{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,4]],"date-time":"2026-06-04T15:03:31Z","timestamp":1780585411330,"version":"3.54.1"},"reference-count":32,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2023,5,5]],"date-time":"2023-05-05T00:00:00Z","timestamp":1683244800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"the Shared Research Facilities \u201cResearch of Nanostructured, Carbon and Superhard Materials\u201d FSBI TISNCM"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The application of microwave diamond-based HBAR as a sensor of microwave acoustic attenuation \u03b1 was considered, using the Mo film as an object of research. A multilayered piezoelectric structure, as the Al\/Al0.73Sc0.27N\/Mo\/(100) diamond\/Mo, was produced using aluminum\u2013scandium nitride composition, and was studied in detail for a number of the Mo films with different thicknesses obtained by magnetron deposition. The operational frequency band of 3.3 \u2026 18 GHz was used. It was found that the dependence of the resonant frequency shift vs. the h(Mo) thickness for all the overtones to be investigated was linear. For a given sensor, it was found that the mass sensitivity per unit area rm was equal to \u221226 \u00d7 10\u221212 and \u22128.7 \u00d7 10\u221212 g\/(cm2\u2219Hz) at 6.0 GHz and 18.3 GHz, respectively. The frequency dependencies of quality factor Q, which changed as a result of Mo film deposition, were considered as the basic experimental data. A method for extracting the \u03b1(Mo) values was proposed. The Q-factor under the complete deposition of Mo film was 936 nm, and dropped moderately to ~25%. Such values were enough for an aim of the given experiment. The \u03b1(f) in molybdenum was obtained, and demonstrated a dependence that was close to quadratic, corresponding to the Akhiezer attenuation law.<\/jats:p>","DOI":"10.3390\/s23094502","type":"journal-article","created":{"date-parts":[[2023,5,5]],"date-time":"2023-05-05T08:12:11Z","timestamp":1683274331000},"page":"4502","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Microwave Diamond-Based HBAR as a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-6538-459X","authenticated-orcid":false,"given":"Boris","family":"Sorokin","sequence":"first","affiliation":[{"name":"Federal State Budgetary Institution \u201cTechnological Institute for Superhard and Novel Carbon Materials\u201d (FSBI TISNCM), Troitsk, 108840 Moscow, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7040-3636","authenticated-orcid":false,"given":"Nikita","family":"Asafiev","sequence":"additional","affiliation":[{"name":"Federal State Budgetary Institution \u201cTechnological Institute for Superhard and Novel Carbon Materials\u201d (FSBI TISNCM), Troitsk, 108840 Moscow, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dmitry","family":"Yashin","sequence":"additional","affiliation":[{"name":"Federal State Budgetary Institution \u201cTechnological Institute for Superhard and Novel Carbon Materials\u201d (FSBI TISNCM), Troitsk, 108840 Moscow, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Nikolay","family":"Luparev","sequence":"additional","affiliation":[{"name":"Federal State Budgetary Institution \u201cTechnological Institute for Superhard and Novel Carbon Materials\u201d (FSBI TISNCM), Troitsk, 108840 Moscow, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Anton","family":"Golovanov","sequence":"additional","affiliation":[{"name":"Federal State Budgetary Institution \u201cTechnological Institute for Superhard and Novel Carbon Materials\u201d (FSBI TISNCM), Troitsk, 108840 Moscow, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Konstantin","family":"Kravchuk","sequence":"additional","affiliation":[{"name":"Federal State Budgetary Institution \u201cTechnological Institute for Superhard and Novel Carbon Materials\u201d (FSBI TISNCM), Troitsk, 108840 Moscow, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2023,5,5]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"189","DOI":"10.1016\/j.snb.2005.08.047","article-title":"Characterization of vaccinia virus particles using microscale silicon cantilever resonators and atomic force microscopy","volume":"115","author":"Johnson","year":"2006","journal-title":"Sens. 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