{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,26]],"date-time":"2026-06-26T00:33:03Z","timestamp":1782433983704,"version":"3.54.5"},"reference-count":40,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2023,4,3]],"date-time":"2023-04-03T00:00:00Z","timestamp":1680480000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001691","name":"Japan Society for the Promotion of Science (JSPS)","doi-asserted-by":"publisher","award":["JP18H03780"],"award-info":[{"award-number":["JP18H03780"]}],"id":[{"id":"10.13039\/501100001691","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001691","name":"Japan Society for the Promotion of Science (JSPS)","doi-asserted-by":"publisher","award":["JP21H03809"],"award-info":[{"award-number":["JP21H03809"]}],"id":[{"id":"10.13039\/501100001691","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Hybrid emission filters, comprising an interference filter and an absorption filter, exhibit high excitation light rejection performance and can act as lensless fluorescent devices. However, it has been challenging to produce them in large batches over a large area. In this study, we propose and demonstrate a method for transferring a Si substrate, on which the hybrid filter is deposited, onto an image sensor by attaching it to the sensor and removing the substrate via plasma etching. Through this method, we can transfer uniform filters onto fine micrometer-sized needle devices and millimeter-sized multisensor chips. Optical evaluation reveals that the hybrid filter emits light in the 500 to 560 nm range, close to the emission region of green fluorescent protein (GFP). Furthermore, by observing the fluorescence emission from the microbeads, a spatial resolution of 12.11 \u03bcm is calculated. In vitro experiments confirm that the fabricated device is able to discriminate GFP emission patterns from brain slices.<\/jats:p>","DOI":"10.3390\/s23073695","type":"journal-article","created":{"date-parts":[[2023,4,3]],"date-time":"2023-04-03T02:32:27Z","timestamp":1680489147000},"page":"3695","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-9288-2455","authenticated-orcid":false,"given":"Erus","family":"Rustami","sequence":"first","affiliation":[{"name":"Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma 630-0192, Japan"},{"name":"Department of Physics, Faculty of Mathematics and Natural Sciences, IPB University (Bogor), Kampus IPB Dramaga, Bogor 16680, West Java, Indonesia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5718-3958","authenticated-orcid":false,"given":"Kiyotaka","family":"Sasagawa","sequence":"additional","affiliation":[{"name":"Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma 630-0192, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7313-7962","authenticated-orcid":false,"given":"Kenji","family":"Sugie","sequence":"additional","affiliation":[{"name":"Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma 630-0192, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0333-4626","authenticated-orcid":false,"given":"Yasumi","family":"Ohta","sequence":"additional","affiliation":[{"name":"Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma 630-0192, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7689-1186","authenticated-orcid":false,"given":"Hironari","family":"Takehara","sequence":"additional","affiliation":[{"name":"Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma 630-0192, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7155-9018","authenticated-orcid":false,"given":"Makito","family":"Haruta","sequence":"additional","affiliation":[{"name":"Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma 630-0192, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5669-154X","authenticated-orcid":false,"given":"Hiroyuki","family":"Tashiro","sequence":"additional","affiliation":[{"name":"Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma 630-0192, Japan"},{"name":"Department of Health Sciences, Faculty of Medical Sciences, Kyushu University, 3-1-1, Maidashi, Higashi-ku, Fukuoka 812-8582, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8194-9020","authenticated-orcid":false,"given":"Jun","family":"Ohta","sequence":"additional","affiliation":[{"name":"Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma 630-0192, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2023,4,3]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"9073","DOI":"10.3390\/s91109073","article-title":"Implantable CMOS biomedical devices","volume":"9","author":"Ohta","year":"2009","journal-title":"Sensors"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"158","DOI":"10.1109\/JPROC.2016.2585585","article-title":"Implantable microimaging device for observing brain activities of rodents","volume":"105","author":"Ohta","year":"2016","journal-title":"Proc. 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