{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,29]],"date-time":"2026-03-29T00:24:55Z","timestamp":1774743895963,"version":"3.50.1"},"reference-count":31,"publisher":"MDPI AG","issue":"2","license":[{"start":{"date-parts":[[2024,1,17]],"date-time":"2024-01-17T00:00:00Z","timestamp":1705449600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>High-precision positioning systems play a crucial role in various industrial applications. This study focuses on improving the performance of a high-precision multi-degrees-of-freedom (DOF) stage. In terms of the controller design, the following two key challenges must be addressed: the cross-decoupling of different DOFs and the impact of external disturbances. To address these problems, a self-tuning approach is proposed for simultaneous decoupling and disturbance suppression. Initially, the stage undergoes static decoupling using a data-based approach, facilitating feedback control for each DOF through single-input, single-output controllers. Addressing dynamic coupling and external disturbance challenges, we introduced a comprehensive evaluation index and a self-tuning multi-input, multi-output disturbance observer. This approach enabled the evaluation and optimization of the disturbance compensation for all DOFs, ensuring optimal positioning accuracy. Finally, we tested the proposed method using a high-precision multi-DOF stage with a real-time control platform. The results demonstrated a significant reduction in the standard deviations of positioning errors in the rx, ry, and z directions by 46%, 58%, and 6%, respectively. The approach used in this study opens avenues for advancements in the design and control of complex multi-DOF systems.<\/jats:p>","DOI":"10.3390\/s24020591","type":"journal-article","created":{"date-parts":[[2024,1,17]],"date-time":"2024-01-17T07:41:28Z","timestamp":1705477288000},"page":"591","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["High-Precision Positioning Stage Control Based on a Modified Disturbance Observer"],"prefix":"10.3390","volume":"24","author":[{"given":"Hui","family":"Wang","sequence":"first","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"},{"name":"University of Chinese Academy of Sciences, Beijing 100049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiang","family":"Li","sequence":"additional","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Feng","family":"Zhou","sequence":"additional","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jingxu","family":"Zhang","sequence":"additional","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2024,1,17]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"802","DOI":"10.1109\/TCST.2007.903345","article-title":"A Survey of Control issues in Nanopositioning","volume":"15","author":"Devasia","year":"2007","journal-title":"IEEE Trans. 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