{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,3]],"date-time":"2026-04-03T22:44:40Z","timestamp":1775256280687,"version":"3.50.1"},"reference-count":31,"publisher":"MDPI AG","issue":"13","license":[{"start":{"date-parts":[[2024,6,26]],"date-time":"2024-06-26T00:00:00Z","timestamp":1719360000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["U23A20640"],"award-info":[{"award-number":["U23A20640"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["2020CXGC010203"],"award-info":[{"award-number":["2020CXGC010203"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Shandong Provincial Key Research and Development program","award":["U23A20640"],"award-info":[{"award-number":["U23A20640"]}]},{"name":"Shandong Provincial Key Research and Development program","award":["2020CXGC010203"],"award-info":[{"award-number":["2020CXGC010203"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Increasing concerns about air quality due to fossil fuel combustion, especially nitrogen oxides (NOx) from marine and diesel engines, necessitate advanced monitoring systems due to the significant health and environmental impacts of nitrogen dioxide (NO2). In this study, a gas detection system based on the principle of the non-dispersive infrared (NDIR) technique is proposed. Firstly, the pyroelectric detector was developed by employing an ultra-thin LiTaO3 (LT) layer as the sensitive element, integrated with nanoscale carbon material prepared by wafer-level graphics technology as the infrared absorption layer. Then, the sensor was hermetically sealed using inert gas through energy storage welding technology, exhibiting a high detectivity (D*) value of 4.19 \u00d7 108 cm\u00b7\u221aHz\/W. Subsequently, a NO2 gas sensor was engineered based on the NDIR principle employing a Micro Electro Mechanical System (MEMS) infrared (IR) emitter, featuring a light path chamber length of 1.5 m, along with integrated signal processing and software calibration algorithms. This gas sensor was capable of detecting NO2 concentrations within the range of 0\u2013500 ppm. Initial tests indicated that the gas sensor exhibited a full-scale relative error of less than 0.46%, a limit of 2.8 ppm, a linearity of \u22121.09%, a repeatability of 0.47% at a concentration of 500 ppm, and a stability of 2% at a concentration of 500 ppm. The developed gas sensor demonstrated significant potential for application in areas such as industrial monitoring and analytical instrumentation.<\/jats:p>","DOI":"10.3390\/s24134146","type":"journal-article","created":{"date-parts":[[2024,6,26]],"date-time":"2024-06-26T09:29:33Z","timestamp":1719394173000},"page":"4146","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":13,"title":["Development of High-Precision NO2 Gas Sensor Based on Non-Dispersive Infrared Technology"],"prefix":"10.3390","volume":"24","author":[{"ORCID":"https:\/\/orcid.org\/0009-0003-6228-1952","authenticated-orcid":false,"given":"Yongmin","family":"Zhao","sequence":"first","affiliation":[{"name":"State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China"},{"name":"Department of Advanced Electronic Materials, GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China"}]},{"given":"Congchun","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China"},{"name":"Department of Advanced Electronic Materials, GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China"}]},{"given":"Guangteng","family":"Ci","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China"},{"name":"Department of Advanced Electronic Materials, GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9853-2176","authenticated-orcid":false,"given":"Xiaoguang","family":"Zhao","sequence":"additional","affiliation":[{"name":"Department of Precision Instrument, Tsinghua University, Beijing 100084, China"}]},{"ORCID":"https:\/\/orcid.org\/0009-0007-2474-2235","authenticated-orcid":false,"given":"Jinguang","family":"Lv","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}]},{"given":"Jingqiu","family":"Liang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8061-1570","authenticated-orcid":false,"given":"Anjie","family":"Ming","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China"},{"name":"Department of Advanced Electronic Materials, GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China"}]},{"given":"Feng","family":"Wei","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China"},{"name":"GRINM (Guangdong) Institute for Advanced Materials and Technology, Foshan 528000, China"}]},{"given":"Changhui","family":"Mao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China"},{"name":"GRINM (Guangdong) Institute for Advanced Materials and Technology, Foshan 528000, China"}]}],"member":"1968","published-online":{"date-parts":[[2024,6,26]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"4735","DOI":"10.1021\/es506185x","article-title":"Selective catalytic reduction operation with heavy fuel oil: NOx, NH3, and particle emissions","volume":"49","author":"Lehtoranta","year":"2015","journal-title":"Environ. Sci. Technol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"3156","DOI":"10.1063\/1.1149879","article-title":"Nondispersive infrared monitoring of NO emissions in exhaust gases of vehicles","volume":"70","author":"Meneses","year":"1999","journal-title":"Rev. Sci. Instrum."},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Stolberg-Rohr, T., Buchner, R., Clausen, S., Jensen, J.M., Skouboe, A., Hawkins, G., and Hansen, R.S. (2014, January 27\u201331). In optics humidity compensation in NDIR exhaust gas measurements of NO2. Proceedings of the Optical Sensors SeTh1C-3, Barcelona, Spain.","DOI":"10.1364\/SENSORS.2014.SeTh1C.3"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"426","DOI":"10.1016\/j.snb.2016.08.177","article-title":"Sensitive and selective NO2 gas sensor based on WO3 nanoplates","volume":"240","author":"Shendage","year":"2017","journal-title":"Sens. Actuators B Chem."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"127897","DOI":"10.1016\/j.snb.2020.127897","article-title":"Long Range Surface Plasmons assisted highly sensitive and room temperature operated NO2 gas sensor","volume":"311","author":"Jain","year":"2020","journal-title":"Sens. Actuators B Chem."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"133452","DOI":"10.1016\/j.snb.2023.133452","article-title":"Highly sensitive and low detection limit NO2 gas sensor based on In2O3 nanoparticles modified peach kernel-like GaN composites","volume":"382","author":"Wang","year":"2023","journal-title":"Sens. Actuators B Chem."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"5245","DOI":"10.1038\/s41467-020-19085-1","article-title":"Non-dispersive infrared multi-gas sensing via nanoantenna integrated narrowband detectors","volume":"11","author":"Tan","year":"2020","journal-title":"Nat. Commun."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"123","DOI":"10.1016\/j.aca.2005.10.051","article-title":"Fiber optic based gas sensor with nanoporous structure for the selective detection of NO2 in air samples","volume":"557","author":"Mechery","year":"2006","journal-title":"Anal. Chim. Acta"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"4775","DOI":"10.1515\/nanoph-2020-0456","article-title":"Near-field resonant photon sorting applied: Dual-band metasurface quantum well infrared photodetectors for gas sensing","volume":"9","author":"Hainey","year":"2020","journal-title":"Nanophotonics"},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Li, J., Li, R.J., Liu, Y., Li, F., Lin, X., Yu, X.L., Shao, W.W., and Xu, X. (2022). In Situ Measurement of NO, NO2, and H2O in Combustion Gases Based on Near\/Mid-Infrared Laser Absorption Spectroscopy. Sensors, 22.","DOI":"10.3390\/s22155729"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"425","DOI":"10.1080\/05704928.2018.1474766","article-title":"Review on multi gas detector using infrared spectral absorption technology","volume":"54","author":"Chen","year":"2015","journal-title":"Appl. Spectrosc. Rev."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"012004","DOI":"10.1088\/0957-0233\/24\/1\/012004","article-title":"Optical gas sensing: A review","volume":"24","author":"Hodgkinson","year":"2012","journal-title":"Meas. Sci. Technol."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"580","DOI":"10.1016\/j.snb.2013.06.006","article-title":"Non-dispersive infra-red (NDIR) measurement of carbon dioxide at 4.2 \u03bcm in a compact and optically efficient sensor","volume":"186","author":"Hodgkinson","year":"2013","journal-title":"Sens. Actuators B Chem."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"954","DOI":"10.1016\/j.snb.2016.04.016","article-title":"A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels","volume":"236","author":"Vincent","year":"2016","journal-title":"Sens. Actuators B Chem."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"11239","DOI":"10.3390\/s150511239","article-title":"NDIR gas sensor for spatial monitoring of carbon dioxide concentrations in naturally ventilated livestock buildings","volume":"15","author":"Mendes","year":"2015","journal-title":"Sensors"},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Han, Y.L., Zhao, Y.M., Ming, A.J., Fang, Y.Y., Fang, S., Bi, S.S., Chen, J., Xu, R., Wei, F., and Mao, C. (2023). Application of an NDIR Sensor System Developed for Early Thermal Runaway Warning of Automotive Batteries. Energies, 16.","DOI":"10.3390\/en16093620"},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Popa, D., and Udrea, F. (2019). Towards integrated mid-infrared gas sensors. Sensors, 19.","DOI":"10.3390\/s19092076"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"012068","DOI":"10.1088\/1742-6596\/1229\/1\/012068","article-title":"Development of a multi-component infrared gas sensor detection system","volume":"1229","author":"Wang","year":"2019","journal-title":"J. Phys. Conf. Ser."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"103","DOI":"10.1016\/j.optlaseng.2015.05.007","article-title":"Three-gas detection system with IR optical sensor based on NDIR technology","volume":"74","author":"Tan","year":"2015","journal-title":"Opt. Lasers Eng."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"651","DOI":"10.4028\/www.scientific.net\/AMM.590.651","article-title":"Experimental study of methane sensor based on the principle of infrared detection","volume":"590","author":"Li","year":"2014","journal-title":"Appl. Mech. Mater."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Ng, D.K., Ha, C.P., Xu, L., Chen, W., Fu, Y.H., Zhang, T., Siow, L.Y., Jaafar, N., Ng, E.J., and Gao, Y. (2021, January 20\u201324). CO2 Gas Sensing By CMOS-MEMS ScAlN-Based Pyroelectric Detector Based on MID-IR Absorption. Proceedings of the 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA.","DOI":"10.1109\/Transducers50396.2021.9495707"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"529","DOI":"10.1016\/j.snb.2016.03.040","article-title":"A review on non-dispersive infrared gas sensors: Improvement of sensor detection limit and interference correction","volume":"231","author":"Dinh","year":"2016","journal-title":"Sens. Actuators B Chem."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"107949","DOI":"10.1016\/j.jqsrt.2021.107949","article-title":"The HITRAN2020 molecular spectroscopic database","volume":"277","author":"Gordon","year":"2022","journal-title":"J. Quant. Spectrosc. Radiat. Transf."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"452","DOI":"10.1117\/12.608615","article-title":"A highly sensitive IR-optical sensor for ethylene-monitoring","volume":"Volume 5836","author":"Hartwig","year":"2005","journal-title":"Smart Sensors, Actuators, and MEMS II"},{"key":"ref_25","first-page":"10","article-title":"Complete gas sensor circuit using nondispersive infrared (NDIR)","volume":"50","author":"Lee","year":"2016","journal-title":"Anal. Dialog."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"5400","DOI":"10.1007\/s10854-015-3088-y","article-title":"High responsivity of pyroelectric infrared detector based on ultra-thin (10 \u03bcm) LiTaO3","volume":"26","author":"Liang","year":"2015","journal-title":"J. Mater. Sci. Mater. Electron."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"2447","DOI":"10.1007\/s12598-023-02292-2","article-title":"High-dielectric loss black silicon decorated with multi-nanostructure for wide-band mid-infrared absorption","volume":"42","author":"Zhang","year":"2023","journal-title":"Rare Met."},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Sun, X.L., Ming, A.J., Zhang, J., Liu, W.B., Meng, Y., Qin, D., Yao, J., Wang, W., and Chen, D. (2017, January 9\u201312). Pyroelectric infrared detector based on LiTaO3 crystal with novelty nanostructured amorphous carbon film. Proceedings of the 12th International Conference on Nano\/Micro Engineered and Molecular Systems, Los Angeles, CA, USA.","DOI":"10.1109\/NEMS.2017.8017100"},{"key":"ref_29","unstructured":"Liang, Z.Q., Zheng, X., Li, G.T., Liu, Z.J., Jiang, Y.D., and Wang, T. (September, January 29). High Absorption of Goldblack Film for a pyroelectric detector based on ultra-thin LiTaO3 crystal. Proceedings of the 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), Chengdu, China."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"130437","DOI":"10.1016\/j.snb.2021.130437","article-title":"NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector","volume":"346","author":"Ng","year":"2021","journal-title":"Sens. Actuators B Chem."},{"key":"ref_31","unstructured":"CWA Methods Team (2016). Definition and Procedure for the Determination of the Method Detection Limit Revision2, Engineering and Analytical Support Branch\/EAD (4303T), Office of Science and Technology."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/13\/4146\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T15:04:47Z","timestamp":1760108687000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/13\/4146"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,6,26]]},"references-count":31,"journal-issue":{"issue":"13","published-online":{"date-parts":[[2024,7]]}},"alternative-id":["s24134146"],"URL":"https:\/\/doi.org\/10.3390\/s24134146","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2024,6,26]]}}}