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Malaysia","award":["NCSIST-403-V309(110)"],"award-info":[{"award-number":["NCSIST-403-V309(110)"]}]},{"name":"Ministry of Education (MOE) in Taiwan, Ministry of Science and Technology, Taiwan","award":["G2021016010L"],"award-info":[{"award-number":["G2021016010L"]}]},{"name":"Ministry of Education (MOE) in Taiwan, Ministry of Science and Technology, Taiwan","award":["FRGS\/1\/2020\/STG02\/UKM\/02\/1"],"award-info":[{"award-number":["FRGS\/1\/2020\/STG02\/UKM\/02\/1"]}]},{"name":"Ministry of Education (MOE) in Taiwan, Ministry of Science and Technology, Taiwan","award":["110-2634-F-009-027-"],"award-info":[{"award-number":["110-2634-F-009-027-"]}]},{"name":"Ministry of Education (MOE) in Taiwan, Ministry of Science and Technology, Taiwan","award":["110-2622-8-009-018-SB"],"award-info":[{"award-number":["110-2622-8-009-018-SB"]}]},{"name":"Ministry of Education (MOE) in Taiwan, Ministry of Science and Technology, Taiwan","award":["NCSIST-403-V309(110)"],"award-info":[{"award-number":["NCSIST-403-V309(110)"]}]},{"name":"National Chung-Shan Institute of Science and Technology, Taiwan","award":["G2021016010L"],"award-info":[{"award-number":["G2021016010L"]}]},{"name":"National Chung-Shan Institute of Science and Technology, Taiwan","award":["FRGS\/1\/2020\/STG02\/UKM\/02\/1"],"award-info":[{"award-number":["FRGS\/1\/2020\/STG02\/UKM\/02\/1"]}]},{"name":"National Chung-Shan Institute of Science and Technology, Taiwan","award":["110-2634-F-009-027-"],"award-info":[{"award-number":["110-2634-F-009-027-"]}]},{"name":"National Chung-Shan Institute of Science and Technology, Taiwan","award":["110-2622-8-009-018-SB"],"award-info":[{"award-number":["110-2622-8-009-018-SB"]}]},{"name":"National Chung-Shan Institute of Science and Technology, Taiwan","award":["NCSIST-403-V309(110)"],"award-info":[{"award-number":["NCSIST-403-V309(110)"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Gallium nitride (GaN), widely known as a wide bandgap semiconductor material, has been mostly employed in high power devices, light emitting diodes (LED), and optoelectronic applications. However, it could be exploited differently due to its piezoelectric properties, such as its higher SAW velocity and strong electromechanical coupling. In this study, we investigated the affect of the presence of a guiding layer made from titanium\/gold on the surface acoustic wave propagation of the GaN\/sapphire substrate. By fixing the minimum thickness of the guiding layer at 200 nm, we could observe a slight frequency shift compared to the sample without a guiding layer, with the presence of different types of surface mode waves (Rayleigh and Sezawa). This thin guiding layer could be efficient in transforming the propagation modes, acting as a sensing layer for the binding of biomolecules to the gold layer, and influencing the output signal in terms of frequency or velocity. The proposed GaN\/sapphire device integrated with a guiding layer could possibly be used as a biosensor and in wireless telecommunication applications.<\/jats:p>","DOI":"10.3390\/s23052464","type":"journal-article","created":{"date-parts":[[2023,2,23]],"date-time":"2023-02-23T03:56:58Z","timestamp":1677124618000},"page":"2464","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Surface Acoustic Wave Propagation of GaN\/Sapphire Integrated with a Gold Guiding Layer"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7023-7773","authenticated-orcid":false,"given":"Muhammad Musoddiq","family":"Jaafar","sequence":"first","affiliation":[{"name":"College of Physics and Electrical Information Engineering, Zhejiang Normal University, Jinhua 321017, China"},{"name":"Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia"},{"name":"International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5543-2300","authenticated-orcid":false,"given":"Mohd Farhanulhakim","family":"Mohd Razip Wee","sequence":"additional","affiliation":[{"name":"Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia"}]},{"given":"Hoang-Tan-Ngoc","family":"Nguyen","sequence":"additional","affiliation":[{"name":"International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan"}]},{"given":"Le Trung","family":"Hieu","sequence":"additional","affiliation":[{"name":"Department of Materials Science and Engineering, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan"}]},{"given":"Rahul","family":"Rai","sequence":"additional","affiliation":[{"name":"International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan"}]},{"given":"Ashish Kumar","family":"Sahoo","sequence":"additional","affiliation":[{"name":"International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1015-9181","authenticated-orcid":false,"given":"Chang Fu","family":"Dee","sequence":"additional","affiliation":[{"name":"Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia"}]},{"given":"Edward Yi","family":"Chang","sequence":"additional","affiliation":[{"name":"International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan"},{"name":"Department of Materials Science and Engineering, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan"},{"name":"Department of Electronics Engineering, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan"}]},{"given":"Burhanuddin","family":"Yeop Majlis","sequence":"additional","affiliation":[{"name":"Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia"}]},{"given":"Clarence Augustine TH","family":"Tee","sequence":"additional","affiliation":[{"name":"College of Physics and Electrical Information Engineering, Zhejiang Normal University, Jinhua 321017, China"}]}],"member":"1968","published-online":{"date-parts":[[2023,2,23]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Moon, J.S., Wong, J., Grabar, B., Antcliffe, M., Chen, P., Arkun, E., Khalaf, I., Corrion, A., and Post, T. 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