{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,15]],"date-time":"2025-11-15T16:57:02Z","timestamp":1763225822854,"version":"build-2065373602"},"reference-count":17,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2009,6,2]],"date-time":"2009-06-02T00:00:00Z","timestamp":1243900800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>A high speed MEMS flow sensor to enhance the reliability and accuracy of a liquid dispensing system is proposed. Benefitting from the sensor information feedback, the system can self-adjust the open time of the solenoid valve to accurately dispense desired volumes of reagent without any pre-calibration. First, an integrated high-speed liquid flow sensor based on the measurement of the pressure difference across a flow channel is presented. Dimensions of the micro-flow channel and two pressure sensors have been appropriately designed to meet the static and dynamic requirements of the liquid dispensing system. Experiments results show that the full scale (FS) flow measurement ranges up to 80 \u03bcL\/s, with a nonlinearity better than 0.51% FS. Secondly, a novel closed-loop control strategy is proposed to calculate the valve open time in each dispensing cycle, which makes the system immune to liquid viscosity, pressure fluctuation, and other sources of error. Finally, dispensing results show that the system can achieve better dispensing performance, and the coefficient of variance (CV) for liquid dispensing is below 3% at 1 \u03bcL and below 4% at 100 nL.<\/jats:p>","DOI":"10.3390\/s90604138","type":"journal-article","created":{"date-parts":[[2009,6,2]],"date-time":"2009-06-02T12:16:48Z","timestamp":1243945008000},"page":"4138-4150","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing"],"prefix":"10.3390","volume":"9","author":[{"given":"Yaxin","family":"Liu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"}]},{"given":"Liguo","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"}]},{"given":"Lining","family":"Sun","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"}]}],"member":"1968","published-online":{"date-parts":[[2009,6,2]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"311","DOI":"10.1016\/j.pbiomolbio.2004.07.009","article-title":"Robotic Nanolitre Protein Crystallisation at the MRC Laboratory of Molecular Biology","volume":"88","author":"Stock","year":"2005","journal-title":"Prog. Biophys. Mol. Biol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1165","DOI":"10.1107\/S0907444905017336","article-title":"A Nanovolume Crystallization Robot that Creates its Crystallization Screens On-the-fly","volume":"61","author":"Hazes","year":"2005","journal-title":"Acta Cryst. D"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1109","DOI":"10.1007\/s00216-007-1335-7","article-title":"The Dosage of Small Volumes for Chromatographic Quantifications using a Drop-on-demand Dispenser System","volume":"388","author":"Englmann","year":"2007","journal-title":"Anal. Bioanal. Chem."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"134","DOI":"10.1109\/JMEMS.2004.839000","article-title":"Miniaturized Flowthrough Microdispenser with Piezoceramic Tripod Actuation","volume":"14","author":"Bergkvist","year":"2005","journal-title":"J. Microelectromech. Syst."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"17","DOI":"10.1088\/0965-0393\/13\/1\/002","article-title":"A Numerical Study of the effect of Operating Parameters on Drop Formation in a Squeeze Mode Inkjet Device","volume":"13","author":"Wu","year":"2005","journal-title":"Model. Simul. Mater. SCI. Eng."},{"key":"ref_6","first-page":"111","article-title":"Automated Submicroliter Fluid Dispensing technology for Protein Crystallization","volume":"15","author":"Liu","year":"2007","journal-title":"J. Basic Sci. Eng."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"543","DOI":"10.1016\/j.elstat.2005.10.008","article-title":"Dispensing Picoliter Droplets on Substrates using Dielectrophoresis","volume":"64","author":"Ahmed","year":"2006","journal-title":"J. Electrostat."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"278","DOI":"10.1016\/j.jala.2006.05.010","article-title":"Liquid-Handling Technology and the Method of Electrostatic Drop Transfer to Improve Dispensing Performance","volume":"11","author":"Jetha","year":"2006","journal-title":"J. Assoc. Lab. Autom."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"187","DOI":"10.1109\/TASE.2006.871481","article-title":"Automated Liquid Dispensing Pin for DNA Microarray Applications","volume":"3","author":"Chang","year":"2006","journal-title":"IEEE Trans. Autom. Sci. Eng."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"39","DOI":"10.1109\/MIE.2007.357173","article-title":"A Micropump for Pulmonary Blood Flow Regulation","volume":"1","author":"Diaz","year":"2007","journal-title":"IEEE Ind. Electron. Mag."},{"key":"ref_11","unstructured":"Carolyn, R.L., and Li, D.Q. (2004, January Jun). Sample Manipulation in Microfluidic Devices with Electrical Conductivity Gradients. Rochester, NY, U.S."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"32","DOI":"10.1016\/S1359-6446(02)02176-1","article-title":"Picoliter: Enabling Precise Transfer of Nanoliter and Picoliter Volumes","volume":"7","author":"Ellson","year":"2002","journal-title":"Drug Discovery Today"},{"key":"ref_13","unstructured":"Roxhed, N., Rydholm, S., Samel, B., van der Wijngaart, W., Griss, P., and Stemme, G. (2004, January Jan). Low Cost Device or Precise Microliter range Liquid Dispensing. Maastricht, Belgium."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"29","DOI":"10.1016\/S1535-5535-03-00011-X","article-title":"Transfer of Low Nanoliter Volumes between Microplates Using Focused Acoustics\u2014Automation Considerations","volume":"10","author":"Ellson","year":"2003","journal-title":"J. Assoc. Lab. Autom."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"84","DOI":"10.1016\/S1359-6446(00)00064-7","article-title":"Challenges and solutions to ultra-high-throughput screening assay miniaturization: submicroliter fluid handling","volume":"5","author":"Dunn","year":"2000","journal-title":"Drug Discov. Today"},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"203","DOI":"10.1089\/adt.2005.3.203","article-title":"Precise Nanoliter Fluid Handling System with Integrated High-Speed Flow Sensor","volume":"2","author":"Haber","year":"2005","journal-title":"ASSAY Drug Dev. Technol."},{"key":"ref_17","unstructured":"Kovacs, G.T.A. (1998). Micromachined Transducers Sourcebook, The McGraw-Hill Companies Inc."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/9\/6\/4138\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:10:29Z","timestamp":1760220629000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/9\/6\/4138"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,6,2]]},"references-count":17,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2009,6]]}},"alternative-id":["s90604138"],"URL":"https:\/\/doi.org\/10.3390\/s90604138","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2009,6,2]]}}}