{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T01:45:19Z","timestamp":1760147119013,"version":"build-2065373602"},"reference-count":13,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2023,1,12]],"date-time":"2023-01-12T00:00:00Z","timestamp":1673481600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea (NRF)","doi-asserted-by":"publisher","award":["2020R1F1A1075209"],"award-info":[{"award-number":["2020R1F1A1075209"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Recently, due to the development of semiconductor technology, high-performance memory and digital convergence technology that integrates and implements various functions into one semiconductor chip has been regarded as the next-generation core technology. In the semiconductor manufacturing process, various motors are being applied for automated processes and high product reliability. However, dust and shaft loss due to mechanical friction of a general motor system composed of motor-bearing are problematic for semiconductor wafer processing. In addition, in the edge bread remove (EBR) process after the photoresist application process, a nozzle position control system for removing unnecessary portions of the wafer edge is absolutely necessary. Therefore, in this paper, in order to solve the problems occurring in the semiconductor process, a six-degrees-of-freedom (6-DOF) magnetic levitation system without shaft and bearing was designed for application to the semiconductor process system; and an integrated driving control algorithm for 6-DOF control (levitation, rotation, tilt (Roll\u2013Pitch), X\u2013Y axis movement) using the force of each current component derived through current vector control was proposed. Finally, the 6-DOF magnetic levitation system with the non-contact position sensors was fabricated and the validity of the 6-DOF magnetic levitation control method proposed in this paper was verified through a performance test using a prototype.<\/jats:p>","DOI":"10.3390\/s23020905","type":"journal-article","created":{"date-parts":[[2023,1,13]],"date-time":"2023-01-13T02:57:33Z","timestamp":1673578653000},"page":"905","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors"],"prefix":"10.3390","volume":"23","author":[{"given":"Dong-Hoon","family":"Jung","sequence":"first","affiliation":[{"name":"School of Mechanical, Automotive and Robot Engineering, Halla University, Wonju 26404, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jong Suk","family":"Lim","sequence":"additional","affiliation":[{"name":"Vehicle Electrification Research Center, Korea Automotive Technology Institute, Daegu 43011, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,1,12]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1274","DOI":"10.1109\/TIA.2013.2272548","article-title":"Technical and Economical Considerations on Super High-Efficiency Three-Phase Motors","volume":"50","author":"Ferreira","year":"2014","journal-title":"IEEE Trans. Ind. Appl."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"2603","DOI":"10.1109\/TMAG.2007.893638","article-title":"A Novel Approach to Analyze the Transient Dynamics of an Electrodynamics Suspension Maglev","volume":"43","author":"Ko","year":"2007","journal-title":"IEEE Trans. Magn."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"467","DOI":"10.1109\/TMAG.2008.2008980","article-title":"An Electromagnetic Launcher with Magnetic Levitation Realized Based on Vector Control","volume":"45","author":"Sun","year":"2009","journal-title":"IEEE Trans. Magn."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Hwang, S.-H., Kim, J.-M., Bang, D.-J., Kim, J.-W., Koo, D.-H., and Kang, D.-H. (2014, January 16\u201320). Control of independent multi-phase transverse flux linear synchronous motor based on magnetic levitation. Proceedings of the 2014 IEEE Applied Power Electronics Conference and Exposition\u2014APEC 2014, Fort Worth, TX, USA.","DOI":"10.1109\/APEC.2014.6803653"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1827","DOI":"10.1109\/TIA.2013.2257972","article-title":"A Radial Position, Control Method of Bearingless Motor Based on d\u2013q-Axis Current Control","volume":"49","author":"Kobayashi","year":"2013","journal-title":"IEEE Trans. Ind. Appl."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"2148","DOI":"10.1109\/TMAG.2010.2043065","article-title":"Toroidally-Wound Self-Bearing BLDC Motor with Lorentz Force","volume":"46","author":"Lee","year":"2010","journal-title":"IEEE Trans. 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Magn."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"5622","DOI":"10.1109\/TIE.2013.2297307","article-title":"Structural Optimization of a Novel 6-DOF Pose Sensor System for Enhancing Noise Robustness at a Long Distance","volume":"61","author":"Kim","year":"2014","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"5722","DOI":"10.1109\/TIE.2015.2410261","article-title":"A Portable and Remote 6-DOF Pose Sensor System with a Long Measurement Range Based on 1-D Laser Sensors","volume":"62","author":"Kim","year":"2015","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"2158","DOI":"10.1109\/TIE.2016.2623578","article-title":"High-Speed Low-Friction Piezoelectric Motors Based On Centrifugal Force","volume":"64","author":"Pan","year":"2017","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"643","DOI":"10.1109\/TIM.2015.2509218","article-title":"A 6-DOF Measurement Solution for Permanent Magnet Synchronous Planar Motors Based on Motion Continuity Principle","volume":"65","author":"Chen","year":"2016","journal-title":"IEEE Trans. Instrum. Meas."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/2\/905\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T18:04:23Z","timestamp":1760119463000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/2\/905"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,1,12]]},"references-count":13,"journal-issue":{"issue":"2","published-online":{"date-parts":[[2023,1]]}},"alternative-id":["s23020905"],"URL":"https:\/\/doi.org\/10.3390\/s23020905","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2023,1,12]]}}}