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electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for in situ TEM characterization, enabling the real-time study of material structure evolution and chemical process mechanisms. This microchip, based on microelectromechanical System (MEMS) technology, is capable of introducing multi-physics stimulation and can be used in conjunction with TEM to investigate the dynamic changes of matter in gas and high-temperature environments. The microchip design ensures a high-temperature uniformity in the sample observation area, and a system of tests was established to verify its performance. Results show that the temperature uniformity of 10 real-time observation windows with a total area of up to 1130 \u03bcm2 exceeded 95%, and the spatial resolution reached the lattice level, even in a flowing atmosphere of 1 bar.<\/jats:p>","DOI":"10.3390\/s23094470","type":"journal-article","created":{"date-parts":[[2023,5,5]],"date-time":"2023-05-05T02:56:51Z","timestamp":1683255411000},"page":"4470","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution"],"prefix":"10.3390","volume":"23","author":[{"given":"Xuelin","family":"Zhang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"},{"name":"School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Yufan","family":"Zhou","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"},{"name":"School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2124-4066","authenticated-orcid":false,"given":"Ying","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"},{"name":"School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Ming","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"},{"name":"School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Haitao","family":"Yu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"},{"name":"School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China"}]},{"given":"Xinxin","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"},{"name":"School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China"}]}],"member":"1968","published-online":{"date-parts":[[2023,5,4]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"e1904094","DOI":"10.1002\/adma.201904094","article-title":"Recent Progress of In Situ Transmission Electron Microscopy for Energy Materials","volume":"32","author":"Zhang","year":"2020","journal-title":"Adv. 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