{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T01:27:02Z","timestamp":1760146022569,"version":"build-2065373602"},"reference-count":19,"publisher":"MDPI AG","issue":"18","license":[{"start":{"date-parts":[[2024,9,12]],"date-time":"2024-09-12T00:00:00Z","timestamp":1726099200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2021YFF0700404","52305581","52205570"],"award-info":[{"award-number":["2021YFF0700404","52305581","52205570"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["2021YFF0700404","52305581","52205570"],"award-info":[{"award-number":["2021YFF0700404","52305581","52205570"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Digital holography has transformative potential for the measurement of stacked-chip microstructures due to its non-invasive, single-shot, full-field characteristics. However, significant light scattering and diffraction at steep edges in step microstructures cause the batwing effect, leading to measurement errors. Herein, we propose a standard-deviation-based adaptive median filter to eliminate batwing effects in step microstructure measurement using digital holography. The standard deviation determines the positions of the steps and the range of the batwing effect. During filtering, the filter window size varies: it adjusts according to the center\u2019s position within the batwing effect range and reduces outside this range to prevent distortion in other regions. Filtering weights are set to maintain information integrity while using larger filter windows. Experiments on the Standard Resolution Target USAF 1951 and the standard step height target show that our method successfully eliminates batwings while preserving the integrity of the remaining profile.<\/jats:p>","DOI":"10.3390\/s24185928","type":"journal-article","created":{"date-parts":[[2024,9,12]],"date-time":"2024-09-12T10:15:27Z","timestamp":1726136127000},"page":"5928","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Standard-Deviation-Based Adaptive Median Filter for Elimination of Batwing Effects in Step Microstructure Measurement Using Digital Holography"],"prefix":"10.3390","volume":"24","author":[{"given":"Jiasi","family":"Wei","sequence":"first","affiliation":[{"name":"Key Laboratory of Bioanalysis and Metrology for State Market Regulation, Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China"}]},{"given":"Junjie","family":"Wu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Bioanalysis and Metrology for State Market Regulation, Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6849-6362","authenticated-orcid":false,"given":"Chen","family":"Wang","sequence":"additional","affiliation":[{"name":"Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200444, China"}]}],"member":"1968","published-online":{"date-parts":[[2024,9,12]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"5011","DOI":"10.1364\/OE.20.005011","article-title":"Precision Depth Measurement of through Silicon Vias (TSVs) on 3D Semiconductor Packaging Process","volume":"20","author":"Jin","year":"2012","journal-title":"Opt. 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