{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,21]],"date-time":"2026-04-21T20:13:26Z","timestamp":1776802406649,"version":"3.51.2"},"reference-count":12,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2009,3,11]],"date-time":"2009-03-11T00:00:00Z","timestamp":1236729600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>This paper presents an investigation on the humidity sensitivity of deposited multi-walled carbon nanotube (MWCNT) networks using ac dielectrophoresis (DEP) between interdigitated electrodes (IDEs). MWCNTs dispersed in ethanol were trapped and enriched between IDEs on a Si\/SiO2 substrate under a positive DEP force. After the DEP process, the ethanol was evaporated and the MWCNT network on a substrate with IDEs was put into a furnace for repeated thermal annealing. It was found that the resistance stability of the network was effectively improved through thermal annealing. The humidity sensitivity was obtained by measuring the resistance of the MWCNT network with different relative humidity at room temperature. The experimental results show the resistance increases linearly with increasing the relative humidity from 25% to 95% RH with a sensitivity of 0.5%\/%RH. The MWCNT networks have a reversible humidity sensing capacity with response time and recovery time of about 3 s and 25 s, respectively. The resistance is dependent on temperature with a negative coefficient of about -0.33%\/K in a temperature range from 293 K to 393 K.<\/jats:p>","DOI":"10.3390\/s90301714","type":"journal-article","created":{"date-parts":[[2009,3,11]],"date-time":"2009-03-11T16:35:44Z","timestamp":1236789344000},"page":"1714-1721","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":122,"title":["Humidity Sensitivity of Multi-Walled Carbon Nanotube Networks Deposited by Dielectrophoresis"],"prefix":"10.3390","volume":"9","author":[{"given":"Litao","family":"Liu","sequence":"first","affiliation":[{"name":"The state Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, P.R. China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xiongying","family":"Ye","sequence":"additional","affiliation":[{"name":"The state Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, P.R. China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kang","family":"Wu","sequence":"additional","affiliation":[{"name":"The state Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, P.R. China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Rui","family":"Han","sequence":"additional","affiliation":[{"name":"The state Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, P.R. China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhaoying","family":"Zhou","sequence":"additional","affiliation":[{"name":"The state Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, P.R. China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Tianhong","family":"Cui","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota, MN 55455, USA"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2009,3,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"787","DOI":"10.1126\/science.1060928","article-title":"Carbon nanotubes-the route toward applications","volume":"297","author":"Baughman","year":"2002","journal-title":"Science"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"622","DOI":"10.1126\/science.287.5453.622","article-title":"Nanotube molecular wires as chemical sensors","volume":"287","author":"Kong","year":"2000","journal-title":"Science"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"961","DOI":"10.1063\/1.1545166","article-title":"Sensors for sub-ppm NO2 gas detection based on carbon nanotube thin films","volume":"82","author":"Valentini","year":"2003","journal-title":"Applied Physics Letters"},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1942","DOI":"10.1126\/science.1109128","article-title":"Chemical detection with a single-walled carbon nanotube capacitor","volume":"307","author":"Snow","year":"2005","journal-title":"Science"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"345502","DOI":"10.1088\/0957-4484\/19\/34\/345502","article-title":"Multi-walled carbon nanotube arrays for gas sensing applications","volume":"19","author":"Rajaputra","year":"2008","journal-title":"Nanotechnology"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"651","DOI":"10.1016\/j.snb.2007.03.015","article-title":"Resistive humidity sensitivity of arrayed multi-wall carbon nanotube nests grown on arrayed nanoporous silicon pillars","volume":"125","author":"Jiang","year":"2007","journal-title":"Sensors and Actuators B"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"333","DOI":"10.1016\/S0925-4005(03)00224-7","article-title":"NO2 gas sensitivity of carbon nanotubes obtained by plasma enhanced chemical vapor deposition","volume":"93","author":"Cantalini","year":"2003","journal-title":"Sensors and Actuators B"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"5441","DOI":"10.1088\/0957-4484\/17\/21\/026","article-title":"Carbon nanotube-enhanced capillary condensation for a capacitive humidity sensor","volume":"17","author":"Yeow","year":"2006","journal-title":"Nanotechnology"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"11055","DOI":"10.1021\/jp056425v","article-title":"Charge transfer from metallic single-walled carbon nanotube sensor arrays","volume":"110","author":"Lee","year":"2006","journal-title":"Journal of Physical Chemistry B"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"279","DOI":"10.1016\/0008-6223(96)83349-5","article-title":"Chemical treatment of carbon nanotubes","volume":"34","author":"Esumi","year":"1996","journal-title":"Carbon"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"2638","DOI":"10.1063\/1.1510969","article-title":"Effect of H2O adsorption on electron transport in a carbon nanotube","volume":"81","author":"Pati","year":"2002","journal-title":"Applied Physics Letters"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"32","DOI":"10.1016\/S0925-4005(01)00923-6","article-title":"Gas sensing characteristics of multiwall carbon nanotubes","volume":"81","author":"Varghese","year":"2001","journal-title":"Sensors and Actuators B"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/9\/3\/1714\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:10:01Z","timestamp":1760220601000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/9\/3\/1714"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,3,11]]},"references-count":12,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2009,3]]}},"alternative-id":["s90301714"],"URL":"https:\/\/doi.org\/10.3390\/s90301714","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2009,3,11]]}}}