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In view of the deficiencies in early diagnosis of cardiovascular diseases, acoustic properties of S1 and S2 heart sounds are utilized. In this paper, we propose an integrated concave cilium MEMS heart sound sensor. The concave structure enlarges the area for receiving sound waves to improve the low-frequency sensitivity, and realizes the low-frequency and high-sensitivity characteristics of an MEMS heart sound sensor by adopting a reasonable acoustic package design, reducing the loss of heart sound distortion and faint heart murmurs, and improving the auscultation effect. Finally, experimental results show that the integrated concave ciliated MEMS heart sound sensor\u2019s sensitivity reaches \u2212180.6 dB@500 Hz, as compared with the traditional bionic ciliated MEMS heart sound sensor; the sensitivity is 8.9 dB higher. The sensor has a signal-to-noise ratio of 27.05 dB, and has good heart sound detection ability, improving the accuracy of clinical detection methods.<\/jats:p>","DOI":"10.3390\/bios12070534","type":"journal-article","created":{"date-parts":[[2022,7,18]],"date-time":"2022-07-18T01:53:22Z","timestamp":1658109202000},"page":"534","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Design and Realization of MEMS Heart Sound Sensor with Concave, Racket-Shaped Cilium"],"prefix":"10.3390","volume":"12","author":[{"given":"Yuhua","family":"Yang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bo","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6572-2045","authenticated-orcid":false,"given":"Jiangong","family":"Cui","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Guojun","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Renxin","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1762-9246","authenticated-orcid":false,"given":"Wendong","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9897-1718","authenticated-orcid":false,"given":"Changde","family":"He","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yirui","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Pengcheng","family":"Shi","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shuotong","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2022,7,18]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"183","DOI":"10.2147\/JMDH.S193904","article-title":"The first 200 years of cardiac auscultation and future perspectives","volume":"12","author":"Montinari","year":"2019","journal-title":"J. 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