{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,14]],"date-time":"2026-01-14T20:30:43Z","timestamp":1768422643184,"version":"3.49.0"},"reference-count":30,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2023,2,1]],"date-time":"2023-02-01T00:00:00Z","timestamp":1675209600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62074138"],"award-info":[{"award-number":["62074138"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents an implementation scheme and experimental evaluation of a high-linearity closed-loop capacitive accelerometer based on ring-diode capacitance detection. By deducing the capacitance detection model of the ring-diode considering the influence of the diode, the existing theoretical model error of the ring-diode is corrected and a closed-loop scheme of reusing the detection electrode and the control electrode of the MEMS die is designed to apply this detection scheme to the parallel-plate accelerometer, which only has three independent electrodes. After analyzing the non-linear problems in the existing closed-loop control schemes, a theoretically absolute linear closed-loop control scheme is proposed, and an integrated closed-loop accelerometer is realized by combining the closed-loop diode detection. The experimental results of the ring-diode detection model are in agreement with the theoretical formula. The non-linearity of the accelerometer within \u00b11 g after the closed-loop is 130 ppm, compared with 1500 ppm when the open-loop is used.<\/jats:p>","DOI":"10.3390\/s23031568","type":"journal-article","created":{"date-parts":[[2023,2,1]],"date-time":"2023-02-01T02:06:44Z","timestamp":1675217204000},"page":"1568","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["A High-Linearity Closed-Loop Capacitive Micro-Accelerometer Based on Ring-Diode Capacitance Detection"],"prefix":"10.3390","volume":"23","author":[{"given":"Qi","family":"Tao","sequence":"first","affiliation":[{"name":"China Academy of Engineering Physics, Institute of Electronic Engineering, Mianyang 621000, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bin","family":"Tang","sequence":"additional","affiliation":[{"name":"China Academy of Engineering Physics, Institute of Electronic Engineering, Mianyang 621000, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,2,1]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Sethuramalingam, T.K., and Vimalajuliet, A. 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