{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,11]],"date-time":"2026-03-11T23:33:57Z","timestamp":1773272037800,"version":"3.50.1"},"reference-count":87,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2024,2,7]],"date-time":"2024-02-07T00:00:00Z","timestamp":1707264000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62035006"],"award-info":[{"award-number":["62035006"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62005118"],"award-info":[{"award-number":["62005118"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["MCMS-E-0522Y02"],"award-info":[{"award-number":["MCMS-E-0522Y02"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["0213-14380203"],"award-info":[{"award-number":["0213-14380203"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures","award":["62035006"],"award-info":[{"award-number":["62035006"]}]},{"name":"Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures","award":["62005118"],"award-info":[{"award-number":["62005118"]}]},{"name":"Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures","award":["MCMS-E-0522Y02"],"award-info":[{"award-number":["MCMS-E-0522Y02"]}]},{"name":"Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures","award":["0213-14380203"],"award-info":[{"award-number":["0213-14380203"]}]},{"name":"Fundamental Research Funds for the Central Universities","award":["62035006"],"award-info":[{"award-number":["62035006"]}]},{"name":"Fundamental Research Funds for the Central Universities","award":["62005118"],"award-info":[{"award-number":["62005118"]}]},{"name":"Fundamental Research Funds for the Central Universities","award":["MCMS-E-0522Y02"],"award-info":[{"award-number":["MCMS-E-0522Y02"]}]},{"name":"Fundamental Research Funds for the Central Universities","award":["0213-14380203"],"award-info":[{"award-number":["0213-14380203"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry\u2013Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 \u00b0C. Finally, we discuss the limitations and opportunities for future development.<\/jats:p>","DOI":"10.3390\/s24041079","type":"journal-article","created":{"date-parts":[[2024,2,7]],"date-time":"2024-02-07T03:47:09Z","timestamp":1707277629000},"page":"1079","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":30,"title":["Recent Progress in MEMS Fiber-Optic Fabry\u2013Perot Pressure Sensors"],"prefix":"10.3390","volume":"24","author":[{"given":"Ye","family":"Chen","sequence":"first","affiliation":[{"name":"MIIT Key Laboratory of Aerospace Information Materials and Physics, State Key Laboratory of Mechanics and Control for Aerospace Structures, College of Physics, Nanjing University of Aeronautics and Astronautics, Nanjing 211106, China"}]},{"given":"Dongqin","family":"Lu","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China"}]},{"given":"Huan","family":"Xing","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China"}]},{"given":"Haotian","family":"Ding","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China"}]},{"given":"Junxian","family":"Luo","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China"}]},{"given":"Hanwen","family":"Liu","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China"}]},{"given":"Xiangxu","family":"Kong","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China"}]},{"given":"Fei","family":"Xu","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China"}]}],"member":"1968","published-online":{"date-parts":[[2024,2,7]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"5","DOI":"10.1038\/s41378-022-00477-w","article-title":"A Flexible Pressure Sensor with Highly Customizable Sensitivity and Linearity via Positive Design of Microhierarchical Structures with a Hyperelastic Model","volume":"9","author":"Xu","year":"2023","journal-title":"Microsyst. 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