{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,31]],"date-time":"2025-12-31T12:04:49Z","timestamp":1767182689566,"version":"build-2065373602"},"reference-count":52,"publisher":"MDPI AG","issue":"16","license":[{"start":{"date-parts":[[2024,8,16]],"date-time":"2024-08-16T00:00:00Z","timestamp":1723766400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Key R&amp;D Program of Anhui Province","award":["2022a05020027","202104a05020052","62075247"],"award-info":[{"award-number":["2022a05020027","202104a05020052","62075247"]}]},{"name":"China National Natural Science Foundation of China","award":["2022a05020027","202104a05020052","62075247"],"award-info":[{"award-number":["2022a05020027","202104a05020052","62075247"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Array waveguide gratings (AWGs) have been widely used in multi-purpose and multi-functional integrated photonic devices for Microwave photonics (MWP) systems. In this paper, we compare the effect of output waveguide configurations on the performance of AWGs. The AWG with an output waveguide converging on the grating circle had larger crosstalk and lower nonuniformity. We also fabricated a 1 \u00d7 8 AWG with an output waveguide converging onto the SOI\u2019s grating circle, whose central operation wavelength was around 1550 nm. The fabricated AWG has a chip size of 500 \u03bcm \u00d7 450 \u03bcm. Experimental results show that the adjacent channel crosstalk is \u221212.68 dB. The center channel insertion loss, as well as 3 dB bandwidth, are 4.18 dB and 1.22 nm at 1550 nm, respectively. The nonuniformity is about 0.494 dB, and the free spectral range is 19.4 nm. The proposed AWG is expected to play an important role in future MWP systems given its good nonuniformity and insertion loss level.<\/jats:p>","DOI":"10.3390\/s24165303","type":"journal-article","created":{"date-parts":[[2024,8,16]],"date-time":"2024-08-16T04:29:57Z","timestamp":1723782597000},"page":"5303","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Compact Silicon-Arrayed Waveguide Gratings with Low Nonuniformity"],"prefix":"10.3390","volume":"24","author":[{"given":"Chengkun","family":"Yang","sequence":"first","affiliation":[{"name":"Center for East China Research Institute of Electronics Engineering, Hefei 230036, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhonghao","family":"Zhou","sequence":"additional","affiliation":[{"name":"Center for East China Research Institute of Electronics Engineering, Hefei 230036, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xudong","family":"Gao","sequence":"additional","affiliation":[{"name":"Center for East China Research Institute of Electronics Engineering, Hefei 230036, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhengzhu","family":"Xu","sequence":"additional","affiliation":[{"name":"Center for East China Research Institute of Electronics Engineering, Hefei 230036, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Shoubao","family":"Han","sequence":"additional","affiliation":[{"name":"Center for East China Research Institute of Electronics Engineering, Hefei 230036, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yuhua","family":"Chong","sequence":"additional","affiliation":[{"name":"Center for East China Research Institute of Electronics Engineering, Hefei 230036, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7900-0422","authenticated-orcid":false,"given":"Rui","family":"Min","sequence":"additional","affiliation":[{"name":"Center for Cognition and Neuroergonomics, State Key Laboratory of Cognitive Neuroscience and Learning, Beijing Normal University, Zhuhai 519087, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yang","family":"Yue","sequence":"additional","affiliation":[{"name":"School of Information and Communications Engineering, Xi\u2019an Jiaotong University, Xian 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zongming","family":"Duan","sequence":"additional","affiliation":[{"name":"Center for East China Research Institute of Electronics Engineering, Hefei 230036, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2024,8,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"4628","DOI":"10.1109\/JLT.2006.885787","article-title":"Microwave photonics","volume":"24","author":"Seeds","year":"2006","journal-title":"J. Light. Technol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"832","DOI":"10.1109\/TMTT.2005.863060","article-title":"Photonic signal processing of microwave signals","volume":"54","author":"Minasian","year":"2006","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"506","DOI":"10.1002\/lpor.201200032","article-title":"Integrated microwave photonics","volume":"7","author":"Marpaung","year":"2013","journal-title":"Laser Photonics Rev."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Munoz, P., Domenech, J.D., Artundo, I., den Bested, J.H., and Capmany, J. (2023, January 23\u201327). Evolution of fabless generic photonic integration. Proceedings of the 2013 15th International Conference on Transparent Optical Networks (ICTON), Cartagena, Spain.","DOI":"10.1109\/ICTON.2013.6602975"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Dom\u00e9nech, J., Mu\u00f1oz, P., and Capmany, J. (2010, January 12\u201316). Discretely tunable microwave photonics beamformer based on ring resonators and arrayed waveguide gratings. Proceedings of the Silicon Photonics and Photonic Integrated Circuits II, Brussels, Belgium.","DOI":"10.1117\/12.853778"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"2898","DOI":"10.1109\/JLT.2019.2904710","article-title":"Optical beamformer based on diffraction order multiplexing (DOM) of an arrayed waveguide grating","volume":"37","author":"Hu","year":"2019","journal-title":"J. Light. Technol."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1202","DOI":"10.1109\/JSTQE.2002.805984","article-title":"Optical delay line based on arrayed waveguide gratings\u2019 spectral periodicity and dispersive media for antenna beamforming applications","volume":"8","author":"Vidal","year":"2002","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/JPHOT.2020.3040967","article-title":"Integrated optical delay line based on a loopback arrayed waveguide grating for radio-frequency filtering","volume":"12","author":"Wang","year":"2020","journal-title":"IEEE Photonics J."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Carpintero, G., Rouvalis, E., \u0141awniczuk, K., Van Dijk, F., Chtioui, M., Renaud, C.C., Leijtens, X.J., Bente, E.A., and Seeds, A. (2012, January 11\u201314). Millimeter-wave signal generation by optical heterodyne of two channels from an arrayed waveguide grating-based multi-wavelength laser. Proceedings of the 2012 IEEE International Topical Meeting on Microwave Photonics, Noordwijk, The Netherlands.","DOI":"10.1109\/MWP.2012.6474051"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"2654","DOI":"10.1109\/JLT.2010.2056914","article-title":"Wavelength interrogator based on closed-loop piezo-electrically scanned space-to-wavelength mapping of an arrayed waveguide grating","volume":"28","author":"Guo","year":"2010","journal-title":"J. Light. Technol."},{"key":"ref_11","first-page":"1","article-title":"Ultracompact 40-channel arrayed waveguide grating on silicon nitride platform at 860 nm","volume":"56","author":"Zhang","year":"2019","journal-title":"IEEE J. Quantum Electron."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"16648","DOI":"10.1364\/OE.21.016648","article-title":"Miniature spectrometer and beam splitter for an optical coherence tomography on a silicon chip","volume":"21","author":"Akca","year":"2013","journal-title":"Opt. Express"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"A74","DOI":"10.1364\/PRJ.443039","article-title":"Integrated scanning spectrometer with a tunable micro-ring resonator and an arrayed waveguide grating","volume":"10","author":"Zhang","year":"2022","journal-title":"Photonics Res."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Zhang, Z., Wang, Y., and Tsang, H.K. (2019, January 28\u201330). High resolution silicon nitride spectrometer by integrating micro-rings and arrayed waveguide gratings in tandem. Proceedings of the 2019 IEEE 16th International Conference on Group IV Photonics (GFP), Singapore.","DOI":"10.1109\/GROUP4.2019.8925865"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"4629","DOI":"10.1364\/OL.36.004629","article-title":"Raman spectroscopy with an integrated arrayed-waveguide grating","volume":"36","author":"Ismail","year":"2011","journal-title":"Opt. Lett."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1109\/JSTQE.2009.2039680","article-title":"Silicon-on-insulator spectral filters fabricated with CMOS technology","volume":"16","author":"Bogaerts","year":"2010","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"2431","DOI":"10.1109\/JLT.2021.3053837","article-title":"Novel wavelength multiplexer using (N+ 1)\u00d7(N+ 1) arrayed waveguide grating and polarization-combiner-rotator on SOI platform","volume":"39","author":"Zou","year":"2021","journal-title":"J. Light. Technol."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"30","DOI":"10.3390\/photonics4020030","article-title":"High-Resolution Arrayed-Waveguide-Gratings in Astronomy: Design and Fabrication Challenges","volume":"4","author":"Stoll","year":"2017","journal-title":"Photonics"},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"129139","DOI":"10.1016\/j.optcom.2022.129139","article-title":"Design, fabrication and characterization of arrayed waveguide grating devices based on different polymers","volume":"530","author":"Li","year":"2023","journal-title":"Opt. Commun."},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Weng, S., Yuan, P., Zhuang, W., Zhang, D., Luo, F., and Zhu, L. (2021). SOI-Based Multi-Channel AWG with Fiber Bragg Grating Sensing Interrogation System. Photonics, 8.","DOI":"10.3390\/photonics8060214"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"101113","DOI":"10.1016\/j.photonics.2023.101113","article-title":"SOI-based 15-channel arrayed waveguide grating design for fiber Bragg grating interrogator","volume":"53","author":"Li","year":"2023","journal-title":"Photonics Nanostructures-Fundam. Appl."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"39354","DOI":"10.1364\/OE.410439","article-title":"Performance limits of astronomical arrayed waveguide gratings on a silica platform","volume":"28","author":"Stoll","year":"2020","journal-title":"Opt. Express"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"108475","DOI":"10.1016\/j.optlastec.2022.108475","article-title":"The O-band 20-channel 800 GHz Arrayed Waveguide Grating based on silica platform for 1 Tb\/s or higher-speed communication system","volume":"156","author":"Li","year":"2022","journal-title":"Opt. Laser Technol."},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Seyringer, D., Serecunova, S., Uherek, F., Seyringer, H., and Chovan, J. (2023, January 2\u20136). 256-Channel 10-GHz AWG demultiplexer for ultra-dense WDM. Proceedings of the 2023 23rd International Conference on Transparent Optical Networks (ICTON), Bucharest, Romania.","DOI":"10.1109\/ICTON59386.2023.10207508"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"336","DOI":"10.1049\/el:19940237","article-title":"16channel phased array wavelength demultiplexer on InP with low polarisation sensitivity","volume":"30","author":"Bissessur","year":"1994","journal-title":"Electron. Lett."},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Schindler, A., Garten, A.-B., Boerma, H., Ganzer, F., Runge, P., and Schell, M. (2022, January 13\u201317). Low crosstalk INP-Based arrayed waveguide grating PIC. Proceedings of the 2022 IEEE Photonics Conference (IPC), Vancouver, BC, Canada.","DOI":"10.1109\/IPC53466.2022.9975503"},{"key":"ref_27","doi-asserted-by":"crossref","unstructured":"Takenobu, S., Kuwana, Y., Takayama, K., Sakane, Y., Mitsufumi, O., Hideki, S., Norbert, K., Brinker, W., Huihai, Y., and Zawadzki, C. (2008, January 24\u201328). All-polymer 8x8 AWG wavelength router using ultra low loss polymer optical waveguide material (CYTOPTM). Proceedings of the Optical Fiber Communication Conference, San Diego, CA, USA.","DOI":"10.1109\/OFC.2008.4528185"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"276","DOI":"10.1109\/JLT.2023.3306478","article-title":"Channel Scalability of Silicon Nitride (De-) multiplexers for Optical Interconnects at 1 \u03bcm","volume":"42","author":"Caut","year":"2023","journal-title":"J. Light. Technol."},{"key":"ref_29","first-page":"1","article-title":"Low-loss compact silicon nitride arrayed waveguide gratings for photonic integrated circuits","volume":"9","author":"Shang","year":"2017","journal-title":"IEEE Photonics J."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"14618","DOI":"10.1364\/OE.394783","article-title":"Compact ultrabroad-bandwidth cascaded arrayed waveguide gratings","volume":"28","author":"Doerr","year":"2020","journal-title":"Opt. Express"},{"key":"ref_31","doi-asserted-by":"crossref","unstructured":"Tu, H., Zhang, Y., and Guo, W. (2023, January 2\u20136). Arrayed Waveguide Grating Based on Z-cut Lithium Niobate Platform. Proceedings of the 2023 Opto-Electronics and Communications Conference (OECC), Shanghai, China.","DOI":"10.1109\/OECC56963.2023.10209708"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"3253","DOI":"10.1021\/acsphotonics.2c00437","article-title":"Wavelength-division multiplexing on an etchless lithium niobate integrated platform","volume":"9","author":"Yu","year":"2022","journal-title":"ACS Photonics"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"2300198","DOI":"10.1002\/adpr.202300198","article-title":"Custom Arrayed Waveguide Gratings with Improved Performance","volume":"4","author":"Doerr","year":"2023","journal-title":"Adv. Photonics Res."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"9395","DOI":"10.1364\/OE.22.009395","article-title":"Low-loss and low-crosstalk 8\u00d7 8 silicon nanowire AWG routers fabricated with CMOS technology","volume":"22","author":"Wang","year":"2014","journal-title":"Opt. Express"},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"9963","DOI":"10.1364\/OE.25.009963","article-title":"Performance improvement for silicon-based arrayed waveguide grating router","volume":"25","author":"Zou","year":"2017","journal-title":"Opt. Express"},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"369","DOI":"10.1109\/LPT.2023.3242994","article-title":"High-performance 32-channel silicon arrayed waveguide grating with 100 GHz spacing","volume":"35","author":"Xie","year":"2023","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"8781","DOI":"10.1364\/OE.19.008781","article-title":"Improved arrayed-waveguide-grating layout avoiding systematic phase errors","volume":"19","author":"Ismail","year":"2011","journal-title":"Opt. Express"},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"212","DOI":"10.1109\/50.212529","article-title":"Broad-band array multiplexers made with silica waveguides on silicon","volume":"11","author":"Adar","year":"1993","journal-title":"J. Light. Technol."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"310","DOI":"10.1109\/JSTQE.2013.2295879","article-title":"Ultra-compact silicon photonic 512 \u00d7 512 25 GHz arrayed waveguide grating router","volume":"20","author":"Cheung","year":"2013","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"17918","DOI":"10.1364\/OE.25.017918","article-title":"Arrayed waveguide grating spectrometers for astronomical applications: New results","volume":"25","author":"Gatkine","year":"2017","journal-title":"Opt. Express"},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"110817","DOI":"10.1016\/j.optlastec.2024.110817","article-title":"Crosstalk reduction for Arrayed waveguide gratings on Silicon-on-Insulator platform","volume":"175","author":"Li","year":"2024","journal-title":"Opt. Laser Technol."},{"key":"ref_42","doi-asserted-by":"crossref","unstructured":"Fu, X., Zhang, L., and Yang, L. (2019, January 17\u201320). Experimental Demonstration of a Horseshoe-shaped 16-channel Arrayed Waveguide Grating (De) multiplexer. Proceedings of the 2019 PhotonIcs & Electromagnetics Research Symposium-Spring (PIERS-Spring), Rome, Italy.","DOI":"10.1109\/PIERS-Spring46901.2019.9017393"},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"31899","DOI":"10.1364\/OE.22.031899","article-title":"Low-crosstalk Si arrayed waveguide grating with parabolic tapers","volume":"22","author":"Ye","year":"2014","journal-title":"Opt. Express"},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"236","DOI":"10.1109\/2944.577370","article-title":"PHASAR-based WDM-devices: Principles, design and applications","volume":"2","author":"Smit","year":"1996","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"400","DOI":"10.1049\/el:20060157","article-title":"Design and fabrication of an ultrasmall overlapped AWG demultiplexers based on \u03b1-Si nanowire waveguides","volume":"42","author":"Dai","year":"2006","journal-title":"Electron. Lett."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"3530","DOI":"10.1364\/OL.38.003530","article-title":"Fabrication of silicon reflection-type arrayed-waveguide gratings with distributed Bragg reflectors","volume":"38","author":"Okamoto","year":"2013","journal-title":"Opt. Lett."},{"key":"ref_47","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1049\/el.2010.3068","article-title":"Ultra-small Si-nanowire-based 400 GHz-spacing 15 \u00d7 15 arrayed-waveguide grating router with microbends","volume":"47","author":"Fu","year":"2011","journal-title":"Electron. Lett."},{"key":"ref_48","doi-asserted-by":"crossref","first-page":"718","DOI":"10.1109\/LPT.2014.2303793","article-title":"Effect of mask discretization on performance of silicon arrayed waveguide gratings","volume":"26","author":"Pathak","year":"2014","journal-title":"IEEE Photonics Technol. Lett."},{"key":"ref_49","doi-asserted-by":"crossref","unstructured":"Fu, J., Chen, Y., Sun, S., Han, Y., Huang, Y., Lin, S., Yang, L., and Yu, J. (2020, January 24\u201327). A Low-loss 4-channel Arrayed Waveguide Grating Using Parabolic Tapered Waveguides. Proceedings of the Asia Communications and Photonics Conference, Beijing, China.","DOI":"10.1364\/ACPC.2020.M4A.83"},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"4097","DOI":"10.1109\/JLT.2009.2022415","article-title":"NXN Cyclic-Frequency Router With Improved Performance Based on Arrayed-Waveguide Grating","volume":"27","author":"Kamei","year":"2009","journal-title":"J. Light. Technol."},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"5710","DOI":"10.1109\/JLT.2009.2034030","article-title":"Loss uniformity improvement of arrayed-waveguide grating with mode-field converters designed by wavefront matching method","volume":"27","author":"Sakamaki","year":"2009","journal-title":"J. Light. Technol."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"3001","DOI":"10.1109\/JLT.2007.905222","article-title":"Improve channel uniformity of an Si-nanowire AWG demultiplexer by using dual-tapered auxiliary waveguides","volume":"25","author":"Sheng","year":"2007","journal-title":"J. Light. Technol."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/16\/5303\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T15:37:24Z","timestamp":1760110644000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/24\/16\/5303"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,8,16]]},"references-count":52,"journal-issue":{"issue":"16","published-online":{"date-parts":[[2024,8]]}},"alternative-id":["s24165303"],"URL":"https:\/\/doi.org\/10.3390\/s24165303","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2024,8,16]]}}}