{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,24]],"date-time":"2026-03-24T19:44:54Z","timestamp":1774381494279,"version":"3.50.1"},"reference-count":12,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2023,6,10]],"date-time":"2023-06-10T00:00:00Z","timestamp":1686355200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001659","name":"German Research Foundation (DFG)","doi-asserted-by":"publisher","award":["WA1657\/10-1"],"award-info":[{"award-number":["WA1657\/10-1"]}],"id":[{"id":"10.13039\/501100001659","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001659","name":"German Research Foundation (DFG)","doi-asserted-by":"publisher","award":["WA4555\/2-1"],"award-info":[{"award-number":["WA4555\/2-1"]}],"id":[{"id":"10.13039\/501100001659","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Open Access Publication Fund of Magdeburg University","award":["WA1657\/10-1"],"award-info":[{"award-number":["WA1657\/10-1"]}]},{"name":"Open Access Publication Fund of Magdeburg University","award":["WA4555\/2-1"],"award-info":[{"award-number":["WA4555\/2-1"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>We demonstrate a method for self-sensing of a magnetically actuated prism that can be used, e.g., in a feedback-loop without the need of additional sensors. In order to use the impedance of the actuation coils as a measurement parameter, we first obtained the optimal measurement frequency that is well separated from the actuation frequencies and at the same time provides the best compromise between sensitivity to the position and robustness. We then developed a combined actuation and measurement driver, and correlated its output signal to the mechanical state of the prism using a defined calibration sequence. We demonstrate that we can reliably measure the state of each actuator and determine the tilt angle of the prism with an accuracy of \u00b10.1\u2218 in the polar angle over a range of \u00b14\u2218 and \u00b120 mrad in the azimuthal angle.<\/jats:p>","DOI":"10.3390\/s23125493","type":"journal-article","created":{"date-parts":[[2023,6,12]],"date-time":"2023-06-12T02:28:42Z","timestamp":1686536922000},"page":"5493","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Self-Sensing of a Magnetically Actuated Prism"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-6228-4473","authenticated-orcid":false,"given":"Pascal M.","family":"Weber","sequence":"first","affiliation":[{"name":"Laboratory for Microactuators, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79085 Freiburg, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0532-1519","authenticated-orcid":false,"given":"Ulrike","family":"Wallrabe","sequence":"additional","affiliation":[{"name":"Laboratory for Microactuators, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79085 Freiburg, Germany"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1324-1615","authenticated-orcid":false,"given":"Matthias C.","family":"Wapler","sequence":"additional","affiliation":[{"name":"Laboratory for Microsystems Engineering for Medical Engineering, Faculty of Electrical Engineering and Information Technology, Otto-von-Guericke University Magdeburg, 39016 Magdeburg, Germany"}]}],"member":"1968","published-online":{"date-parts":[[2023,6,10]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"095004","DOI":"10.1088\/1361-665X\/ab8a00","article-title":"Piezo-actuated adaptive prisms for continuously adjustable bi-axial scanning","volume":"29","author":"Lemke","year":"2020","journal-title":"Smart Mater. Struct."},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Weber, P.M., Wapler, M.C., Lemke, F., and Wallrabe, U. (2021, January 20\u201325). Bi-Axial Magnetically Actuated Tunable Prism. Proceedings of the 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA.","DOI":"10.1109\/Transducers50396.2021.9495513"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"024501","DOI":"10.1117\/1.JOM.1.2.024501","article-title":"3D-scanning microscopy with adaptive lenses and prisms for zebrafish studies","volume":"1","author":"Wang","year":"2021","journal-title":"J. Opt. Microsyst."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"30653","DOI":"10.1364\/OE.21.030653","article-title":"Interferometric velocity measurements through a fluctuating gas-liquid interface employing adaptive optics","volume":"21","author":"Leithold","year":"2013","journal-title":"Opt. Express"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"3702","DOI":"10.1364\/OL.36.003702","article-title":"Closed-loop adaptive optics with a single element for wavefront sensing and correction","volume":"36","author":"Arines","year":"2011","journal-title":"Opt. Lett."},{"key":"ref_6","first-page":"158","article-title":"Advances and technologies of galvanometer-based optical scanners","volume":"Volume 3787","author":"Beiser","year":"1999","journal-title":"Proceedings of the Optical Scanning: Design and Application"},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Frigerio, P., Molinari, L., Barbieri, A., Carminati, R., Boni, N., and Langfelder, G. (2021, January 20\u201325). Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection. Proceedings of the 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA.","DOI":"10.1109\/Transducers50396.2021.9495680"},{"key":"ref_8","unstructured":"Weber, P.M., Gowda1, H.G.B., Wallrabe, U., and Wapler, M.C. (2021, January 2\u20135). All in one: Tunable prism and lens in a single element. Proceedings of the 2021 International Symposium on Optomechatronic Technology (ISOT), Besancon, France."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"343","DOI":"10.1016\/j.sna.2007.10.076","article-title":"A self-sensing dielectric elastomer actuator","volume":"143","author":"Jung","year":"2008","journal-title":"Sens. Actuators A Phys."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1276","DOI":"10.1109\/20.250632","article-title":"Self-sensing active magnetic levitation","volume":"29","author":"Vischer","year":"1993","journal-title":"IEEE Trans. Magn."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"166","DOI":"10.1177\/1045389X9200300109","article-title":"A Self-Sensing Piezoelectric Actuator for Collocated Control","volume":"3","author":"Dosch","year":"1992","journal-title":"J. Intell. Mater. Syst. Struct."},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"K\u00f6nig, N., Carbon, Y., Nienhaus, M., and Grasso, E. (2021). A Self-Sensing Method for Electromagnetic Actuators with Hysteresis Compensation. Energies, 14.","DOI":"10.3390\/en14206706"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/12\/5493\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T19:52:25Z","timestamp":1760125945000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/12\/5493"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,6,10]]},"references-count":12,"journal-issue":{"issue":"12","published-online":{"date-parts":[[2023,6]]}},"alternative-id":["s23125493"],"URL":"https:\/\/doi.org\/10.3390\/s23125493","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,6,10]]}}}