{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T02:23:32Z","timestamp":1760149412402,"version":"build-2065373602"},"reference-count":25,"publisher":"MDPI AG","issue":"15","license":[{"start":{"date-parts":[[2023,7,31]],"date-time":"2023-07-31T00:00:00Z","timestamp":1690761600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Ministry of Science and Technology in Taiwan","award":["MOST 110-2622-E-020-001"],"award-info":[{"award-number":["MOST 110-2622-E-020-001"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved via annealing at 500 \u00b0C for 4 h. The voltage response of the fabricated sensors is evaluated experimentally for a substrate thickness of 1 \u00b5m over a sensing range of 30 cm. The results show that the voltage signal varies as an inverse exponential function of the distance. A positioning system based on three infrared sensors is implemented in LabVIEW. It is shown that the position estimates obtained using the proposed system are in excellent agreement with the actual locations. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors.<\/jats:p>","DOI":"10.3390\/s23156818","type":"journal-article","created":{"date-parts":[[2023,7,31]],"date-time":"2023-07-31T10:08:14Z","timestamp":1690798094000},"page":"6818","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Positioning System of Infrared Sensors Based on ZnO Thin Film"],"prefix":"10.3390","volume":"23","author":[{"given":"Chia-Yu","family":"Tsai","sequence":"first","affiliation":[{"name":"Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan"}]},{"given":"Yan-Wen","family":"Lin","sequence":"additional","affiliation":[{"name":"Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan"}]},{"given":"Hong-Ming","family":"Ku","sequence":"additional","affiliation":[{"name":"Department of Chemical Engineering, King Mongkut\u2019s University of Technology Thonburi, Bangkok 10140, Thailand"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2441-1168","authenticated-orcid":false,"given":"Chia-Yen","family":"Lee","sequence":"additional","affiliation":[{"name":"Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan"}]}],"member":"1968","published-online":{"date-parts":[[2023,7,31]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"87","DOI":"10.1080\/00150198908015731","article-title":"Ferroelectric materials and devices in infrared detection and imaging","volume":"91","author":"Watton","year":"1987","journal-title":"Ferroelectric"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"46","DOI":"10.1016\/S0924-4247(99)00247-2","article-title":"High performance human information sensor","volume":"79","author":"Hashimoto","year":"2000","journal-title":"Sens. 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