{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,6]],"date-time":"2026-02-06T01:33:42Z","timestamp":1770341622605,"version":"3.49.0"},"reference-count":29,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2023,4,7]],"date-time":"2023-04-07T00:00:00Z","timestamp":1680825600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61734007"],"award-info":[{"award-number":["61734007"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62234012"],"award-info":[{"award-number":["62234012"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["2022YFF0706102"],"award-info":[{"award-number":["2022YFF0706102"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["61734007"],"award-info":[{"award-number":["61734007"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["62234012"],"award-info":[{"award-number":["62234012"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2022YFF0706102"],"award-info":[{"award-number":["2022YFF0706102"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This work presents a silicon-based capacitively transduced width extensional mode (WEM) MEMS rectangular plate resonator with quality factor (Q) of over 10,000 at a frequency of greater than 1 GHz. The Q value, determined by various loss mechanisms, was analyzed and quantified via numerical calculation and simulation. The energy loss of high order WEMs is dominated by anchor loss and phonon-phonon interaction dissipation (PPID). High-order resonators possess high effective stiffness, resulting in large motional impedance. To suppress anchor loss and reduce motional impedance, a novel combined tether was designed and comprehensively optimized. The resonators were batch fabricated based on a reliable and simple silicon-on-insulator (SOI)-based fabrication process. The combined tether experimentally contributes to low anchor loss and motional impedance. Especially in the 4th WEM, the resonator with a resonance frequency of 1.1 GHz and a Q of 10,920 was demonstrated, corresponding to the promising f \u00d7 Q product of 1.2 \u00d7 1013. By using combined tether, the motional impedance decreases by 33% and 20% in 3rd and 4th modes, respectively. The WEM resonator proposed in this work has potential application for high-frequency wireless communication systems.<\/jats:p>","DOI":"10.3390\/s23083808","type":"journal-article","created":{"date-parts":[[2023,4,10]],"date-time":"2023-04-10T03:24:18Z","timestamp":1681097058000},"page":"3808","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000"],"prefix":"10.3390","volume":"23","author":[{"given":"Wenli","family":"Liu","sequence":"first","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4691-0304","authenticated-orcid":false,"given":"Yujie","family":"Lu","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zeji","family":"Chen","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Kunming Institute of Physics, Kunming 650223, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2126-7954","authenticated-orcid":false,"given":"Qianqian","family":"Jia","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Junyuan","family":"Zhao","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bo","family":"Niu","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wei","family":"Wang","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yalu","family":"Hao","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yinfang","family":"Zhu","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jinling","family":"Yang","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"},{"name":"State Key Laboratory of Transducer Technology, Shanghai 200050, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fuhua","family":"Yang","sequence":"additional","affiliation":[{"name":"Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"},{"name":"Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,4,7]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"86","DOI":"10.17762\/ijcnis.v14i3.5574","article-title":"Performance Analysis of MEMS Based Oscillator for High Frequency Wireless Communication Systems","volume":"14","author":"Shakir","year":"2022","journal-title":"Int. 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