{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T02:42:49Z","timestamp":1760150569162,"version":"build-2065373602"},"reference-count":32,"publisher":"MDPI AG","issue":"23","license":[{"start":{"date-parts":[[2023,11,30]],"date-time":"2023-11-30T00:00:00Z","timestamp":1701302400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51875107","BE2021035"],"award-info":[{"award-number":["51875107","BE2021035"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100013058","name":"Jiangsu Provincial Key Research and Development Program","doi-asserted-by":"publisher","award":["51875107","BE2021035"],"award-info":[{"award-number":["51875107","BE2021035"]}],"id":[{"id":"10.13039\/501100013058","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Digital holographic microscopy is an important measurement method for micro-nano structures. However, when the structured features are of high-slopes, the interference fringes can become too dense to be recognized. Due to the Nyquist\u2019s sampling limit, reliable wavefront restoration and phase unwrapping are not feasible. To address this problem, the interference fringes are proposed to be sparsified by tilting the reference wavefronts. A data fusion strategy including region extraction and tilt correction is developed for reconstructing the full-area surface topographies. Experimental results of high-slope elements demonstrate the validity and reliability of the proposed method.<\/jats:p>","DOI":"10.3390\/s23239526","type":"journal-article","created":{"date-parts":[[2023,11,30]],"date-time":"2023-11-30T09:39:12Z","timestamp":1701337152000},"page":"9526","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1607-7120","authenticated-orcid":false,"given":"Xinyang","family":"Ma","sequence":"first","affiliation":[{"name":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2871-4374","authenticated-orcid":false,"given":"Rui","family":"Xiong","sequence":"additional","affiliation":[{"name":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wei","family":"Wang","sequence":"additional","affiliation":[{"name":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China"},{"name":"Institute of Optoelectronics, Fudan University, Shanghai 200438, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3809-1262","authenticated-orcid":false,"given":"Xiangchao","family":"Zhang","sequence":"additional","affiliation":[{"name":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China"},{"name":"Yiwu Research Institute of Fudan University, Chengbei Road, Yiwu 322000, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,11,30]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"24148","DOI":"10.1364\/OE.25.024148","article-title":"Surface topography acquisition method for double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry","volume":"25","author":"Zhang","year":"2017","journal-title":"Opt. 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