{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,7]],"date-time":"2026-01-07T07:59:37Z","timestamp":1767772777758,"version":"build-2065373602"},"reference-count":55,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2024,4,30]],"date-time":"2024-04-30T00:00:00Z","timestamp":1714435200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100011038","name":"Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA)","doi-asserted-by":"publisher","award":["D2019-1908080004","D2019-1906200003","D2021-2106170004","FA8702-15-D-0001","70NANB18H006"],"award-info":[{"award-number":["D2019-1908080004","D2019-1906200003","D2021-2106170004","FA8702-15-D-0001","70NANB18H006"]}],"id":[{"id":"10.13039\/100011038","id-type":"DOI","asserted-by":"publisher"}]},{"name":"National Research Council Postdoctoral Fellowships","award":["D2019-1908080004","D2019-1906200003","D2021-2106170004","FA8702-15-D-0001","70NANB18H006"],"award-info":[{"award-number":["D2019-1908080004","D2019-1906200003","D2021-2106170004","FA8702-15-D-0001","70NANB18H006"]}]},{"DOI":"10.13039\/100000190","name":"U.S. Department of Commerce, National Institute of Standards and Technology","doi-asserted-by":"publisher","award":["D2019-1908080004","D2019-1906200003","D2021-2106170004","FA8702-15-D-0001","70NANB18H006"],"award-info":[{"award-number":["D2019-1908080004","D2019-1906200003","D2021-2106170004","FA8702-15-D-0001","70NANB18H006"]}],"id":[{"id":"10.13039\/100000190","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO2 integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed.<\/jats:p>","DOI":"10.3390\/s24092890","type":"journal-article","created":{"date-parts":[[2024,5,1]],"date-time":"2024-05-01T03:30:49Z","timestamp":1714534249000},"page":"2890","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer"],"prefix":"10.3390","volume":"24","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-8648-0524","authenticated-orcid":false,"given":"Nathan","family":"Nakamura","sequence":"first","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"},{"name":"Department of Physics, University of Colorado, Boulder, CO 80309, USA"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0184-3419","authenticated-orcid":false,"given":"Paul","family":"Szypryt","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"},{"name":"Department of Physics, University of Colorado, Boulder, CO 80309, USA"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5882-1640","authenticated-orcid":false,"given":"Amber L.","family":"Dagel","sequence":"additional","affiliation":[{"name":"Sandia National Laboratories, Albuquerque, NM 87123, USA"}]},{"given":"Bradley K.","family":"Alpert","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"}]},{"given":"Douglas A.","family":"Bennett","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, 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D.","family":"Gard","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"},{"name":"Department of Physics, University of Colorado, Boulder, CO 80309, USA"}]},{"given":"Ryan N.","family":"Goodner","sequence":"additional","affiliation":[{"name":"Sandia National Laboratories, Albuquerque, NM 87123, USA"}]},{"given":"James Zachariah","family":"Harris","sequence":"additional","affiliation":[{"name":"Sandia National Laboratories, Albuquerque, NM 87123, USA"}]},{"given":"Gene C.","family":"Hilton","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"}]},{"given":"Edward S.","family":"Jimenez","sequence":"additional","affiliation":[{"name":"Sandia National Laboratories, Albuquerque, NM 87123, USA"}]},{"given":"Burke L.","family":"Kernen","sequence":"additional","affiliation":[{"name":"Sandia National Laboratories, Albuquerque, NM 87123, USA"}]},{"given":"Kurt 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80305, USA"}]},{"given":"Nathan J.","family":"Ortiz","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"},{"name":"Department of Physics, University of Colorado, Boulder, CO 80309, USA"}]},{"given":"Christine G.","family":"Pappas","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"},{"name":"Department of Physics, University of Colorado, Boulder, CO 80309, USA"}]},{"given":"Carl D.","family":"Reintsema","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"}]},{"given":"Daniel R.","family":"Schmidt","sequence":"additional","affiliation":[{"name":"National Institute of Standards and Technology, Boulder, CO 80305, USA"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0179-9710","authenticated-orcid":false,"given":"Peter 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applications","volume":"33","author":"Nikitin","year":"2021","journal-title":"Adv. Mater."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"402","DOI":"10.1038\/nature21698","article-title":"High-resolution non-destructive three-dimensional imaging of integrated circuits","volume":"543","author":"Holler","year":"2017","journal-title":"Nature"},{"key":"ref_3","unstructured":"(2023, October 20). International Technology Roadmap for Semiconductors\u2014ITRS 2.0. Available online: http:\/\/www.itrs2.net\/."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"18","DOI":"10.1038\/s43586-021-00015-4","article-title":"X-ray computed tomography","volume":"1","author":"Withers","year":"2021","journal-title":"Nat. Rev. Methods Prim."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"778","DOI":"10.1017\/S1431927620015809","article-title":"Applications of full-field transmission X-ray nanotomography and X-ray nanospectroscopy at Stanford Synchrotron Radiation Lightsource","volume":"26","author":"Bare","year":"2020","journal-title":"Microsc. Microanal."},{"key":"ref_6","unstructured":"Beckmann, F. (2017). Neutrons and Synchrotron Radiation in Engineering Materials Science, John Wiley & Sons, Ltd.. Chapter 15."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"840","DOI":"10.1038\/nphoton.2010.267","article-title":"Nanoscale X-ray imaging","volume":"4","author":"Sakdinawat","year":"2010","journal-title":"Nat. Photonics"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"060512","DOI":"10.1149\/1945-7111\/ab80cd","article-title":"Rapid Preparation of Geometrically Optimal Battery Electrode Samples for Nano Scale X-ray Characterisation","volume":"167","author":"Tan","year":"2020","journal-title":"J. Electrochem. Soc."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"1904119","DOI":"10.1002\/aenm.201904119","article-title":"Multimodal Nanoscale Tomographic Imaging for Battery Electrodes","volume":"10","author":"Lippuner","year":"2020","journal-title":"Adv. Energy Mater."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"79","DOI":"10.1046\/j.1365-2818.2002.01046.x","article-title":"Quantitative X-ray projection microscopy: Phase-contrast and multi-spectral imaging","volume":"207","author":"Mayo","year":"2002","journal-title":"J. Microsc."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"063706","DOI":"10.1063\/1.4989406","article-title":"Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation","volume":"88","author":"Bleuet","year":"2017","journal-title":"Rev. Sci. Instrum."},{"key":"ref_12","first-page":"241","article-title":"X-ray nanotomography in a SEM","volume":"Volume 7804","author":"Stock","year":"2010","journal-title":"Proceedings of the Developments in X-ray Tomography VII"},{"key":"ref_13","unstructured":"M\u00fcller, D., Graetz, J., Balles, A., Stier, S., Hanke, R., and Fella, C. (2021). A novel nano tomography setup for material science and engineering applications. arXiv."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"053108","DOI":"10.1063\/1.4983316","article-title":"A practical superconducting-microcalorimeter X-ray spectrometer for beamline and laboratory science","volume":"88","author":"Doriese","year":"2017","journal-title":"Rev. Sci. Instrum."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"084003","DOI":"10.1088\/0953-2048\/28\/8\/084003","article-title":"Review of superconducting transition-edge sensors for X-ray and gamma-ray spectroscopy","volume":"28","author":"Ullom","year":"2015","journal-title":"Supercond. Sci. Technol."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"637","DOI":"10.1148\/radiol.2015142631","article-title":"Dual- and multi-energy CT: Principles, technical approaches, and clinical applications","volume":"276","author":"McCollough","year":"2015","journal-title":"Radiology"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"1475","DOI":"10.1088\/0031-9155\/53\/5\/020","article-title":"Computed tomography with energy-resolved detection: A feasibility study","volume":"53","author":"Shikhaliev","year":"2008","journal-title":"Phys. Med. Biol."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"13","DOI":"10.1007\/s41635-019-00084-8","article-title":"Fluorescent X-ray scan image quality prediction","volume":"4","author":"Weichman","year":"2020","journal-title":"J. Hardw. Syst. Secur."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"D25","DOI":"10.1364\/AO.54.000D25","article-title":"Real-time automated counterfeit integrated circuit detection using X-ray microscopy","volume":"54","author":"Mahmood","year":"2015","journal-title":"Appl. Opt."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/TASC.2023.3256343","article-title":"A tabletop X-ray tomography instrument for nanometer-scale imaging: Demonstration of the 1000-element transition-edge sensor subarray","volume":"33","author":"Szypryt","year":"2023","journal-title":"IEEE Trans. Appl. Supercond."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"47","DOI":"10.1038\/s41378-023-00510-6","article-title":"A tabletop X-ray tomography instrument for nanometer-scale imaging: Reconstructions","volume":"9","author":"Levine","year":"2023","journal-title":"Microsyst. Nanoeng."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"724","DOI":"10.1118\/1.2829867","article-title":"Spatial resolution properties in cone beam CT: A simulation study","volume":"35","author":"Chen","year":"2008","journal-title":"Med. Phys."},{"key":"ref_23","doi-asserted-by":"crossref","unstructured":"Hu, X., Zhong, Y., Huang, Y., Shen, C., and Jia, X. (2022). Improving small animal cone beam CT resolution by mitigating X-ray focal spot induced blurring via deconvolution. Phys. Med. Biol., 67.","DOI":"10.1088\/1361-6560\/ac6b7a"},{"key":"ref_24","unstructured":"NEA (February, January 28). PENELOPE 2018: A code system for Monte Carlo simulation of electron and photon transport. Proceedings of the Workshop Proceedings, Barcelona, Spain."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"634","DOI":"10.1017\/S1431927617000526","article-title":"PENEPMA: A Monte Carlo program for the simulation of X-ray emission in electron probe microanalysis","volume":"23","author":"Llovet","year":"2017","journal-title":"Microsc. Microanal."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"296","DOI":"10.1088\/0022-3735\/17\/4\/011","article-title":"Measurement of the profile of finely focused electron beams in a scanning electron microscope","volume":"17","author":"Rishton","year":"1984","journal-title":"J. Phys. E Sci. Instrum."},{"key":"ref_27","first-page":"107","article-title":"Measurement of the parameters of the electron beam of a scanning electron microscope","volume":"Volume 7042","author":"Postek","year":"2008","journal-title":"Proceedings of the Instrumentation, Metrology, and Standards for Nanomanufacturing II"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"132","DOI":"10.1117\/12.308723","article-title":"Measuring the size and intensity distribution of SEM beam spot","volume":"Volume 3332","author":"Singh","year":"1998","journal-title":"Proceedings of the Metrology, Inspection, and Process Control for Microlithography XII"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"766","DOI":"10.1107\/S1600577515004312","article-title":"High-resolution X-ray emission spectroscopy with transition-edge sensors: Present performance and future potential","volume":"22","author":"Uhlig","year":"2015","journal-title":"J. Synchrotron Radiat."},{"key":"ref_30","unstructured":"Pappas, C.G., Durkin, M., Fowler, J.W., Morgan, K.M., Ullom, J.N., Doriese, W.B., Hilton, G.C., O\u2019Neil, G.C., Schmidt, D.R., and Szypryt, P. (2019). A TES X-ray Spectrometer for NSENSE, National Institute of Standards and Technology."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"3807","DOI":"10.1063\/1.1593809","article-title":"Time-division superconducting quantum interference device multiplexer for transition-edge sensors","volume":"74","author":"Beyer","year":"2003","journal-title":"Rev. Sci. Instrum."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"303","DOI":"10.1016\/0011-2275(95)95348-I","article-title":"Adiabatic demagnetization refrigerators for small laboratory experiments and space astronomy","volume":"35","author":"Hagmann","year":"1995","journal-title":"Cryogenics"},{"key":"ref_33","doi-asserted-by":"crossref","unstructured":"Enss, C. (2005). Cryogenic Particle Detection, Topics in Applied Physics; Springer.","DOI":"10.1007\/b12169"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"374","DOI":"10.1007\/s10909-015-1380-0","article-title":"The practice of pulse processing","volume":"184","author":"Fowler","year":"2016","journal-title":"J. Low Temp. Phys."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"123107","DOI":"10.1063\/1.5116717","article-title":"A transition-edge sensor-based X-ray spectrometer for the study of highly charged ions at the National Institute of Standards and Technology electron beam ion trap","volume":"90","author":"Szypryt","year":"2019","journal-title":"Rev. Sci. Instrum."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"115004","DOI":"10.1088\/1361-6455\/aa6c4a","article-title":"High-precision measurement of the X-ray Cu K\u03b1 spectrum","volume":"50","author":"Mendenhall","year":"2017","journal-title":"J. Phys. B: At. Mol. Opt. Phys."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"4554","DOI":"10.1103\/PhysRevA.56.4554","article-title":"K\u03b11,2 and K\u03b21,3 X-ray emission lines of the 3d transition metals","volume":"56","author":"Fritsch","year":"1997","journal-title":"Phys. Rev. A"},{"key":"ref_38","unstructured":"Zschornack, G.H. (2007). Handbook of X-ray Data, Springer."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"494","DOI":"10.1088\/1681-7575\/aa722f","article-title":"A reassessment of absolute energies of the X-ray L lines of lanthanide metals","volume":"54","author":"Fowler","year":"2017","journal-title":"Metrologia"},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"534","DOI":"10.1109\/78.193196","article-title":"A local update strategy for iterative reconstruction from projections","volume":"41","author":"Sauer","year":"1993","journal-title":"IEEE Trans. Signal Process."},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"306","DOI":"10.1007\/s40544-013-0035-x","article-title":"Chemical mechanical polishing: Theory and experiment","volume":"1","author":"Zhao","year":"2013","journal-title":"Friction"},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"43","DOI":"10.1038\/s41378-021-00268-9","article-title":"Field-emission electron gun for a MEMS electron microscope","volume":"7","author":"Krysztof","year":"2021","journal-title":"Microsyst. Nanoeng."},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"013202","DOI":"10.1116\/6.0000739","article-title":"Stabilization of cold-field-emission current from a CeB6 single-crystal emitter by using a faceted (100) plane","volume":"39","author":"Kusunoki","year":"2020","journal-title":"J. Vac. Sci. Technol. B"},{"key":"ref_44","unstructured":"Lavely, E.M., Masurkar, A.V., and Stark, T.J. (2021). Nanofabricated Structures for Sub-Beam Resolution and Spectral Enhancement in Tomographic Imaging. (11340179), US Patent."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"934","DOI":"10.1557\/mrs.2020.270","article-title":"In situ mapping of chemical segregation using synchrotron X-ray imaging","volume":"45","author":"Feng","year":"2020","journal-title":"MRS Bull."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"1447","DOI":"10.1107\/S1600577520010152","article-title":"The XFM beamline at the Australian Synchrotron","volume":"27","author":"Howard","year":"2020","journal-title":"J. Synchrotron Radiat."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"267","DOI":"10.1007\/s00216-007-1694-0","article-title":"Three-dimensional elemental imaging by means of synchrotron radiation micro-XRF: Developments and applications in environmental chemistry","volume":"390","author":"Silversmit","year":"2008","journal-title":"Anal. Bioanal. Chem."},{"key":"ref_48","first-page":"031047","article-title":"Ultrafast time-resolved hard X-ray emission spectroscopy on a tabletop","volume":"6","author":"Joe","year":"2016","journal-title":"Phys. Rev. X"},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"296","DOI":"10.2307\/2981372","article-title":"The frequency distribution of the difference between two poisson variates belonging to different populations","volume":"109","author":"Skellam","year":"1946","journal-title":"J. R. Stat. Soc."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"281","DOI":"10.1007\/BF00693433","article-title":"Signal processing for microcalorimeters","volume":"93","author":"Szymkowiak","year":"1993","journal-title":"J. Low Temp. Phys."},{"key":"ref_51","unstructured":"Anderson, B., and Moore, J. (1979). Optimal Filtering, Prentice-Hall."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"1047","DOI":"10.1007\/s10909-022-02740-w","article-title":"Energy calibration of nonlinear microcalorimeters with uncertainty estimates from gaussian process regression","volume":"209","author":"Fowler","year":"2022","journal-title":"J. Low Temp. Phys."},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"69","DOI":"10.1111\/j.1365-2818.2010.03408.x","article-title":"Region-of-interest tomography using filtered backprojection: Assessing the practical limits","volume":"241","author":"Kyrieleis","year":"2011","journal-title":"J. Microsc."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"534","DOI":"10.1117\/12.534568","article-title":"Region of interest (ROI) computed tomography","volume":"Volume 5368","author":"Yaffe","year":"2004","journal-title":"Medical Imaging 2004: Physics of Medical Imaging"},{"key":"ref_55","unstructured":"Willis, C.L., Lavely, E.M., Marcinuk, A.J., Moffitt, P.R., and Takahashi, J.R. (2019). Sample Manipulation for Nondestructive Sample Imaging. (10535495), US Patent."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/9\/2890\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T14:37:52Z","timestamp":1760107072000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/9\/2890"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,4,30]]},"references-count":55,"journal-issue":{"issue":"9","published-online":{"date-parts":[[2024,5]]}},"alternative-id":["s24092890"],"URL":"https:\/\/doi.org\/10.3390\/s24092890","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2024,4,30]]}}}