{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,18]],"date-time":"2026-03-18T13:23:01Z","timestamp":1773840181744,"version":"3.50.1"},"reference-count":15,"publisher":"MDPI AG","issue":"12","license":[{"start":{"date-parts":[[2024,6,20]],"date-time":"2024-06-20T00:00:00Z","timestamp":1718841600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Innovative Science and Technology Initiative for Security","award":["JPJ004596"],"award-info":[{"award-number":["JPJ004596"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In recent years, there has been significant interest in quantum technology, characterized by the emergence of quantum computers boasting immense processing power, ultra-sensitive quantum sensors, and ultra-precise atomic clocks. Miniaturization of quantum devices using cold atoms necessitates the employment of an ultra-high vacuum miniature cell with a pressure of approximately 10\u22126 Pa or even lower. In this study, we developed an ultra-high vacuum cell realized by a miniature ion pump using a high-efficiency plasma source. Initially, an unsealed miniature ion pump was introduced into a vacuum chamber, after which the ion pump\u2019s discharge current, depending on vacuum pressures, was evaluated. Subsequently, a miniature vacuum cell was fabricated by hermetically sealing the miniature vacuum pump. The cell was successfully evacuated by a miniature ion pump down to an ultra-high vacuum region, which was derived by the measured discharge current. Our findings demonstrate the feasibility of achieving an ultra-high vacuum cell necessary for the operation of miniature quantum devices.<\/jats:p>","DOI":"10.3390\/s24124000","type":"journal-article","created":{"date-parts":[[2024,6,20]],"date-time":"2024-06-20T05:27:19Z","timestamp":1718861239000},"page":"4000","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source"],"prefix":"10.3390","volume":"24","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-2852-2877","authenticated-orcid":false,"given":"Yuichi","family":"Kurashima","sequence":"first","affiliation":[{"name":"Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba 305-8564, Japan"}]},{"given":"Atsuhiko","family":"Maeda","sequence":"additional","affiliation":[{"name":"Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba 305-8564, Japan"}]},{"given":"Naoto","family":"Oshima","sequence":"additional","affiliation":[{"name":"College of Science and Technology, Nihon University, Funabashi 274-8501, Japan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1791-9190","authenticated-orcid":false,"given":"Taisei","family":"Motomura","sequence":"additional","affiliation":[{"name":"Sensing System Research Center, National Institute of Advanced Industrial Science and Technology, Tosu 841-0052, Japan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5767-8398","authenticated-orcid":false,"given":"Takashi","family":"Matsumae","sequence":"additional","affiliation":[{"name":"Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba 305-8564, Japan"}]},{"given":"Mitsuhiro","family":"Watanabe","sequence":"additional","affiliation":[{"name":"College of Science and Technology, Nihon University, Funabashi 274-8501, Japan"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6802-3346","authenticated-orcid":false,"given":"Hideki","family":"Takagi","sequence":"additional","affiliation":[{"name":"Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba 305-8564, Japan"}]}],"member":"1968","published-online":{"date-parts":[[2024,6,20]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1463","DOI":"10.1109\/TUFFC.2014.3060","article-title":"Atomic fountain clock with very high frequency stability employing a pulse-tube-cryocooled sapphire oscillator","volume":"61","author":"Takamizawa","year":"2014","journal-title":"IEEE Trans. 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