10.1007\/s00542-015-2782-2","article-title":"Cycling reliability of RF-MEMS switches with Gold-Platinum multilayers as contact material","volume":"23","author":"Mulloni","year":"2017","journal-title":"Microsyst. Technol."},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Islam, N. (2012). Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration. Microelectromechanical Systems and Devices, InTech. Chapter 9.","DOI":"10.5772\/1363"},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Islam, N. (2012). Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches. Microelectromechanical Systems and Devices, InTech. Chapter 10.","DOI":"10.5772\/1363"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"11","DOI":"10.2174\/1876402911666190204113856","article-title":"A Systematic Review of Reliability Issues in RF-MEMS Switches","volume":"11","author":"Saleem","year":"2019","journal-title":"Bentham Sci. Micro Nanosyst."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1219","DOI":"10.1109\/LED.2016.2592539","article-title":"High Power and Reliable SPST\/SP3T RF MEMS Switches for Wireless Applications","volume":"37","author":"Pal","year":"2016","journal-title":"IEEE Electron Device Lett."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Adli, B., Mardiati, R., and Maulana, Y.Y. (2018, January 12\u201313). Design of Microstrip Hairpin Bandpass Filter for X-Band Radar Navigation. Proceedings of the 2018 4th International Conference on Wireless and Telematics (ICWT), Bali, Indonesia.","DOI":"10.1109\/ICWT.2018.8527781"},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Qin, M., Pan, C., Chen, Y., Ma, Q., Liu, S., Wu, E., and Wu, B. (2018). Electromagnetically Induced Transparency in All-Dielectric U-Shaped Silicon Metamaterials. Appl. Sci., 8.","DOI":"10.3390\/app8101799"},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Giacomozzi, F., Proietti, E., Capoccia, G., Sardi, G., Bartolucci, G., Iannacci, J., Margesi, B., and Marcelli, R. (2022, January 11\u201313). U-shaped MEMS tunable microwave resonators. Proceedings of the 2022 Symposium on Design, Test, Integration and Packaging of MEMS\/MOEMS (DTIP), Pont-a-Mousson, France.","DOI":"10.1109\/DTIP56576.2022.9911715"},{"key":"ref_17","unstructured":"(2020, January 01). AWR AXIEM Analysis. Available online: https:\/\/www.cadence.com\/en_US\/home\/tools\/system-analysis\/rf-microwave-design\/awr-axiem-analysis.html."},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Giacomozzi, F., Mulloni, V., Colpo, S., Iannacci, J., Margesin, B., and Faes, A. (2011, January 17\u201319). A flexible technology platform for the fabrication of RF-MEMS devices. Proceedings of the 2011 International Semiconductor Conference (CAS), Sinaia, Romania.","DOI":"10.1109\/SMICND.2011.6095744"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/1\/466\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T17:55:22Z","timestamp":1760118922000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/1\/466"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,1,1]]},"references-count":18,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2023,1]]}},"alternative-id":["s23010466"],"URL":"https:\/\/doi.org\/10.3390\/s23010466","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2023,1,1]]}}}