{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T00:57:41Z","timestamp":1760144261653,"version":"build-2065373602"},"reference-count":30,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2024,4,5]],"date-time":"2024-04-05T00:00:00Z","timestamp":1712275200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"EMPIR program","award":["17IND05 MicroProbes","B-11575\/III.10\/TK.01.00\/12\/2023"],"award-info":[{"award-number":["17IND05 MicroProbes","B-11575\/III.10\/TK.01.00\/12\/2023"]}]},{"name":"Participating States","award":["17IND05 MicroProbes","B-11575\/III.10\/TK.01.00\/12\/2023"],"award-info":[{"award-number":["17IND05 MicroProbes","B-11575\/III.10\/TK.01.00\/12\/2023"]}]},{"name":"Research Organization for Nanotechnology and Material","award":["17IND05 MicroProbes","B-11575\/III.10\/TK.01.00\/12\/2023"],"award-info":[{"award-number":["17IND05 MicroProbes","B-11575\/III.10\/TK.01.00\/12\/2023"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Electrothermal piezoresistive resonant cantilever sensors have been fabricated with embedded actuating (heating resistor) and sensing (piezo resistors) parts, with the latter configured in a Wheatstone bridge circuit. Due to the close spacing between these two elements, a direct thermal parasitic effect on the resonant sensor during the actuating-sensing process leads to asymmetric amplitude and reversing phase spectral responses. Such a condition affects the precise determination of the cantilever\u2019s resonant frequency, f0. Moreover, in the context of phase-locked loop-based (PLL) resonance tracking, a reversing phase spectral response hinders the resonance locking due to its ambiguity. In this work, a replica of the baseline spectral was applied to remove the thermal parasitic effect on the resonance spectra of the cantilever sensor, and its capability was simulated through mathematical analysis. This replica spectral was subtracted from the parasitized spectral using a particular calculation, resulting in optimized spectral responses. An assessment using cigarette smoke particles performed a desired spectral shifting into symmetrical amplitude shapes and monotonic phase transitions, subsequently allowing for real-time PLL-based frequency tracking.<\/jats:p>","DOI":"10.3390\/s24072318","type":"journal-article","created":{"date-parts":[[2024,4,5]],"date-time":"2024-04-05T08:27:52Z","timestamp":1712305672000},"page":"2318","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors"],"prefix":"10.3390","volume":"24","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-2271-2792","authenticated-orcid":false,"given":"Andi","family":"Setiono","sequence":"first","affiliation":[{"name":"Laboratory for Emerging Nanometrology (LENA), Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"},{"name":"Research Center for Photonics\u2014National Research and Innovation Agency (BRIN), South Tangerang 15314, Indonesia"}]},{"family":"Nelfyenny","sequence":"additional","affiliation":[{"name":"Research Center for Photonics\u2014National Research and Innovation Agency (BRIN), South Tangerang 15314, Indonesia"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3927-2439","authenticated-orcid":false,"given":"Wilson Ombati","family":"Nyang\u2019au","sequence":"additional","affiliation":[{"name":"Laboratory for Emerging Nanometrology (LENA), Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"},{"name":"Department of Metrology, Kenya Bureau of Standards (KEBS), Nairobi 00200, Kenya"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5801-813X","authenticated-orcid":false,"given":"Erwin","family":"Peiner","sequence":"additional","affiliation":[{"name":"Laboratory for Emerging Nanometrology (LENA), Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"}]}],"member":"1968","published-online":{"date-parts":[[2024,4,5]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"015002","DOI":"10.1117\/1.JMM.16.1.015002","article-title":"Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2","volume":"16","author":"Wang","year":"2017","journal-title":"J. Micro\/Nanolith. MEMS MOEMS"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"294","DOI":"10.1016\/j.ijheatmasstransfer.2017.03.034","article-title":"Recent advances in MEMS-based micro heat pipes","volume":"110","author":"Qu","year":"2017","journal-title":"Int. J. Heat Mass Transf."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1163","DOI":"10.1007\/s00542-006-0245-5","article-title":"Application of piezoelectric layers in electrostatic MEM actuators: Controlling of pull-in voltage","volume":"12","author":"Rezazadeh","year":"2006","journal-title":"Microsyst. Technol."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1016\/j.ijnonlinmec.2019.04.010","article-title":"Size-dependent nonlinear behavior of a piezoelectrically actuated capacitive bistable microstructure","volume":"114","author":"Nikpourian","year":"2019","journal-title":"Int. J. Non. Linear. Mech."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"300","DOI":"10.1108\/SR-05-2013-678","article-title":"Recent developments in MEMS sensors: A review of applications, markets and technologies","volume":"33","author":"Bogue","year":"2013","journal-title":"Sens. Rev."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"700","DOI":"10.1016\/j.snb.2015.10.066","article-title":"Non-silicon MEMS platforms for gas sensors","volume":"224","author":"Vasiliev","year":"2016","journal-title":"Sens. Actuators B Chem."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"9486","DOI":"10.1109\/JSEN.2018.2870942","article-title":"MEMS-Based Acetone Vapor Sensor for Non-Invasive Screening of Diabetes","volume":"18","author":"Rabih","year":"2018","journal-title":"IEEE Sens. J."},{"key":"ref_8","first-page":"3","article-title":"Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring","volume":"2017","author":"Xu","year":"2017","journal-title":"Proc. Eurosens."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"119","DOI":"10.4028\/www.scientific.net\/MSF.737.119","article-title":"Modeling of I-, T- and V-Shaped Microcantilevers for Environmental Monitoring","volume":"737","author":"Nuryadi","year":"2013","journal-title":"MSF"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"16","DOI":"10.1186\/s11671-021-03481-7","article-title":"A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices","volume":"16","author":"Algamili","year":"2021","journal-title":"Nanoscale Res. Lett."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"38","DOI":"10.1016\/j.mee.2015.02.049","article-title":"Tunable MEMS cantilever resonators electrothermally actuated and piezoelectrically sensed","volume":"145","author":"Mastropaolo","year":"2015","journal-title":"Microelectron. Eng."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1007\/s00542-022-05391-9","article-title":"MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors","volume":"29","author":"Wei","year":"2023","journal-title":"Microsyst. Technol."},{"key":"ref_13","unstructured":"Moore, S., and Moheimani, S.O.R. (2013, January 10\u201312). MEMS Resonator with Displacement Sensor Based on Electro-Thermal Principles. Proceedings of the 6th IFAC Symposium on Mechatronic Systems, Hangzhou, China."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Shi, H., Fan, S., Xing, W., and Sun, J. (2012, January 11\u201313). The design and simulation study of the electrothermal excitation resonant beam based on slit-structure stress concentration effect. Proceedings of the 2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) Proceedings, London, UK.","DOI":"10.1109\/ISICT.2012.6291604"},{"key":"ref_15","doi-asserted-by":"crossref","unstructured":"Chen, D., Zhang, H., Sun, J., Pandit, M., Sobreviela, G., Wang, Y., Zhang, Q., Seshia, A., and Xie, J. (2020, January 18\u201322). Phase-Controlled Oscillation in a Capacitive Nonlinear Ring Resonator with On-Chip Feedthrough De-Embedding. Proceedings of the 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, BC, Canada.","DOI":"10.1109\/MEMS46641.2020.9056278"},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Zhang, Y., Bao, J.F., Li, X.Y., Zhou, X., Wu, Z.H., and Zhang, X.S. (2020). Fully-differential TPoS resonators based on dual interdigital electrodes for feedthrough suppression. Micromachines, 11.","DOI":"10.3390\/mi11020119"},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Wang, Y., Liu, Y., Xu, H., Li, Z., and Li, Z. (2023). A Wideband and Low Reference Spur PLL with Clock Feedthrough Suppressed and Low Current Mismatch Charge Pump and Symmetrical CML Divider. Electronics, 12.","DOI":"10.3390\/electronics12194164"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"111747","DOI":"10.1016\/j.sna.2019.111747","article-title":"Soft piezoresistive cantilevers for adhesion force measurements","volume":"301","author":"Kwoka","year":"2020","journal-title":"Sens. Actuators A Phys."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"085107","DOI":"10.1088\/0957-0233\/23\/8\/085107","article-title":"Methods for the robust measurement of the resonant frequency and quality factor of significantly damped resonating devices","volume":"23","author":"Niedermayer","year":"2012","journal-title":"Meas. Sci. Technol."},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Brand, O., Dufour, I., Heinrich, S.M., and Josse, F. (2015). Resonant MEMS: Fundamentals, Implementation and Application, Wiley-VCH.","DOI":"10.1002\/9783527676330"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"59","DOI":"10.1109\/JMEMS.2017.2778307","article-title":"Thermal-Piezoresistive SOI-MEMS Oscillators Based on a Fully Differential Mechanically Coupled Resonator Array for Mass Sensing Applications","volume":"27","author":"Chu","year":"2018","journal-title":"J. Microelectromech. Syst."},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Iqbal, F., and Lee, B. (2018). A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators. Micromachines, 9.","DOI":"10.3390\/mi9040173"},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Setiono, A., Fahrbach, M., Xu, J., Nyang\u2019au, W., Bertke, M., Wasisto, H., and Peiner, E. (2019, January 25\u201326). Programmable reference parameters for resonance locking in electro-thermal piezoresistive cantilever sensor. Proceedings of the 20th GMA\/ITG-Fachtagung Sensoren und Messsysteme 2019, N\u00fcrnberg, Germany. Tagungsband.","DOI":"10.5162\/sensoren2019\/3.2.4"},{"key":"ref_24","unstructured":"Zhang, Y., and Liu, J. (2016, January 22\u201326). An improved Q-PLL to overcome the speed reversal problems in sensorless PMSM drive. Proceedings of the 2016 IEEE 8th International Power Electronics and Motion Control Conference (IPEMC-ECCE Asia), Hefei, China."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"064001","DOI":"10.1088\/1361-6439\/aa6b0d","article-title":"Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection","volume":"27","author":"Bertke","year":"2017","journal-title":"J. Micromech. Microeng."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1065","DOI":"10.1038\/s41598-017-01147-y","article-title":"Experimental evidence of Fano resonances in nanomechanical resonators","volume":"7","author":"Stassi","year":"2017","journal-title":"Sci. Rep."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"124006","DOI":"10.1088\/1361-6439\/ab4e29","article-title":"Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement","volume":"29","author":"Setiono","year":"2019","journal-title":"J. Micromech. Microeng."},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Yang, Y. (2016). Temporal Data Mining via Unsupervised Ensemble Learning, Elsevier.","DOI":"10.1016\/B978-0-12-811654-8.00002-6"},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Waidyasooriya, H.M., Hariyama, M., and Uchiyama, K. (2018). Design of FPGA-Based Computing Systems with OpenCL [Electronic Resource], Springer International Publishing.","DOI":"10.1007\/978-3-319-68161-0"},{"key":"ref_30","doi-asserted-by":"crossref","unstructured":"Lee, E. (2019). Theory of Electrophoresis and Diffusiophoresis of Highly Charged Colloidal Particles, Academic Press.","DOI":"10.1016\/B978-0-08-100865-2.00016-3"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/7\/2318\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T14:23:51Z","timestamp":1760106231000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/7\/2318"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,4,5]]},"references-count":30,"journal-issue":{"issue":"7","published-online":{"date-parts":[[2024,4]]}},"alternative-id":["s24072318"],"URL":"https:\/\/doi.org\/10.3390\/s24072318","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2024,4,5]]}}}