{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,23]],"date-time":"2026-01-23T00:28:18Z","timestamp":1769128098401,"version":"3.49.0"},"reference-count":53,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2023,6,14]],"date-time":"2023-06-14T00:00:00Z","timestamp":1686700800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"KIMM institutional program","award":["NK242F, RS-2023-00226471"],"award-info":[{"award-number":["NK242F, RS-2023-00226471"]}]},{"name":"KIMM institutional program","award":["2022R1A3B1078163"],"award-info":[{"award-number":["2022R1A3B1078163"]}]},{"name":"KIMM institutional program","award":["2022R1A4A1031182"],"award-info":[{"award-number":["2022R1A4A1031182"]}]},{"name":"NST\/KIMM","award":["NK242F, RS-2023-00226471"],"award-info":[{"award-number":["NK242F, RS-2023-00226471"]}]},{"name":"NST\/KIMM","award":["2022R1A3B1078163"],"award-info":[{"award-number":["2022R1A3B1078163"]}]},{"name":"NST\/KIMM","award":["2022R1A4A1031182"],"award-info":[{"award-number":["2022R1A4A1031182"]}]},{"DOI":"10.13039\/501100003725","name":"Ministry of Education","doi-asserted-by":"publisher","award":["NK242F, RS-2023-00226471"],"award-info":[{"award-number":["NK242F, RS-2023-00226471"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003725","name":"Ministry of Education","doi-asserted-by":"publisher","award":["2022R1A3B1078163"],"award-info":[{"award-number":["2022R1A3B1078163"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003725","name":"Ministry of Education","doi-asserted-by":"publisher","award":["2022R1A4A1031182"],"award-info":[{"award-number":["2022R1A4A1031182"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"publisher","award":["NK242F, RS-2023-00226471"],"award-info":[{"award-number":["NK242F, RS-2023-00226471"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"publisher","award":["2022R1A3B1078163"],"award-info":[{"award-number":["2022R1A3B1078163"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"publisher","award":["2022R1A4A1031182"],"award-info":[{"award-number":["2022R1A4A1031182"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This study identified time-varying harmonic characteristics in a high-density plasma (HDP) chemical vapor deposition (CVD) chamber by depositing low-k oxide (SiOF). The characteristics of harmonics are caused by the nonlinear Lorentz force and the nonlinear nature of the sheath. In this study, a noninvasive directional coupler was used to collect harmonic power in the forward and reverse directions, which were low frequency (LF) and high bias radio frequency (RF). The intensity of the 2nd and 3rd harmonics responded to the LF power, pressure, and gas flow rate introduced for plasma generation. Meanwhile, the intensity of the 6th harmonic responded to the oxygen fraction in the transition step. The intensity of the 7th (forward) and 10th (in reverse) harmonic of the bias RF power depended on the underlying layers (silicon rich oxide (SRO) and undoped silicate glass (USG)) and the deposition of the SiOF layer. In particular, the 10th (reverse) harmonic of the bias RF power was identified using electrodynamics in a double capacitor model of the plasma sheath and the deposited dielectric material. The plasma-induced electronic charging effect on the deposited film resulted in the time-varying characteristic of the 10th harmonic (in reverse) of the bias RF power. The wafer-to-wafer consistency and stability of the time-varying characteristic were investigated. The findings of this study can be applied to in situ diagnosis of SiOF thin film deposition and optimization of the deposition process.<\/jats:p>","DOI":"10.3390\/s23125563","type":"journal-article","created":{"date-parts":[[2023,6,14]],"date-time":"2023-06-14T02:26:56Z","timestamp":1686709616000},"page":"5563","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD"],"prefix":"10.3390","volume":"23","author":[{"given":"Yonggyun","family":"Park","sequence":"first","affiliation":[{"name":"School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0009-0003-0717-8098","authenticated-orcid":false,"given":"Pengzhan","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Seunghwan","family":"Lee","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jinill","family":"Cho","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Eric","family":"Joo","sequence":"additional","affiliation":[{"name":"ComdelKorea, Ltd., 120 Heungdeokjungang-ro, Giheung-gu, Yongin 16950, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0018-9603","authenticated-orcid":false,"given":"Hyeong-U","family":"Kim","sequence":"additional","affiliation":[{"name":"Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Taesung","family":"Kim","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea"},{"name":"SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon 16419, Republic of Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,6,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"058203","DOI":"10.1063\/1.5026805","article-title":"Perspective: New process technologies required for future devices and scaling","volume":"6","author":"Clark","year":"2018","journal-title":"APL Mater."},{"key":"ref_2","unstructured":"Tilke, A., Culmsee, M., Jaiswal, R., Hampp, R., Conti, R., Galiano, M., Stapelmann, C., Wille, W., and Jain, A. 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