{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,14]],"date-time":"2026-02-14T07:39:50Z","timestamp":1771054790201,"version":"3.50.1"},"reference-count":38,"publisher":"MDPI AG","issue":"21","license":[{"start":{"date-parts":[[2023,10,26]],"date-time":"2023-10-26T00:00:00Z","timestamp":1698278400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Guangdong Basic and Applied Basic Research Foundation \u201cResearch on Single-chip Integrated CMOS-MEMS Multi-function Sensor Fusion Chip for Breath Detection\u201d","award":["2021B1515120012"],"award-info":[{"award-number":["2021B1515120012"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>With the wide application of flow sensors, their reliability under extreme conditions has become a concern in recent years. The reliability of a Micro Electro Mechanical Systems (MEMS) flow sensor under temperature (Ts) is researched in this paper. This flow sensor consists of two parts, a sensor chip and a signal-processing system (SPS). Firstly, the step-stress accelerated degradation test (SSADT) is implemented. The sensor chip and the flow sensor system are tested. The results show that the biggest drift is 3.15% for sensor chips under 150 \u00b0C testing conditions, while 32.91% is recorded for the flowmeters. So, the attenuation of the SPS is significant to the degeneration of this flowmeter. The minimum drift of the SPS accounts for 82.01% of this flowmeter. Secondly, using the Coffin\u2013Manson model, the relationship between the cycle index and Ts is established. The lifetime with a different Ts is estimated using the Arrhenius model. In addition, Weibull distribution (WD) is applied to evaluate the lifetime distribution. Finally, the reliability function of the WD is demonstrated, and the survival rate within one year is 87.69% under 85 \u00b0C conditions. With the application of accelerated degradation testing (ADT), the acquired results are innovative and original. This research illustrates the reliability research, which provides a relational database for the application of this flow sensor.<\/jats:p>","DOI":"10.3390\/s23218733","type":"journal-article","created":{"date-parts":[[2023,10,26]],"date-time":"2023-10-26T07:22:15Z","timestamp":1698304935000},"page":"8733","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["A Reliability Analysis of a MEMS Flow Sensor with an Accelerated Degradation Test"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1582-8666","authenticated-orcid":false,"given":"Qiaoqiao","family":"Kang","sequence":"first","affiliation":[{"name":"Key Laboratory of Laser and Infrared System of Ministry of Education, Shandong University, Qingdao 266237, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yuzhe","family":"Lin","sequence":"additional","affiliation":[{"name":"School of Information Science and Engineering, Shandong University, Qingdao 266237, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jifang","family":"Tao","sequence":"additional","affiliation":[{"name":"Key Laboratory of Laser and Infrared System of Ministry of Education, Shandong University, Qingdao 266237, China"},{"name":"School of Information Science and Engineering, Shandong University, Qingdao 266237, China"},{"name":"Qingdao Xinnovis Microsystem Co., Ltd., Qingdao 266101, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,10,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"801","DOI":"10.35848\/1347-4065\/ac305d","article-title":"Advancements in MEMS technology for medical applications: Microneedles and miniaturized sensors","volume":"61","author":"Shikida","year":"2022","journal-title":"Jpn. 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