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Two configurations were analyzed to achieve a controlled deformation of the DSRRs\u2019 metamaterial geometry by mutual rotation or extrusion along the azimuthal direction of the two constituent rings. Then, the transfer function was numerically simulated for a reconfigurable MEMS\u2013DSRR hybrid architecture where the DSRR is embedded onto a realistic piezo actuator chip. In this case, a 370 MHz resonance frequency shift was obtained under of a 170 \u00b5m extrusion driven by a DC voltage. These characteristics in combination with a high Q factor and dimensions compatible with standard CMOS manufacturing techniques provide a step forward for the production of devices with applications in multiband telecommunications and wireless power transfer and in the IoT field.<\/jats:p>","DOI":"10.3390\/s23031382","type":"journal-article","created":{"date-parts":[[2023,1,27]],"date-time":"2023-01-27T01:27:58Z","timestamp":1674782878000},"page":"1382","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Reconfigurable Split Ring Resonators by MEMS-Driven Geometrical Tuning"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0729-8386","authenticated-orcid":false,"given":"Angelo","family":"Leo","sequence":"first","affiliation":[{"name":"Omnics Research Group, Department of Mathematics and Physics \u201cEnnio De Giorgi\u201d, Institute of Nanotechnology CNR-Nanotec, INFN Sezione di Lecce, University of Salento, Via per Monteroni, 73100 Lecce, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9266-9075","authenticated-orcid":false,"given":"Alessandro Paolo","family":"Bramanti","sequence":"additional","affiliation":[{"name":"System Research and Applications, Silicon Biotech, Lecce Lab, STMicroelectronics S.r.l., c\/o Ecotekne, Via per Monteroni 165, 73100 Lecce, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Domenico","family":"Giusti","sequence":"additional","affiliation":[{"name":"Analog MEMS and Sensors Product Group, STMicroelectronics S.r.l., Via Tolomeo 1, 20100 Cornaredo, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fabio","family":"Quaglia","sequence":"additional","affiliation":[{"name":"Analog MEMS and Sensors Product Group, STMicroelectronics S.r.l., Via Tolomeo 1, 20100 Cornaredo, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7669-0253","authenticated-orcid":false,"given":"Giuseppe","family":"Maruccio","sequence":"additional","affiliation":[{"name":"Omnics Research Group, Department of Mathematics and Physics \u201cEnnio De Giorgi\u201d, Institute of Nanotechnology CNR-Nanotec, INFN Sezione di Lecce, University of Salento, Via per Monteroni, 73100 Lecce, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,1,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Xu, R.-J., and Lin, Y.-S. 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