{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,28]],"date-time":"2026-07-28T13:49:28Z","timestamp":1785246568632,"version":"3.55.0"},"reference-count":143,"publisher":"MDPI AG","issue":"13","license":[{"start":{"date-parts":[[2023,6,26]],"date-time":"2023-06-26T00:00:00Z","timestamp":1687737600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"JST A-STEP program","award":["15K13966"],"award-info":[{"award-number":["15K13966"]}]},{"name":"JST A-STEP program","award":["JP19K15023"],"award-info":[{"award-number":["JP19K15023"]}]},{"name":"JST A-STEP program","award":["JP21K04151"],"award-info":[{"award-number":["JP21K04151"]}]},{"name":"JST Collaborative Research Based on Industrial Demand","award":["15K13966"],"award-info":[{"award-number":["15K13966"]}]},{"name":"JST Collaborative Research Based on Industrial Demand","award":["JP19K15023"],"award-info":[{"award-number":["JP19K15023"]}]},{"name":"JST Collaborative Research Based on Industrial Demand","award":["JP21K04151"],"award-info":[{"award-number":["JP21K04151"]}]},{"name":"KAKENHI from JSPS","award":["15K13966"],"award-info":[{"award-number":["15K13966"]}]},{"name":"KAKENHI from JSPS","award":["JP19K15023"],"award-info":[{"award-number":["JP19K15023"]}]},{"name":"KAKENHI from JSPS","award":["JP21K04151"],"award-info":[{"award-number":["JP21K04151"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sensitive terahertz (THz) detection. The MEMS resonator absorbs THz radiation and induces a temperature rise, leading to a shift in its resonance frequency. This frequency shift is proportional to the amount of THz radiation absorbed by the resonator and can be detected and quantified, thereby allowing the THz radiation to be measured. In this review, we present an overview of the THz bolometer based on the doubly clamped MEMS beam resonators in the aspects of working principle, readout, detection speed, sensitivity, and attempts at improving the performance. This allows one to have a comprehensive view of such a novel THz detector.<\/jats:p>","DOI":"10.3390\/s23135938","type":"journal-article","created":{"date-parts":[[2023,6,27]],"date-time":"2023-06-27T02:11:22Z","timestamp":1687831882000},"page":"5938","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":19,"title":["Terahertz Detectors Using Microelectromechanical System Resonators"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-1533-4372","authenticated-orcid":false,"given":"Chao","family":"Li","sequence":"first","affiliation":[{"name":"Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi 184-8588, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6108-5261","authenticated-orcid":false,"given":"Ya","family":"Zhang","sequence":"additional","affiliation":[{"name":"Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi 184-8588, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kazuhiko","family":"Hirakawa","sequence":"additional","affiliation":[{"name":"Institute of Industrial Science, University of Tokyo, Meguro-ku 153-8505, Japan"},{"name":"Institute for Nano Quantum Information Electronics, University of Tokyo, Meguro-ku 153-8505, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2023,6,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"910","DOI":"10.1109\/22.989974","article-title":"Terahertz Technology","volume":"50","author":"Siegel","year":"2002","journal-title":"IEEE Trans. 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