{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,12]],"date-time":"2025-10-12T04:40:05Z","timestamp":1760244005270,"version":"build-2065373602"},"reference-count":19,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2009,8,6]],"date-time":"2009-08-06T00:00:00Z","timestamp":1249516800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>In this study we used the commercial 0.35 \u00b5m CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the potential to be integrated with circuitry on a chip. For post-processing we used an etchant to remove the sacrificial layer and thereby suspend the micromirrors. The micromirror array contained a circular membrane and four fixed beams set symmetrically around and below the circular mirror; these four fan-shaped electrodes controlled the tilting of the micromirror. A MEMS (microelectromechanical system) motion analysis system and a confocal 3D-surface topography were used to characterize the properties and configuration of the micromirror array. Each micromirror could be rotated in four independent directions. Experimentally, we found that the micromirror had a tilting angle of about 2.55\u00b0 when applying a driving voltage of 40 V. The natural frequency of the micromirrors was 59.1 kHz.<\/jats:p>","DOI":"10.3390\/s90806219","type":"journal-article","created":{"date-parts":[[2009,8,6]],"date-time":"2009-08-06T13:31:49Z","timestamp":1249565509000},"page":"6219-6231","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique"],"prefix":"10.3390","volume":"9","author":[{"given":"Pin-Hsu","family":"Kao","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ching-Liang","family":"Dai","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Cheng-Chih","family":"Hsu","sequence":"additional","affiliation":[{"name":"Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan, 320 Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chyan-Chyi","family":"Wu","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2009,8,6]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"7361","DOI":"10.1364\/OE.16.007361","article-title":"High-dynamic range image projection using an auxiliary MEMS mirror array","volume":"16","author":"Hoskinson","year":"2008","journal-title":"Opt. 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Syst"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/9\/8\/6219\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T22:10:53Z","timestamp":1760220653000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/9\/8\/6219"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,8,6]]},"references-count":19,"journal-issue":{"issue":"8","published-online":{"date-parts":[[2009,8]]}},"alternative-id":["s90806219"],"URL":"https:\/\/doi.org\/10.3390\/s90806219","relation":{},"ISSN":["1424-8220"],"issn-type":[{"type":"electronic","value":"1424-8220"}],"subject":[],"published":{"date-parts":[[2009,8,6]]}}}