{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,29]],"date-time":"2026-04-29T20:42:39Z","timestamp":1777495359527,"version":"3.51.4"},"reference-count":71,"publisher":"MDPI AG","issue":"13","license":[{"start":{"date-parts":[[2023,6,26]],"date-time":"2023-06-26T00:00:00Z","timestamp":1687737600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61905063"],"award-info":[{"award-number":["61905063"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["F2020202055"],"award-info":[{"award-number":["F2020202055"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Natural Science Foundation of Hebei Province, China","award":["61905063"],"award-info":[{"award-number":["61905063"]}]},{"name":"Natural Science Foundation of Hebei Province, China","award":["F2020202055"],"award-info":[{"award-number":["F2020202055"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Silicon-based Lidar is an ideal way to reduce the volume of the Lidar and realize monolithic integration. It removes the moving parts in the conventional device and realizes solid-state beam steering. The advantages of low cost, small size, and high beam steering speed have attracted the attention of many researchers. In order to facilitate researchers to quickly understand the research progress and direction, this paper mainly describes the research progress of silicon-based integrated Lidar, including silicon-based optical phased array Lidar, silicon-based optical switch array Lidar, and continuous frequency-modulated wave Lidar. In addition, we also introduced the scanning modes and working principles of other kinds of Lidar, such as the Micro-Electro-Mechanical System, mechanical Lidar, etc., and analyzed the characteristics of the Lidars above. Finally, we summarized this paper and put forward the future expectations of silicon-based integrated Lidar.<\/jats:p>","DOI":"10.3390\/s23135920","type":"journal-article","created":{"date-parts":[[2023,6,27]],"date-time":"2023-06-27T02:11:22Z","timestamp":1687831882000},"page":"5920","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":25,"title":["Advances in Silicon-Based Integrated Lidar"],"prefix":"10.3390","volume":"23","author":[{"given":"Mingxuan","family":"Hu","sequence":"first","affiliation":[{"name":"Center for Advanced Laser Technology, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China"},{"name":"Hebei Key Laboratory of Advanced Laser Technology and Equipment, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yajun","family":"Pang","sequence":"additional","affiliation":[{"name":"Center for Advanced Laser Technology, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China"},{"name":"Hebei Key Laboratory of Advanced Laser Technology and Equipment, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Long","family":"Gao","sequence":"additional","affiliation":[{"name":"Beijing Institute of Space Mechanics & Electricity, Beijing 100094, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,6,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"493","DOI":"10.1038\/187493a0","article-title":"Stimulated Optical Radiation in Ruby","volume":"187","author":"Maiman","year":"1960","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Lee, J., Shin, D., Jang, B., Byun, H., Lee, C., Shin, C., Hwang, I., Shim, D., Lee, E., and Kim, J. (2020, January 12\u201318). Single-Chip Beam Scanner with Integrated Light Source for Real-Time Light Detection and Ranging. Proceedings of the 2020 IEEE International Electron Devices Meeting, San Francisco, CA, USA.","DOI":"10.1109\/IEDM13553.2020.9371987"},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Haider, A., Cho, Y., Pigniczki, M., K\u00f6hler, M.H., Haas, L., Kastner, L., Fink, M., Schardt, M., Cichy, Y., and Koyama, S. (2023). Performance Evaluation of MEMS-Based Automotive LiDAR Sensor and Its Simulation Model as per ASTM E3125-17 Standard. Sensors, 23.","DOI":"10.3390\/s23063113"},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Baier, V., Schardt, M., Fink, M., Jakobi, M., and Koch, A.W. (2022). MEMS-Scanner Testbench for High Field of View LiDAR Applications. Sensors, 22.","DOI":"10.3390\/s22010039"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Li, R., Liu, J., Zhang, L., and Hang, Y. (2014, January 16\u201317). Lidar\/Mems Imu Integrated Navigation (Slam) Method for a Small Uav in Indoor Environments. Proceedings of the 2014 DGON inertial sensors and systems (ISS), Karlsruhe, Germany.","DOI":"10.1109\/InertialSensors.2014.7049479"},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Stann, B.L., Dammann, J.F., Giza, M.M., Jian, P.S., Lawler, W.B., Nguyen, H.M., and Sadler, L.C. (2010, January 29). Mems-Scanned Ladar Sensor for Small Ground Robots. Proceedings of the Laser Radar Technology and Applications XV, Orlando, FL, USA.","DOI":"10.1117\/12.850388"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"70","DOI":"10.1007\/s38311-018-0102-z","article-title":"Lidar as a Key Technology for Automated and Autonomous Driving","volume":"120","author":"Barth","year":"2018","journal-title":"ATZ Worldw."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"2100511","DOI":"10.1002\/lpor.202100511","article-title":"A Progress Review on Solid-State Lidar and Nanophotonics-Based Lidar Sensors","volume":"16","author":"Li","year":"2022","journal-title":"Laser Photonics Rev."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Garc\u00eda-G\u00f3mez, P., Royo, S., Rodrigo, N., and Casas, J.R. (2020). Geometric Model and Calibration Method for a Solid-State LiDAR. Sensors, 20.","DOI":"10.3390\/s20102898"},{"key":"ref_10","first-page":"50","article-title":"Lidar for Autonomous Driving: The Principles, Challenges, and Trends for Automotive Lidar and Perception Systems","volume":"37","author":"Li","year":"2020","journal-title":"IEEE Signal Process. Mag."},{"key":"ref_11","first-page":"B3","article-title":"Advances of Flash Lidar Development Onboard Uav","volume":"39","author":"Zhou","year":"2012","journal-title":"Int. Arch. Photogramm. Remote Sens. Spat. Inf. Sci."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"193","DOI":"10.13176\/11.315","article-title":"Object Identification in 3d Flash Lidar Images","volume":"2","author":"Crosby","year":"2011","journal-title":"J. Pattern Recognit. Res."},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Raj, T., Hashim, F.H., Huddin, A.B., Ibrahim, M.F., and Hussain, A. (2020). A Survey on Lidar Scanning Mechanisms. Electronics, 9.","DOI":"10.3390\/electronics9050741"},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Poulton, C.V., Byrd, M.J., Timurdogan, E., Russo, P., Vermeulen, D., and Watts, M.R. (2018, January 29\u201331). Optical Phased Arrays for Integrated Beam Steering. Proceedings of the 2018 IEEE 15th International Conference on Group IV Photonics (GFP), Cancun, Mexico.","DOI":"10.1109\/GROUP4.2018.8478729"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"887","DOI":"10.1364\/OPTICA.3.000887","article-title":"High-Resolution Aliasing-Free Optical Beam Steering","volume":"3","author":"Hutchison","year":"2016","journal-title":"Optica"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"4","DOI":"10.1002\/lpor.202200571","article-title":"A Review of Silicon-Based Integrated Optical Switches","volume":"17","author":"Chen","year":"2023","journal-title":"Laser Photonics Rev."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"836","DOI":"10.1364\/OL.41.000836","article-title":"Low-Loss and Broadband 2 \u00d7 2 Silicon Thermo-Optic Mach\u2013Zehnder Switch with Bent Directional Couplers","volume":"41","author":"Chen","year":"2016","journal-title":"Opt. Lett."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"1192","DOI":"10.1109\/50.774253","article-title":"High-Extinction Ratio and Low-Loss Silica-Based 8 \u00d7 8 Strictly Nonblocking Thermooptic Matrix Switch","volume":"17","author":"Goh","year":"1999","journal-title":"J. Light. Technol."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"6603209","DOI":"10.1109\/JPHOT.2019.2941960","article-title":"Silicon Non-Blocking 4 \u00d7 4 Optical Switch Chip Integrated with Both Thermal and Electro-Optic Tuners","volume":"11","author":"Lu","year":"2019","journal-title":"IEEE Photonics J."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"10","DOI":"10.1117\/1.1330700","article-title":"Laser Ranging: A Critical Review of Unusual Techniques for Distance Measurement","volume":"40","author":"Amann","year":"2001","journal-title":"Opt. Eng."},{"key":"ref_21","unstructured":"English, C., Zhu, S., Smith, C., Ruel, S., and Christie, I. (2005, January 5\u20138). Tridar: A Hybrid Sensor for Exploiting the Complimentary Nature of Triangulation and Lidar Technologies. Proceedings of the 8th International Symposium on Artificial Intelligence, Robotics and Automation in Space, Munich, Germany."},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Liu, J., Sun, Q., Fan, Z., and Jia, Y. (2018, January 4\u20137). TOF Lidar Development in Autonomous Vehicle. Proceedings of the 2018 IEEE 3rd Optoelectronics Global Conference (OGC), Shenzhen, China.","DOI":"10.1109\/OGC.2018.8529992"},{"key":"ref_23","first-page":"111430C","article-title":"LIDAR\u2013A new (self-driving) vehicle for introducing optics to broader engineering and non-engineering audiences","volume":"11143","author":"Rablau","year":"2019","journal-title":"Educ. Train. Opt. Photonics."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"390","DOI":"10.1109\/3.910448","article-title":"Solid-State Time-of-Flight Range Camera","volume":"37","author":"Lange","year":"2001","journal-title":"IEEE J. Quantum Electron."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"9654","DOI":"10.1364\/AO.54.009654","article-title":"Application of Lidar Techniques to Time-of-Flight Range Imaging","volume":"54","author":"Whyte","year":"2015","journal-title":"Appl. Opt."},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Wang, X., Xu, T., An, D., Sun, L., Wang, Q., Pan, Z., and Yue, Y. (2023). Face Mask Identification Using Spatial and Frequency Features in Depth Image from Time-of-Flight Camera. Sensors, 23.","DOI":"10.3390\/s23031596"},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Gu, Y., Cheng, H., Wang, K., Dou, D., Xu, C., and Kong, H. (2022, January 23\u201327). Learning Moving-Object Tracking with Fmcw Lidar. Proceedings of the 2022 IEEE\/RSJ International Conference on Intelligent Robots and Systems (IROS), Kyoto, Japan.","DOI":"10.1109\/IROS47612.2022.9981346"},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Dieckmann, A., and Amann, M.C. (1994, January 23). Fmcw-Lidar with Tunable Twin-Guide Laser Diode. Proceedings of the Industrial Applications of Laser Radar, San Diego, CA, USA.","DOI":"10.1007\/978-94-011-0035-9_40"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"135","DOI":"10.1109\/MCOM.2017.1700030","article-title":"Lidar System Architectures and Circuits","volume":"55","author":"Behroozpour","year":"2017","journal-title":"IEEE Commun. Mag."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"107283","DOI":"10.1016\/j.optlaseng.2022.107283","article-title":"Simultaneous Distance and Vibration Mapping of Fmcw-Lidar with Akinetic External Cavity Diode Laser","volume":"160","author":"Jang","year":"2023","journal-title":"Opt. Lasers Eng."},{"key":"ref_31","first-page":"8300416","article-title":"A Review and Perspective on Optical Phased Array for Automotive Lidar","volume":"27","author":"Hsu","year":"2020","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"93","DOI":"10.1515\/nanoph-2015-0152","article-title":"Highly Integrated Optical Phased Arrays: Photonic Integrated Circuits for Optical Beam Shaping and Beam Steering","volume":"6","author":"Heck","year":"2017","journal-title":"Nanophotonics"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"040503","DOI":"10.1117\/1.2902475","article-title":"Fabrication of Irregular Optical Phased Arrays on Silicon-on-Insulator Wafers","volume":"47","author":"Xiao","year":"2008","journal-title":"Opt. Eng."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"1477","DOI":"10.1364\/OL.34.001477","article-title":"Off-Chip Beam Steering with a One-Dimensional Optical Phased Array on Silicon-on-Insulator","volume":"34","author":"Bogaerts","year":"2009","journal-title":"Opt. Lett."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"13655","DOI":"10.1364\/OE.18.013655","article-title":"Two-Dimensional Optical Phased Array Antenna on Silicon-on-Insulator","volume":"18","author":"Rogier","year":"2010","journal-title":"Opt. Express"},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"21595","DOI":"10.1364\/OE.19.021595","article-title":"Two-Dimensional Free-Space Beam Steering with an Optical Phased Array on Silicon-on-Insulator","volume":"19","author":"Doylend","year":"2011","journal-title":"Opt. Express"},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"051104","DOI":"10.1063\/1.3619847","article-title":"1 \u00d7 12 Unequally Spaced Waveguide Array for Actively Tuned Optical Phased Array on a Silicon Nanomembrane","volume":"99","author":"Kwong","year":"2011","journal-title":"Appl. Phys. Lett."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"3500","DOI":"10.1109\/JLT.2011.2171477","article-title":"One-Dimensional Off-Chip Beam Steering and Shaping Using Optical Phased Arrays on Silicon-on-Insulator","volume":"29","author":"Komorowska","year":"2011","journal-title":"J. Light. Technol."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"1270","DOI":"10.1109\/LPT.2011.2159785","article-title":"Two-Dimensional Dispersive Off-Chip Beam Scanner Fabricated on Silicon-on-Insulator","volume":"23","author":"Bogaerts","year":"2011","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"4575","DOI":"10.1364\/OL.39.004575","article-title":"Integrated Phased Array for Wide-Angle Beam Steering","volume":"39","author":"Yaacobi","year":"2014","journal-title":"Opt. Lett."},{"key":"ref_41","doi-asserted-by":"crossref","unstructured":"Poulton, C.V., Yaacobi, A., Su, Z., Byrd, M.J., and Watts, M.R. (2016, January 18\u201320). Optical Phased Array with Small Spot Size, High Steering Range and Grouped Cascaded Phase Shifters. Proceedings of the Integrated Photonics Research, Silicon and Nanophotonics, Vancouver, Canada.","DOI":"10.1364\/IPRSN.2016.IW1B.2"},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"7700108","DOI":"10.1109\/JSTQE.2019.2908555","article-title":"Long-Range Lidar and Free-Space Data Communication with High-Performance Optical Phased Arrays","volume":"25","author":"Poulton","year":"2019","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_43","doi-asserted-by":"crossref","unstructured":"Bhargava, P., Kim, T., Poulton, C.V., Notaros, J., Yaacobi, A., Timurdogan, E., Baiocco, C., Fahrenkopf, N., Kruger, S., and Ngai, T. (2019, January 9\u201314). Fully Integrated Coherent Lidar in 3d-Integrated Silicon Photonics\/65nm Cmos. Proceedings of the 2019 Symposium on VLSI Circuits, Kyoto, Japan.","DOI":"10.23919\/VLSIC.2019.8778154"},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"3","DOI":"10.1364\/OPTICA.7.000003","article-title":"Large-Scale Optical Phased Array Using a Low-Power Multi-Pass Silicon Photonic Platform","volume":"7","author":"Miller","year":"2020","journal-title":"Optica"},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"6620905","DOI":"10.1109\/JPHOT.2022.3153507","article-title":"Dual Polarization and Bi-Directional Silicon-Photonic Optical Phased Array with Large Scanning Range","volume":"14","author":"Zhao","year":"2022","journal-title":"IEEE Photonics J."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"2528","DOI":"10.1364\/OE.26.002528","article-title":"On-Chip Platform for a Phased Array with Minimal Beam Divergence and Wide Field-of-View","volume":"26","author":"Zadka","year":"2018","journal-title":"Opt. Express"},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"3642","DOI":"10.1364\/OE.27.003642","article-title":"Heterogeneous Silicon Photonics Sensing for Autonomous Cars","volume":"27","author":"Xie","year":"2019","journal-title":"Opt. Express"},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"912","DOI":"10.1364\/PRJ.387376","article-title":"Design and Fabrication of a Sin-Si Dual-Layer Optical Phased Array Chip","volume":"8","author":"Wang","year":"2020","journal-title":"Photonics Res."},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"4402","DOI":"10.1109\/JLT.2021.3070386","article-title":"Hybrid Integrated Silicon Nitride\u2013Polymer Optical Phased Array for Efficient Light Detection and Ranging","volume":"39","author":"Im","year":"2021","journal-title":"J. Light. Technol."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"5008","DOI":"10.1364\/OE.446733","article-title":"Two-Dimensional Multi-Layered Sin-on-Soi Optical Phased Array with Wide-Scanning and Long-Distance Ranging","volume":"30","author":"Zhang","year":"2022","journal-title":"Opt. Express"},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"940","DOI":"10.1109\/68.593358","article-title":"Silicon-on-Insulator (Soi) Phased-Array Wavelength Multi\/Demultiplexer with Extremely Low-Polarization Sensitivity","volume":"9","author":"Trinh","year":"1997","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"5429","DOI":"10.1364\/AO.44.005429","article-title":"Optical Phased-Array Beam Steering Controlled by Wavelength","volume":"44","author":"Xiao","year":"2005","journal-title":"Appl. Opt."},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"1945","DOI":"10.1016\/j.optcom.2007.12.009","article-title":"Cascade Arrangement of Irregular Optical Phased Arrays","volume":"281","author":"Xiao","year":"2008","journal-title":"Opt. Commun."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"11622","DOI":"10.1364\/OE.14.011622","article-title":"High Efficiency Silicon-on-Insulator Grating Coupler Based on a Poly-Silicon Overlay","volume":"14","author":"Roelkens","year":"2006","journal-title":"Opt. Express"},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"195","DOI":"10.1038\/nature11727","article-title":"Large-Scale Nanophotonic Phased Array","volume":"493","author":"Sun","year":"2013","journal-title":"Nature"},{"key":"ref_56","doi-asserted-by":"crossref","first-page":"10457","DOI":"10.1364\/OE.17.010457","article-title":"Compact and Low Power Thermo-Optic Switch Using Folded Silicon Waveguides","volume":"17","author":"Densmore","year":"2009","journal-title":"Opt. Express"},{"key":"ref_57","doi-asserted-by":"crossref","unstructured":"Chaintoutis, C., Shariati, B., Bogris, A., Dijk, P.V., Roeloffzen, C.G., Bourderionnet, J., Tomkos, I., and Syvridis, D. (2018). Free Space Intra-Datacenter Interconnects Based on 2d Optical Beam Steering Enabled by Photonic Integrated Circuits. Photonics, 5.","DOI":"10.1364\/OFC.2018.Tu2I.7"},{"key":"ref_58","doi-asserted-by":"crossref","unstructured":"Li, C., Cao, X., Wu, K., Li, X., and Chen, J. (2019, January 5\u201310). A Switch-Based Integrated 2d Beam-Steering Device for Lidar Application. Proceedings of the CLEO: QELS_Fundamental Science, San Jose, CA, USA.","DOI":"10.1364\/CLEO_AT.2019.JTh2A.73"},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"256","DOI":"10.1038\/s41586-021-03259-y","article-title":"A universal 3D imaging sensor on a silicon photonics platform","volume":"590","author":"Rogers","year":"2021","journal-title":"Nature"},{"key":"ref_60","doi-asserted-by":"crossref","unstructured":"L\u00f3pez, J.J., Skirlo, S.A., Kharas, D., Sloan, J., Herd, J., Juodawlkis, P., Solja\u010di\u0107, M., and Sorace-Agaskar, C. (2018, January 13\u201318). Planar-Lens Enabled Beam Steering for Chip-Scale Lidar. Proceedings of the 2018 Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA.","DOI":"10.1364\/CLEO_SI.2018.SM3I.1"},{"key":"ref_61","doi-asserted-by":"crossref","first-page":"47","DOI":"10.1364\/OPTICA.381484","article-title":"Wide beam steering by slow-light waveguide gratings and a prism lens","volume":"7","author":"Ito","year":"2020","journal-title":"Optica"},{"key":"ref_62","doi-asserted-by":"crossref","first-page":"253","DOI":"10.1038\/s41586-022-04415-8","article-title":"A Large-Scale Microelectromechanical-Systems-Based Silicon Photonics Lidar","volume":"603","author":"Zhang","year":"2022","journal-title":"Nature"},{"key":"ref_63","doi-asserted-by":"crossref","first-page":"4091","DOI":"10.1364\/OL.42.004091","article-title":"Coherent Solid-State Lidar with Silicon Photonic Optical Phased Arrays","volume":"42","author":"Poulton","year":"2017","journal-title":"Opt. Lett."},{"key":"ref_64","doi-asserted-by":"crossref","first-page":"4640","DOI":"10.1109\/JLT.2018.2840223","article-title":"Photonic Integrated Circuit-Based Fmcw Coherent Lidar","volume":"36","author":"Martin","year":"2018","journal-title":"J. Light. Technol."},{"key":"ref_65","doi-asserted-by":"crossref","first-page":"9965","DOI":"10.1364\/OE.27.009965","article-title":"Laser Frequency Sweep Linearization by Iterative Learning Pre-Distortion for Fmcw Lidar","volume":"27","author":"Zhang","year":"2019","journal-title":"Opt. Express"},{"key":"ref_66","doi-asserted-by":"crossref","first-page":"126066","DOI":"10.1016\/j.optcom.2020.126066","article-title":"Simultaneous Measurements of Velocity and Distance via a Dual-Path Fmcw Lidar System","volume":"474","author":"Zhang","year":"2020","journal-title":"Opt. Commun."},{"key":"ref_67","doi-asserted-by":"crossref","first-page":"16547","DOI":"10.1364\/OE.418003","article-title":"Solid-State Fmcw Lidar with Two-Dimensional Spectral Scanning Using a Virtually Imaged Phased Array","volume":"29","author":"Li","year":"2021","journal-title":"Opt. Express"},{"key":"ref_68","doi-asserted-by":"crossref","unstructured":"Cao, X., Wu, K., Li, C., Long, J., Zhang, G., and Chen, J. (2021, January 24\u201327). All Solid-State Lidar Based on Lens Assisted Beam Steering and Frequency-Modulated Continuous Wave Ranging. Proceedings of the Asia Communications and Photonics Conference, Shanghai, China.","DOI":"10.1364\/ACPC.2021.T4A.218"},{"key":"ref_69","doi-asserted-by":"crossref","first-page":"8300208","DOI":"10.1109\/JSTQE.2022.3157824","article-title":"Silicon Photonics Fmcw Lidar Chip with a Slow-Light Grating Beam Scanner","volume":"28","author":"Baba","year":"2022","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_70","doi-asserted-by":"crossref","first-page":"2763","DOI":"10.1109\/JLT.2022.3145711","article-title":"Fully Integrated Fmcw Lidar Optical Engine on a Single Silicon Chip","volume":"40","author":"Sayyah","year":"2022","journal-title":"J. Light. Technol."},{"key":"ref_71","doi-asserted-by":"crossref","first-page":"164","DOI":"10.1038\/s41586-020-2239-3","article-title":"Massively Parallel Coherent Laser Ranging Using a Soliton Microcomb","volume":"581","author":"Riemensberger","year":"2020","journal-title":"Nature"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/13\/5920\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T20:01:04Z","timestamp":1760126464000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/23\/13\/5920"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,6,26]]},"references-count":71,"journal-issue":{"issue":"13","published-online":{"date-parts":[[2023,7]]}},"alternative-id":["s23135920"],"URL":"https:\/\/doi.org\/10.3390\/s23135920","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,6,26]]}}}