{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,20]],"date-time":"2026-02-20T07:01:59Z","timestamp":1771570919770,"version":"3.50.1"},"reference-count":35,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2023,2,27]],"date-time":"2023-02-27T00:00:00Z","timestamp":1677456000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vibration, which gives the gyroscope system good robustness. In order to realize the co-simulation of the mechanically sensitive structure and interface circuit of the gyroscope, the equivalent electrical model analysis and modeling of the mechanically sensitive structure of the gyro are carried out by Verilog-A. According to the design scheme of the MEMS gyroscope interface circuit, a system-level simulation model including mechanically sensitive structure and measurement and control circuit is established by SIMULINK. A digital-to-analog converter (ADC) is designed for the digital processing and temperature compensation of the angular velocity in the MEMS gyroscope digital circuit system. Using the positive and negative diode temperature characteristics, the function of the on-chip temperature sensor is realized, and the temperature compensation and zero bias correction are carried out simultaneously. The MEMS interface ASIC is designed using a standard 0.18 \u03bcM CMOS BCD process. The experimental results show that the signal-to-noise ratio (SNR) of sigma-delta (\u03a3\u0394) ADC is 111.56 dB. The nonlinearity of the MEMS gyroscope system is 0.03% over the full-scale range.<\/jats:p>","DOI":"10.3390\/s23052615","type":"journal-article","created":{"date-parts":[[2023,2,28]],"date-time":"2023-02-28T02:01:51Z","timestamp":1677549711000},"page":"2615","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5414-4358","authenticated-orcid":false,"given":"Huan","family":"Zhang","sequence":"first","affiliation":[{"name":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Weiping","family":"Chen","sequence":"additional","affiliation":[{"name":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Key Laboratory of Micro-Structures Manufacturing, Harbin Institute of Technology, Ministry of Education, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Liang","family":"Yin","sequence":"additional","affiliation":[{"name":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Key Laboratory of Micro-Structures Manufacturing, Harbin Institute of Technology, Ministry of Education, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiang","family":"Fu","sequence":"additional","affiliation":[{"name":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China"},{"name":"Key Laboratory of Micro-Structures Manufacturing, Harbin Institute of Technology, Ministry of Education, Harbin 150001, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,2,27]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Prikhodko, I.P., Nadig, S., Gregory, J., Clark, W.A., and Judy, M.W. (2017, January 28\u201330). Half-a-month stable 0.2 degree-per-hour mode-matched mems gyroscope. Proceedings of the 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Kauai, HI, USA.","DOI":"10.1109\/ISISS.2017.7935679"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Zhu, J.X., Liu, X.M., Shi, Q.F., He, T.Y., Sun, Z.D., Guo, X.E., Liu, W.X., Sulaiman, O.B., Dong, B.W., and Lee, C.K. (2020). Development Trends and Perspectives of Future Sensors and MEMS\/NEMS. Micromachines, 11.","DOI":"10.3390\/mi11010007"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"26426","DOI":"10.1109\/JSEN.2021.3117939","article-title":"Frequency-Modulated MEMS Gyroscopes: A Review","volume":"21","author":"Ren","year":"2021","journal-title":"IEEE Sens. J."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"24","DOI":"10.1109\/JMEMS.2020.3032833","article-title":"Design and Development of the MEMS-Based High-g Acceleration Threshold Switch","volume":"30","author":"Singh","year":"2021","journal-title":"J. Microelectromech. Syst."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"218","DOI":"10.1109\/JMEMS.2017.2787982","article-title":"Design of a Dual Quantization Electromechanical Sigma\u2013Delta Modulator MEMS Vibratory Wheel Gyroscope","volume":"27","author":"Sheng","year":"2018","journal-title":"IEEE\/ASME J. Microelectromech. Syst."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"48074","DOI":"10.1109\/ACCESS.2020.2977223","article-title":"Design and Experiment for Dual-Mass MEMS Gyroscope Sensing Closed-Loop System","volume":"8","author":"Cao","year":"2020","journal-title":"IEEE Access"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"7","DOI":"10.1016\/j.sna.2019.06.052","article-title":"High g MEMS inertial switch capable of direction detection","volume":"296","author":"Xi","year":"2019","journal-title":"Sens. Actuators A Phys."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"4226","DOI":"10.1109\/TIE.2022.3181383","article-title":"Multi-Threshold Inertial Switch with Acceleration Direction Detection Capability","volume":"70","author":"Xu","year":"2023","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Liu, M., Wu, X., Niu, Y., Yang, H., Zhu, Y., and Wang, W. (2022). Research Progress of MEMS Inertial Switches. Micromachines, 13.","DOI":"10.3390\/mi13030359"},{"key":"ref_10","first-page":"1006","article-title":"MEMS Gyroscope with Less Than 1-deg\/h Bias Instability Variation in Temperature Range From \u221240 \u00b0C to 125 \u00b0C","volume":"18","author":"Maeda","year":"2018","journal-title":"IEEE Sens. J."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"32","DOI":"10.1038\/s41378-018-0035-0","article-title":"0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)","volume":"4","author":"Li","year":"2018","journal-title":"Microsyst. Nanoeng."},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Wang, Y., Fu, Q., Zhang, Y., Zhang, W., Chen, D., Yin, L., and Liu, X. (2020). A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end. Sensors, 20.","DOI":"10.3390\/s20030687"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"85","DOI":"10.1109\/JSEN.2019.2940536","article-title":"Honeycomb-Like Disk Resonator Gyroscope","volume":"20","author":"Xu","year":"2020","journal-title":"IEEE Sens. J."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1643","DOI":"10.1007\/s00542-019-04705-8","article-title":"Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation","volume":"26","author":"Khan","year":"2019","journal-title":"Microsyst. Technol."},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Lapadatu, D., Blixhavn, B., Holm, R., and Kvisteroy, T. (2010, January 4\u20136). SAR500-A high-precision high-stability butterfly gyroscope with north seeking capability. Proceedings of the IEEE\/ION Position, Location and Navigation Symposium, Indian Wells, CA, USA.","DOI":"10.1109\/PLANS.2010.5507139"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1281","DOI":"10.1007\/s00542-013-1913-x","article-title":"Vibration sensitivity analysis of the \u2018Butterfly-gyro\u2019 structure","volume":"20","author":"Su","year":"2013","journal-title":"Microsyst. Technol."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"922","DOI":"10.1016\/j.measurement.2012.02.001","article-title":"Modeling and compensation of MEMS gyroscope output data based on support vector machine","volume":"45","author":"Zhang","year":"2012","journal-title":"Measurement"},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Tan, Z., Nguyen, K., Yan, J., Samuels, H., Keating, S., Crocker, P., and Clark, B. (2017, January 6\u20138). A dual-axis MEMS vibratory gyroscope ASIC with 0.0061\u00b0\/s\/VHz noise floor over 480 Hz bandwidth. Proceedings of the 2017 IEEE Asian Solid-State Circuits Conference (A-SSCC), Seoul, Republic of Korea.","DOI":"10.1109\/ASSCC.2017.8240206"},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Chen, H., and Zhong, Y. (2020). Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope. Sensors, 20.","DOI":"10.3390\/s20164564"},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Xu, X., Liu, X., and Zhang, Y. (2021). A Quick Start Method for MEMS Disk Resonant Gyroscope. Sensors, 21.","DOI":"10.3390\/s21237986"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"4725","DOI":"10.1109\/JSEN.2017.2712599","article-title":"Frequency Tuning of a Disk Resonator Gyroscope via Stiffness Perturbation","volume":"17","author":"Xiao","year":"2017","journal-title":"IEEE Sens. J."},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Passaro, V.M.N., Antonello, C., Lorenzo, V., Martino, D.C., and Edoardo, C.C. (2017). Gyroscope Technology and Applications: A Review in the Industrial Perspective. Sensors, 17.","DOI":"10.3390\/s17102284"},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Zotov, S.A., Simon, B.R., Sharma, G., Prikhodko, I.P., Trusov, A.A., and Shkel, A.M. (2014, January 25\u201326). Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability. Proceedings of the 1st IEEE International Symposium on Inertial Sensors and Systems, ISISS, Laguna Beach, CA, USA.","DOI":"10.1109\/ISISS.2014.6782536"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"1915","DOI":"10.1109\/JSSC.2016.2571670","article-title":"An Interface ASIC for MEMS Vibratory Gyroscopes with a Power of 1.6 mW, 92 dB DR and 0.007\u00b0\/s\/Hz1\/2 Noise Floor over a 40 Hz Band","volume":"51","author":"Rombach","year":"2016","journal-title":"IEEE J. Solid State Circuits"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"174","DOI":"10.1109\/JSSC.2017.2747215","article-title":"A 0.06 mm2 Background Resonance Frequency Tuning Circuit Based on Noise Observation for a 1.71 mW CT-Delta Sigma MEMS Gyroscope Readout System with 0.9\u00b0\/h Bias Instability","volume":"53","author":"Marx","year":"2018","journal-title":"IEEE J. Solid-State Circuits"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"3533","DOI":"10.1109\/JSEN.2018.2810843","article-title":"Micromechanical Rate Integrating Gyroscope with Angle-Dependent Bias Compensation Using a Self-Precession Method","volume":"18","author":"Challoner","year":"2018","journal-title":"IEEE Sens. J."},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Chen, C., Wu, K., Lu, K., Li, Q., Wang, C., and Wu, X. (2022). A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes. Micromachines, 13.","DOI":"10.3390\/mi13071052"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1950286","DOI":"10.1142\/S0217979219502862","article-title":"Research on digital silicon gyroscope interface circuit based on bandpass sigma-delta modulator","volume":"33","author":"Huang","year":"2019","journal-title":"Int. J. Mod. Phys. B"},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Zhang, W.B., Chen, W.P., Yin, L., Di, X.P., Chen, D.L., Fu, Q., Zhang, Y.F., and Liu, X.W. (2020). Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit. Sensors, 20.","DOI":"10.3390\/s20195470"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"610","DOI":"10.1109\/JSEN.2015.2483540","article-title":"Comparison of Three Automatic Mode-Matching Methods for Silicon Micro-Gyroscopes Based on Phase Characteristic","volume":"16","author":"Xu","year":"2016","journal-title":"IEEE Sens. J."},{"key":"ref_31","doi-asserted-by":"crossref","unstructured":"Liu, Y.X., Feng, W.L., He, C.H., Wang, L., Dong, L.G., Zhao, Q.C., Yang, Z.C., and Yan, G.Z. (2014, January 13\u201316). Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope. Proceedings of the 9th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems, IEEE-NEMS 2014, Waikiki Beach, HI, USA.","DOI":"10.1109\/NEMS.2014.6908790"},{"key":"ref_32","doi-asserted-by":"crossref","unstructured":"Nitzan, S., Su, T.H., Ahn, C., Ng, E., Hong, V., Yang, Y., Kenny, T., and Horsley, D.A. (2014, January 26\u201330). Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, San Francisco, CA, USA.","DOI":"10.1109\/MEMSYS.2014.6765749"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"6946","DOI":"10.1109\/TIE.2019.2939971","article-title":"Nonlinearity Reduction in Disk Resonator Gyroscopes Based on the Vibration Amplification Effect","volume":"67","author":"Li","year":"2020","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"177","DOI":"10.1109\/JSSC.2015.2496360","article-title":"A 3-Axial Gyroscope for Electronic Stability Control for Continuous Self-Test","volume":"51","author":"Balachandran","year":"2016","journal-title":"IEEE J. Solid State Circuits"},{"key":"ref_35","doi-asserted-by":"crossref","unstructured":"Tseng, K., Li, M., and Li, S. (2020, January 23\u201326). A monolithic triaxial MEMS gyroscope working in air. Proceedings of the IEEE International Symposium on Inertial Sensors and Systems 2020, Hiroshima, Japan.","DOI":"10.1109\/INERTIAL48129.2020.9090013"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/5\/2615\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T18:43:48Z","timestamp":1760121828000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/5\/2615"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,2,27]]},"references-count":35,"journal-issue":{"issue":"5","published-online":{"date-parts":[[2023,3]]}},"alternative-id":["s23052615"],"URL":"https:\/\/doi.org\/10.3390\/s23052615","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,2,27]]}}}