{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,24]],"date-time":"2026-04-24T18:19:30Z","timestamp":1777054770236,"version":"3.51.4"},"reference-count":33,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2024,2,15]],"date-time":"2024-02-15T00:00:00Z","timestamp":1707955200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62205334"],"award-info":[{"award-number":["62205334"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this work, we discuss the precision of the effective medium approximation (EMA) model in the data analysis of spectroscopic ellipsometry (SE) for solid materials with micro-rough surfaces by drawing the regime map. The SE parameters \u03c8 (amplitude ratio) and \u0394 (phase difference) of the EMA model were solved by rigorous coupled-wave analysis. The electromagnetic response of the actual surfaces with micro roughness was simulated by the finite-difference time-domain method, which was validated by the experimental results. The regime maps associated with the SE parameters and optical constants n (refractive index) and k (extinction coefficient) of the EMA model were drawn by a comparison of the actual values with the model values. We find that using EMA to model micro-rough surfaces with high absorption can result in a higher precision of the amplitude ratio and extinction coefficient. The precisions of \u03c8, \u0394, n and k increase as the relative roughness \u03c3\/\u03bb (\u03c3: the root mean square roughness, \u03bb: the incident wavelength) decreases. The precision of \u03c8 has an influence on the precision of k and the precision of \u0394 affects the precision of n. Changing \u03c3 alone has little effect on the regime maps of the relative errors of SE parameters and optical constants. A superior advantage of drawing the regime map is that it enables the clear determination as to whether EMA is able to model the rough surfaces or not.<\/jats:p>","DOI":"10.3390\/s24041242","type":"journal-article","created":{"date-parts":[[2024,2,15]],"date-time":"2024-02-15T05:55:59Z","timestamp":1707976559000},"page":"1242","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Regime Map of the Effective Medium Approximation Modelling of Micro-Rough Surfaces in Ellipsometry"],"prefix":"10.3390","volume":"24","author":[{"given":"Meijiao","family":"Huang","sequence":"first","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Liang","family":"Guo","sequence":"additional","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fengyi","family":"Jiang","sequence":"additional","affiliation":[{"name":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2024,2,15]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"477","DOI":"10.1016\/j.optcom.2018.07.025","article-title":"Errors in ellipsometry data fitting","volume":"427","author":"Gilliot","year":"2018","journal-title":"Opt. 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