{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,14]],"date-time":"2026-05-14T06:26:56Z","timestamp":1778740016995,"version":"3.51.4"},"reference-count":28,"publisher":"MDPI AG","issue":"24","license":[{"start":{"date-parts":[[2023,12,18]],"date-time":"2023-12-18T00:00:00Z","timestamp":1702857600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Fundamental Research Program, Shanxi Province","award":["20210302123034"],"award-info":[{"award-number":["20210302123034"]}]},{"name":"Fundamental Research Program, Shanxi Province","award":["1331KSC"],"award-info":[{"award-number":["1331KSC"]}]},{"name":"Shanxi \u20181331 Project\u2019 Key Subject Construction","award":["20210302123034"],"award-info":[{"award-number":["20210302123034"]}]},{"name":"Shanxi \u20181331 Project\u2019 Key Subject Construction","award":["1331KSC"],"award-info":[{"award-number":["1331KSC"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes.<\/jats:p>","DOI":"10.3390\/s23249895","type":"journal-article","created":{"date-parts":[[2023,12,18]],"date-time":"2023-12-18T12:57:56Z","timestamp":1702904276000},"page":"9895","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure"],"prefix":"10.3390","volume":"23","author":[{"ORCID":"https:\/\/orcid.org\/0009-0006-1237-4933","authenticated-orcid":false,"given":"Yulong","family":"Liu","sequence":"first","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Hongliang","family":"Wang","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Feng","family":"Zhang","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0009-0009-6310-1320","authenticated-orcid":false,"given":"Luhao","family":"Gou","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shengkuo","family":"Zhang","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Gang","family":"Cao","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Pengcheng","family":"Zhang","sequence":"additional","affiliation":[{"name":"National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,12,18]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1390","DOI":"10.1109\/TUFFC.2017.2690905","article-title":"Acoustic Wave Filter Technology\u2014A Review","volume":"64","author":"Ruppel","year":"2017","journal-title":"IEEE Trans. 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