{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T01:02:05Z","timestamp":1760144525283,"version":"build-2065373602"},"reference-count":30,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2024,4,13]],"date-time":"2024-04-13T00:00:00Z","timestamp":1712966400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"National Natural Science Foundation of China","award":["62071300","22176127","22301181","21ZR1444200","YDZX20213100003002","23YF1429000","22YF1430400"],"award-info":[{"award-number":["62071300","22176127","22301181","21ZR1444200","YDZX20213100003002","23YF1429000","22YF1430400"]}]},{"name":"Science and Technology Commission of Shanghai Municipality","award":["62071300","22176127","22301181","21ZR1444200","YDZX20213100003002","23YF1429000","22YF1430400"],"award-info":[{"award-number":["62071300","22176127","22301181","21ZR1444200","YDZX20213100003002","23YF1429000","22YF1430400"]}]},{"name":"Shanghai Sailing Program","award":["62071300","22176127","22301181","21ZR1444200","YDZX20213100003002","23YF1429000","22YF1430400"],"award-info":[{"award-number":["62071300","22176127","22301181","21ZR1444200","YDZX20213100003002","23YF1429000","22YF1430400"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Micromechanical resonators have aroused growing interest as biological and chemical sensors, and microcantilever beams are the main research focus. Recently, a resonant microcantilever with an integrated heater has been applied in on-chip thermogravimetric analysis (TGA). However, there is a strong relationship between the mass sensitivity of a resonant microcantilever and the location of adsorbed masses. Different sampling positions will cause sensitivity differences, which will result in an inaccurate calculation of mass change. Herein, an integrated H-shaped resonant beam with uniform mass sensitivity and temperature distribution is proposed and developed to improve the accuracy of bio\/chemical sensing and TGA applications. Experiments verified that the presented resonant beam possesses much better uniformity of sensitivity and temperature distribution compared with resonant microcantilevers. Gas-sensing and TGA experiments utilizing the integrated resonant beam were also carried out and exhibited good measurement accuracy.<\/jats:p>","DOI":"10.3390\/s24082495","type":"journal-article","created":{"date-parts":[[2024,4,15]],"date-time":"2024-04-15T08:08:12Z","timestamp":1713168492000},"page":"2495","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA"],"prefix":"10.3390","volume":"24","author":[{"given":"Zheng","family":"Lu","sequence":"first","affiliation":[{"name":"School of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai 200093, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1429-6995","authenticated-orcid":false,"given":"Hao","family":"Jia","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2863-9303","authenticated-orcid":false,"given":"Ding","family":"Wang","sequence":"additional","affiliation":[{"name":"School of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai 200093, China"}]},{"given":"Haitao","family":"Yu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China"}]}],"member":"1968","published-online":{"date-parts":[[2024,4,13]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1066","DOI":"10.1038\/nature05741","article-title":"Weighing of biomolecules, single cells and single nanoparticles in fluid","volume":"446","author":"Burg","year":"2007","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"19023","DOI":"10.3390\/s141019023","article-title":"Advanced nanoporous materials for micro-gravimetric sensing to trace-level bio\/chemical molecules","volume":"14","author":"Xu","year":"2014","journal-title":"Sensors"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1287","DOI":"10.1039\/C2CS35293A","article-title":"Biosensors based on nanomechanical systems","volume":"42","author":"Tamayo","year":"2013","journal-title":"Chem. 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