{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,5]],"date-time":"2026-07-05T01:36:38Z","timestamp":1783215398474,"version":"3.54.6"},"reference-count":15,"publisher":"MDPI AG","issue":"5","license":[{"start":{"date-parts":[[2009,4,28]],"date-time":"2009-04-28T00:00:00Z","timestamp":1240876800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full\/cross, five boss full\/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor.<\/jats:p>","DOI":"10.3390\/s90503228","type":"journal-article","created":{"date-parts":[[2009,4,28]],"date-time":"2009-04-28T07:13:20Z","timestamp":1240902800000},"page":"3228-3239","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine"],"prefix":"10.3390","volume":"9","author":[{"given":"Arti","family":"Tibrewala","sequence":"first","affiliation":[{"name":"Institute for Microtechnology, TU Braunschweig, Alte Salzdahlumer Str 203, 38124 Braunschweig, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Norbert","family":"Hofmann","sequence":"additional","affiliation":[{"name":"Institute for Process Measurement and Sensor Technology, TU Ilmenau, Gustav-Kirchhoff-Str. 1D-98693 Ilmenau, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Anurak","family":"Phataralaoha","sequence":"additional","affiliation":[{"name":"Institute for Microtechnology, TU Braunschweig, Alte Salzdahlumer Str 203, 38124 Braunschweig, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Gerd","family":"J\u00e4ger","sequence":"additional","affiliation":[{"name":"Institute for Process Measurement and Sensor Technology, TU Ilmenau, Gustav-Kirchhoff-Str. 1D-98693 Ilmenau, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Stephanus","family":"B\u00fcttgenbach","sequence":"additional","affiliation":[{"name":"Institute for Microtechnology, TU Braunschweig, Alte Salzdahlumer Str 203, 38124 Braunschweig, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2009,4,28]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"319","DOI":"10.1088\/0957-0233\/18\/2\/S01","article-title":"Ultraprecision micro-CMM using a low force 3D touch probe","volume":"18","author":"Kueng","year":"2007","journal-title":"Meas. Sci. Technol."},{"key":"ref_2","unstructured":"Mei, T., Ge, Y., Chen, Y., Ni, Y., Liao, W.H., Xu, Y., and Li, W. (,  1999). Design and fabrication of an integrated three-dimensional tactile sensor for space robotic applications. Orlando, Florida."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"2397","DOI":"10.1109\/TBME.2006.883618","article-title":"Integration of a miniaturized triaxial force sensor in a minimally invasive surgical tool","volume":"53","author":"Valdastri","year":"2006","journal-title":"IEEE Trans. Biomed. Eng."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/0960-1317\/10\/4\/302","article-title":"Three-dimensional microfabrication for a multi-degree-of-freedom capacitive force sensor using fibre-chip coupling","volume":"10","author":"Enikov","year":"2000","journal-title":"J. Micromech. Microeng."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1541","DOI":"10.1021\/la702380h","article-title":"3D Force and Displacement Sensor for SFA and AFM Measurements","volume":"24","author":"Kristiansen","year":"2008","journal-title":"Langmuir"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"1691","DOI":"10.1088\/0964-1726\/15\/6\/022","article-title":"Simulation, fabrication and characterization of a three-axis piezoresistive accelerometer","volume":"15","author":"Amarasinghe","year":"2006","journal-title":"Smart Mater. Struc."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1831","DOI":"10.1088\/0957-0233\/18\/7\/006","article-title":"Development of a low-cost nanoscale touch trigger probe based on two commercial DVD pick-up heads","volume":"18","author":"Chu","year":"2007","journal-title":"Meas. Sci. Technol."},{"key":"ref_8","unstructured":"Spinner, S., Batholomey, J., Becker, B., Doelle, M., Paul, O., Polian, I., Roth, R., Seitz, K, and Ruther, P (2006, January 26-28). Electromechanical reliability silicon force sensors. Stresa, Italy."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"505","DOI":"10.1016\/S0924-4247(95)01190-0","article-title":"Silicon three-axial tactile sensor","volume":"54","author":"Chu","year":"1996","journal-title":"Sens. Actuat. A."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1116","DOI":"10.1088\/0960-1317\/16\/7\/003","article-title":"Modelling and investigation of the mechanical and electrical characteristics of the silicon 3D-boss microprobe for force and deflection measurements","volume":"16","author":"Nesterov","year":"2006","journal-title":"J. Micromech. Microeng."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"514","DOI":"10.1088\/0960-1317\/15\/3\/011","article-title":"Modelling and investigation of the silicon twin design 3D micro probe","volume":"15","author":"Nesterov","year":"2005","journal-title":"J. Micromech. Microeng."},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Levey, B., Gieschke, P., Doelle, M., Spinner, S., Trautmann, A., Ruther, P., and Paul, O. (2007, January 21-25). CMOS-Integrated silicon 3D force sensor system for micro component coordinate measurement machines. Kobe, Japan.","DOI":"10.1109\/MEMSYS.2007.4433081"},{"key":"ref_13","doi-asserted-by":"crossref","unstructured":"Ruther, P., Bartholomeyczik, J., Trautmann, A., Wandt, M., and Paul, O. (2005). Novel 3D piezoresistive Silicon Force Sensor for Dimensional Metrology of Micro Components. IEEE, 1006\u20131009.","DOI":"10.1109\/ICSENS.2005.1597872"},{"key":"ref_14","first-page":"81","article-title":"A nanopositioning and nanomeasuring machine: operation \u2013 measured results","volume":"2","author":"Jaeger","year":"2004","journal-title":"Nanotechnol. Precis. Eng."},{"key":"ref_15","unstructured":"Schmidt, I. (2008). Beitr\u00e4ge zur Verringerung der Messunsicherheit der Nanopositionier- und Nanomessmaschine. [Dissertation, Technische Universit\u00e4t Ilmenau]."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/9\/5\/3228\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:10:19Z","timestamp":1760220619000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/9\/5\/3228"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,4,28]]},"references-count":15,"journal-issue":{"issue":"5","published-online":{"date-parts":[[2009,5]]}},"alternative-id":["s90503228"],"URL":"https:\/\/doi.org\/10.3390\/s90503228","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2009,4,28]]}}}