{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,17]],"date-time":"2026-04-17T17:13:14Z","timestamp":1776445994808,"version":"3.51.2"},"reference-count":41,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2023,2,4]],"date-time":"2023-02-04T00:00:00Z","timestamp":1675468800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Romanian Ministry of Research, Innovation and Digitalization","award":["PN-III-P4-ID-PCE-2020-1985"],"award-info":[{"award-number":["PN-III-P4-ID-PCE-2020-1985"]}]},{"name":"Romanian Ministry of Research, Innovation and Digitalization","award":["PN-III-P2-2.1-PED2021-2688"],"award-info":[{"award-number":["PN-III-P2-2.1-PED2021-2688"]}]},{"name":"Romanian Ministry of Research, Innovation and Digitalization","award":["8 N\/2023"],"award-info":[{"award-number":["8 N\/2023"]}]},{"name":"Romanian Ministry of Research, Innovation and Digitalization","award":["PN 23 21 01 06"],"award-info":[{"award-number":["PN 23 21 01 06"]}]},{"name":"Romanian Core Program Contract","award":["PN-III-P4-ID-PCE-2020-1985"],"award-info":[{"award-number":["PN-III-P4-ID-PCE-2020-1985"]}]},{"name":"Romanian Core Program Contract","award":["PN-III-P2-2.1-PED2021-2688"],"award-info":[{"award-number":["PN-III-P2-2.1-PED2021-2688"]}]},{"name":"Romanian Core Program Contract","award":["8 N\/2023"],"award-info":[{"award-number":["8 N\/2023"]}]},{"name":"Romanian Core Program Contract","award":["PN 23 21 01 06"],"award-info":[{"award-number":["PN 23 21 01 06"]}]},{"name":"Romanian Ministry of Research, Innovation and Digitalization","award":["PN-III-P4-ID-PCE-2020-1985"],"award-info":[{"award-number":["PN-III-P4-ID-PCE-2020-1985"]}]},{"name":"Romanian Ministry of Research, Innovation and Digitalization","award":["PN-III-P2-2.1-PED2021-2688"],"award-info":[{"award-number":["PN-III-P2-2.1-PED2021-2688"]}]},{"name":"Romanian Ministry of Research, Innovation and Digitalization","award":["8 N\/2023"],"award-info":[{"award-number":["8 N\/2023"]}]},{"name":"Romanian Ministry of Research, Innovation and Digitalization","award":["PN 23 21 01 06"],"award-info":[{"award-number":["PN 23 21 01 06"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this study we analyzed the structure and light-sensing properties of as-deposited vanadium oxide thin films, prepared by RF sputtering in different Ar:O2 flow rate conditions, at low temperature (e.g., 65 \u00b0C). X-ray diffraction (XRD), Scanning Electron Microscopy (SEM-EDX), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) were employed to analyze the film microstructure, composition and the oxidation states of vanadium ions. The SEM micrographs evidence VxOy films with smooth surfaces, whereas the XRD patterns show their amorphous structure. Raman spectra indicate an increased structural disorder in the films deposited in Ar:O2 flow comparatively with those deposited solely in Ar flow. The XPS data suggest the modification of the oxidation state from V4+ to V5+, thus proving the formation of the V2O5 phase when increasing the oxygen content, which further affects the films\u2019 optical properties. We observed a good stability of the photogenerated current in Si\/SiO2\/VxOy\/TiN heterostructures upon excitation with pulses of UV (360 nm), VIS (white light) and NIR (860 nm) light. The responsivity, detectivity and linear dynamic range parameters increase with the O\/V ratio in the VxOy films, reaching comparable values with photodetectors based on crystalline V2O5 or VO2.<\/jats:p>","DOI":"10.3390\/s23041759","type":"journal-article","created":{"date-parts":[[2023,2,6]],"date-time":"2023-02-06T02:06:43Z","timestamp":1675649203000},"page":"1759","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["Light-Sensing Properties of Amorphous Vanadium Oxide Films Prepared by RF Sputtering"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7406-1517","authenticated-orcid":false,"given":"Rodica","family":"Plugaru","sequence":"first","affiliation":[{"name":"National Institute for Research and Development in Microtechnologies-IMT Bucharest, Erou Iancu Nicolae 126 A, 077190 Voluntari, Ilfov, Romania"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4417-4972","authenticated-orcid":false,"given":"Iuliana","family":"Mihalache","sequence":"additional","affiliation":[{"name":"National Institute for Research and Development in Microtechnologies-IMT Bucharest, Erou Iancu Nicolae 126 A, 077190 Voluntari, Ilfov, Romania"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5615-6624","authenticated-orcid":false,"given":"Cosmin","family":"Romani\u0163an","sequence":"additional","affiliation":[{"name":"National Institute for Research and Development in Microtechnologies-IMT Bucharest, Erou Iancu Nicolae 126 A, 077190 Voluntari, Ilfov, Romania"}]},{"given":"Florin","family":"Comanescu","sequence":"additional","affiliation":[{"name":"National Institute for Research and Development in Microtechnologies-IMT Bucharest, Erou Iancu Nicolae 126 A, 077190 Voluntari, Ilfov, Romania"}]},{"given":"Silviu","family":"Vulpe","sequence":"additional","affiliation":[{"name":"National Institute for Research and Development in Microtechnologies-IMT Bucharest, Erou Iancu Nicolae 126 A, 077190 Voluntari, Ilfov, Romania"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7886-578X","authenticated-orcid":false,"given":"Gabriel","family":"Craciun","sequence":"additional","affiliation":[{"name":"National Institute for Research and Development in Microtechnologies-IMT Bucharest, Erou Iancu Nicolae 126 A, 077190 Voluntari, Ilfov, Romania"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1720-0610","authenticated-orcid":false,"given":"Neculai","family":"Plugaru","sequence":"additional","affiliation":[{"name":"National Institute for Research and Development in Microtechnologies-IMT Bucharest, Erou Iancu Nicolae 126 A, 077190 Voluntari, Ilfov, Romania"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6531-8085","authenticated-orcid":false,"given":"Nikolay","family":"Djourelov","sequence":"additional","affiliation":[{"name":"Extreme Light Infrastructure-Nuclear Physics (ELI-NP), \u201cHoria Hulubei\u201d National R&D Institute for Physics and Nuclear Engineering (IFIN-HH), 077125 Magurele, Romania"}]}],"member":"1968","published-online":{"date-parts":[[2023,2,4]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"875","DOI":"10.1016\/j.mattod.2018.03.029","article-title":"Recent Progresses on Physics and Applications of Vanadium Dioxide","volume":"21","author":"Liu","year":"2018","journal-title":"Mater. 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