{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,14]],"date-time":"2026-02-14T03:37:23Z","timestamp":1771040243279,"version":"3.50.1"},"reference-count":42,"publisher":"MDPI AG","issue":"17","license":[{"start":{"date-parts":[[2023,8,22]],"date-time":"2023-08-22T00:00:00Z","timestamp":1692662400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100012555","name":"joint project LOCHIVID CNR\u2014RFBR","doi-asserted-by":"publisher","award":["20-57-7804"],"award-info":[{"award-number":["20-57-7804"]}],"id":[{"id":"10.13039\/100012555","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100012555","name":"joint project LOCHIVID CNR\u2014RFBR","doi-asserted-by":"publisher","award":["FFWZ-2022-0007"],"award-info":[{"award-number":["FFWZ-2022-0007"]}],"id":[{"id":"10.13039\/100012555","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Russian Ministry of Science and Higher Education","award":["20-57-7804"],"award-info":[{"award-number":["20-57-7804"]}]},{"name":"Russian Ministry of Science and Higher Education","award":["FFWZ-2022-0007"],"award-info":[{"award-number":["FFWZ-2022-0007"]}]},{"name":"Federal Medical Biological Agency of Russia","award":["20-57-7804"],"award-info":[{"award-number":["20-57-7804"]}]},{"name":"Federal Medical Biological Agency of Russia","award":["FFWZ-2022-0007"],"award-info":[{"award-number":["FFWZ-2022-0007"]}]},{"name":"Council for Grants of the President of the Russian Federation","award":["20-57-7804"],"award-info":[{"award-number":["20-57-7804"]}]},{"name":"Council for Grants of the President of the Russian Federation","award":["FFWZ-2022-0007"],"award-info":[{"award-number":["FFWZ-2022-0007"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The acoustic waves of higher orders propagating in a layered structure consisting of a silicon plate coated with piezoelectric ZnO and\/or AlN films were used for the development of a sensor with selective sensitivity to liquid viscosity \u03b7 in the range of 1\u20131500 cP. In that range, this sensor possessed low sensitivity to liquid conductivity \u03c3 and temperature T in the ranges of 0\u20132 S\/m and 0\u201355 \u00b0C, respectively. The amplitude responses insensitive to the temperature instead of the phase were used to provide the necessary selectivity. The sensor was based on a weak piezoactive acoustic wave of higher order. The volume of the probes sufficient for the measurements was about 100 \u03bcL. The characteristics of the sensors were optimized by varying the thicknesses of the structure layers, number of layers, wavelength, wave propagation direction, and the order of the acoustic waves. It was shown that in the case of the layered structure, it is possible to obtain practically the same selective sensitivity toward viscosity as for acoustic waves in pure ST, X quartz. The most appropriate waves for this purpose are quasi-longitudinal and Lamb waves of higher order with in-plane polarization. It was found that for various ranges of viscosity \u03b7 = 1\u201320 cP, 20\u2013100 cP, and 100\u20131500 cP, the maximum sensitivity of the appropriate wave is equal to 0.26 dB\/cP, 0.087 dB\/cP, and 0.013 dB\/cP, respectively. The sensitivity of the waves under study toward the electric conductivity of the liquid is much less than the sensitivity to liquid viscosity. These two responses become comparable only for very small \u03b7 &lt; 2 cP. The waves investigated have shown no temperature responses in contact with air, but in the presence of liquid, they increase depending on liquid properties. The temperature dependence of liquid viscosity is measurable by the same sensors. The results obtained have shown the possibility of designing acoustic liquid viscosity sensors based on multilayered structures. The set of possible acoustic waves in layered structures possesses modified propagation characteristics (various polarization, phase velocities, electromechanical coupling coefficients, and attenuations). It allows choosing an optimal acoustic wave to detect liquid viscosity only.<\/jats:p>","DOI":"10.3390\/s23177329","type":"journal-article","created":{"date-parts":[[2023,8,22]],"date-time":"2023-08-22T09:10:56Z","timestamp":1692695456000},"page":"7329","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Acoustic Waves in Piezoelectric Layered Structure for Selective Detection of Liquid Viscosity"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-8854-6080","authenticated-orcid":false,"given":"Andrey","family":"Smirnov","sequence":"first","affiliation":[{"name":"Kotel\u2019nikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Vladimir","family":"Anisimkin","sequence":"additional","affiliation":[{"name":"Kotel\u2019nikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9685-0365","authenticated-orcid":false,"given":"Elizaveta","family":"Shamsutdinova","sequence":"additional","affiliation":[{"name":"Kotel\u2019nikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Maria-Assunta","family":"Signore","sequence":"additional","affiliation":[{"name":"National Research Council of Italy, Institute for Microelectronics and Microsystems, 73100 Lecce, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4500-0421","authenticated-orcid":false,"given":"Luca","family":"Francioso","sequence":"additional","affiliation":[{"name":"National Research Council of Italy, Institute for Microelectronics and Microsystems, 73100 Lecce, Italy"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kirill","family":"Zykov","sequence":"additional","affiliation":[{"name":"Pulmonology Scientific Research Institute, Federal Medical Biological Agency of Russia, Moscow 115682, Russia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Vladimir","family":"Baklaushev","sequence":"additional","affiliation":[{"name":"Pulmonology Scientific Research Institute, Federal Medical Biological Agency of Russia, Moscow 115682, Russia"},{"name":"Federal Center of Brain Research and Neurotechnologies, Federal Medical Biological Agency of Russia, Moscow 117513, Russia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1564-7179","authenticated-orcid":false,"given":"Iren","family":"Kuznetsova","sequence":"additional","affiliation":[{"name":"Kotel\u2019nikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,8,22]]},"reference":[{"key":"ref_1","first-page":"93","article-title":"Blood viscosity of COVID-19 patient: A preliminary report","volume":"11","author":"Joob","year":"2021","journal-title":"Am. 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