{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,19]],"date-time":"2026-02-19T16:56:32Z","timestamp":1771520192053,"version":"3.50.1"},"reference-count":29,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2024,5,16]],"date-time":"2024-05-16T00:00:00Z","timestamp":1715817600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62271235"],"award-info":[{"award-number":["62271235"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62071205"],"award-info":[{"award-number":["62071205"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["2022-SYSJJ-10"],"award-info":[{"award-number":["2022-SYSJJ-10"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["61927807"],"award-info":[{"award-number":["61927807"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Foundation of State Key Laboratory of Dynamic Testing Technology","award":["62271235"],"award-info":[{"award-number":["62271235"]}]},{"name":"Foundation of State Key Laboratory of Dynamic Testing Technology","award":["62071205"],"award-info":[{"award-number":["62071205"]}]},{"name":"Foundation of State Key Laboratory of Dynamic Testing Technology","award":["2022-SYSJJ-10"],"award-info":[{"award-number":["2022-SYSJJ-10"]}]},{"name":"Foundation of State Key Laboratory of Dynamic Testing Technology","award":["61927807"],"award-info":[{"award-number":["61927807"]}]},{"name":"National Major Scientific Instrument Research Project of NSFC","award":["62271235"],"award-info":[{"award-number":["62271235"]}]},{"name":"National Major Scientific Instrument Research Project of NSFC","award":["62071205"],"award-info":[{"award-number":["62071205"]}]},{"name":"National Major Scientific Instrument Research Project of NSFC","award":["2022-SYSJJ-10"],"award-info":[{"award-number":["2022-SYSJJ-10"]}]},{"name":"National Major Scientific Instrument Research Project of NSFC","award":["61927807"],"award-info":[{"award-number":["61927807"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this study, we propose a method for optimizing the design of CMUT sensors using genetic algorithms. Existing CMUT sensors face frequency response and sensitivity limitations, necessitating optimization to enhance their sensing performance. Traditional optimization methods are often intricate and time-consuming and may fail to yield the optimal solution. Genetic algorithms, which simulate the biological evolution process, offer advantages in global optimization and efficiency, making them widely utilized in the optimization design of Microelectromechanical Systems (MEMS) devices. Based on the theoretical framework and finite element model of CMUT sensors, we propose a CMUT array element optimization design method based on genetic algorithms. The optimization and validation results demonstrate that we have successfully designed a broadband CMUT array element consisting of four microelements with a 1\u20132 MHz frequency range. Compared with a randomly arranged array element, the optimized array shows a 63.9% increase in bandwidth and a 7.5% increase in average sensitivity within the passband. Moreover, the sensitivity variance within the passband is reduced by 50.2%. Our proposed method effectively optimizes the design of high sensitivity CMUT sensors with the desired bandwidth, thereby offering significant reference value for the optimization design of CMUT sensors.<\/jats:p>","DOI":"10.3390\/s24103155","type":"journal-article","created":{"date-parts":[[2024,5,16]],"date-time":"2024-05-16T03:24:48Z","timestamp":1715829888000},"page":"3155","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Optimization Design of CMUT Sensors with Broadband and High Sensitivity Characteristics Based on the Genetic Algorithm"],"prefix":"10.3390","volume":"24","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-2059-4515","authenticated-orcid":false,"given":"Sai","family":"Zhang","sequence":"first","affiliation":[{"name":"Institute of Ultrasonic Testing, Jiangsu University, Zhenjiang 212013, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wentao","family":"Lu","sequence":"additional","affiliation":[{"name":"Institute of Ultrasonic Testing, Jiangsu University, Zhenjiang 212013, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ailing","family":"Wang","sequence":"additional","affiliation":[{"name":"Institute of Ultrasonic Testing, Jiangsu University, Zhenjiang 212013, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Huizi","family":"He","sequence":"additional","affiliation":[{"name":"School of Mathematical Sciences, Jiangsu University, Zhenjiang 212013, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Renxin","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1762-9246","authenticated-orcid":false,"given":"Wendong","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2024,5,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"62","DOI":"10.1016\/j.sna.2007.02.001","article-title":"Trends and frontiers of MEMS","volume":"136","author":"Ko","year":"2007","journal-title":"Sens. Actuators A Phys."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/58.484456","article-title":"A surface micromachined electrostatic ultrasonic air transducer","volume":"43","author":"Haller","year":"1996","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control."},{"key":"ref_3","unstructured":"Wang, H. (2015). Research on Working Mechanism and Application Foundation of CMUT and CMUT Array. [Ph.D. Thesis, Tianjin University]."},{"key":"ref_4","unstructured":"Mills, D.M. (2004, January 23\u201327). Medical imaging with capacitive micromachined ultrasound transducer (cMUT) arrays. Proceedings of the IEEE Ultrasonics Symposium, Montreal, QC, Canada."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"094102","DOI":"10.1063\/1.2776348","article-title":"Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen","volume":"91","author":"Park","year":"2007","journal-title":"Appl. Phys. Lett."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"483","DOI":"10.1016\/j.snb.2018.07.136","article-title":"Combined colorimetric and gravimetric CMUT sensor for detection of benzyl methyl ketone","volume":"275","author":"Laustsen","year":"2018","journal-title":"Sens. Actuators B Chem."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1286","DOI":"10.1109\/TUFFC.2023.3309997","article-title":"Dual-Backplate CMUTs with Wide Bandwidth and Low Driving Voltage for Airborne Applications","volume":"70","author":"Anzinger","year":"2023","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1912","DOI":"10.1016\/j.ultras.2014.04.008","article-title":"Applications of airborne ultrasound in human-computer interaction","volume":"54","author":"Dahl","year":"2014","journal-title":"Ultrasonics"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"22248","DOI":"10.1109\/JSEN.2023.3302296","article-title":"Fabrication of Capacitive Micromachined Ultrasonic Transducer (CMUT) with PMMA\/Graphene Membrane","volume":"23","author":"Liu","year":"2023","journal-title":"IEEE Sens. J."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"482","DOI":"10.1016\/j.ultras.2011.10.011","article-title":"Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities","volume":"52","author":"Manzanares","year":"2012","journal-title":"Ultrasonics"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"2532","DOI":"10.1109\/TUFFC.2021.3062071","article-title":"Dual-frequency CMUT arrays for multiband ultrasound imaging applications","volume":"68","author":"Maadi","year":"2021","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Adelegan, O.J., Feysel, Y.Y., and Oralkan, \u00d6. (2018, January 22\u201325). Design and implementation of broadband CMUTs for airborne applications-preliminary results. Proceedings of the 2018 IEEE International Ultrasonics Symposium (IUS), Kobe, Japan.","DOI":"10.1109\/ULTSYM.2018.8579680"},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Jallouli, A., Kacem, N., and Lardies, J. (2018). Investigations of the effects of geometric imperfections on the nonlinear static and dynamic behavior of capacitive micomachined ultrasonic transducers. Micromachines, 9.","DOI":"10.3390\/mi9110575"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1086","DOI":"10.1109\/TUFFC.2016.2557621","article-title":"Phase and amplitude modulation methods for nonlinear ultrasound imaging with CMUTs","volume":"63","author":"Satir","year":"2016","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_15","first-page":"0151110","article-title":"Inverse Design Methods and Applications of Photonics Devices","volume":"51","author":"Ma","year":"2022","journal-title":"Acta Photonica Sin."},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Wang, H., Huang, X., Yu, L., Ding, Q., Zhang, H., He, C., and Zhang, W. (2021). Hybrid cell structure for broadband CMUT: Design method and characteristic analysis. Micromachines, 12.","DOI":"10.3390\/mi12101180"},{"key":"ref_17","unstructured":"Senturia, S.D. (2005). Microsystem Design, Springer Science & Business Media."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"515","DOI":"10.1007\/s00542-018-4040-x","article-title":"Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers","volume":"27","author":"Maity","year":"2021","journal-title":"Microsyst. Technol."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Wygant, I.O., Kupnik, M., and Khuri-Yakub, B.T. (2008, January 22\u201325). Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell. Proceedings of the 2008 IEEE Ultrasonics Symposium, Kobe, Japan.","DOI":"10.1109\/ULTSYM.2008.0522"},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Brenner, K., Ergun, A.S., Firouzi, K., Rasmussen, M.F., Stedman, Q., and Khuri-Yakub, B.P. (2019). Advances in capacitive micromachined ultrasonic transducers. Micromachines, 10.","DOI":"10.3390\/mi10020152"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"2163","DOI":"10.1109\/TUFFC.2005.1563260","article-title":"Linear and nonlinear equivalent circuit modeling of CMUTs","volume":"52","author":"Lohfink","year":"2005","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"2185","DOI":"10.1109\/TUFFC.2005.1563262","article-title":"Finite-element analysis of capacitive micromachined ultrasonic transducers","volume":"52","author":"Yaralioglu","year":"2005","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"31","DOI":"10.1002\/cplx.6130010108","article-title":"Genetic algorithms: An overview","volume":"1","author":"Melanie","year":"1995","journal-title":"Complexity"},{"key":"ref_24","first-page":"21","article-title":"Genetic algorithm: An overview and its application","volume":"3","author":"Kumar","year":"2014","journal-title":"Int. J. Adv. Stud. Comput. Sci. Eng."},{"key":"ref_25","first-page":"165","article-title":"Enhancement of Power Output Harvesting from Piezoelectric MEMS by Genetic Algorithm Method with Geometric and Material Optimization","volume":"11","author":"Majid","year":"2023","journal-title":"Aerosp. Knowl. Technol. J."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"7372","DOI":"10.1109\/JSEN.2017.2756921","article-title":"Design and optimization of piezoelectric MEMS vibration energy harvesters based on genetic algorithm","volume":"17","author":"Seyedfakhreddin","year":"2017","journal-title":"IEEE Sens. J."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"104","DOI":"10.1038\/s41378-020-00214-1","article-title":"Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm","volume":"6","author":"Wang","year":"2020","journal-title":"Microsyst. Nanoeng."},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Najar, H., Assadsangabi, B., Dahmardeh, M., and Cretu, E. (2010, January 12\u201318). Combined FEA-Matlab Optimization of Capacitive Micromachined Ultrasound Transducer Cell. Proceedings of the ASME International Mechanical Engineering Congress and Exposition, Vancouver, BC, Canada.","DOI":"10.1115\/IMECE2010-39394"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"260","DOI":"10.1108\/SR-03-2021-0082","article-title":"Research on optimization sparse method for capacitive micromachined ultrasonic transducer array: Heuristic algorithm","volume":"41","author":"Zhang","year":"2021","journal-title":"Sens. Rev."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/10\/3155\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T14:43:06Z","timestamp":1760107386000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/10\/3155"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,5,16]]},"references-count":29,"journal-issue":{"issue":"10","published-online":{"date-parts":[[2024,5]]}},"alternative-id":["s24103155"],"URL":"https:\/\/doi.org\/10.3390\/s24103155","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2024,5,16]]}}}