{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,25]],"date-time":"2026-04-25T10:51:34Z","timestamp":1777114294184,"version":"3.51.4"},"reference-count":46,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2020,4,6]],"date-time":"2020-04-06T00:00:00Z","timestamp":1586131200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["51703180;51720105016"],"award-info":[{"award-number":["51703180;51720105016"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100002858","name":"China Postdoctoral Science Foundation","doi-asserted-by":"publisher","award":["2017M610634"],"award-info":[{"award-number":["2017M610634"]}],"id":[{"id":"10.13039\/501100002858","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100007128","name":"Natural Science Foundation of Shaanxi Province","doi-asserted-by":"publisher","award":["2018JQ5195"],"award-info":[{"award-number":["2018JQ5195"]}],"id":[{"id":"10.13039\/501100007128","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100009996","name":"Shaanxi Province Postdoctoral Science Foundation","doi-asserted-by":"publisher","award":["2017BSHEDZZ73"],"award-info":[{"award-number":["2017BSHEDZZ73"]}],"id":[{"id":"10.13039\/501100009996","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Special scientific research plan project of Shaanxi Provincial Department of Education","award":["13JS045"],"award-info":[{"award-number":["13JS045"]}]},{"DOI":"10.13039\/501100012226","name":"Fundamental Research Funds for the Central Universities","doi-asserted-by":"publisher","award":["xjj2017024"],"award-info":[{"award-number":["xjj2017024"]}],"id":[{"id":"10.13039\/501100012226","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Materials"],"abstract":"<jats:p>Molecular dynamics (MD) simulations were applied to study the fundamental mechanism of nanoscale grinding with a modeled tool trajectory of straight lines. Nevertheless, these models ignore curvature changes of actual tool paths, which need optimization to facilitate understanding of the underlying science of the machining processes. In this work, a three-dimensional MD model considering the effect of tool paths was employed to investigate distributions of stresses including hydrostatic stress, von Mises stress, normal and shear stresses during atomic grinding. Simulation results showed that average values of the stresses are greatly influenced by the radius of the tool trajectory and the grinding depth. Besides the averaged stresses, plane stress distribution was also analyzed, which was obtained by intercepting stresses on the internal planes of the workpiece. For the case of a grinding depth of 25 \u00c5 and an arc radius 40 \u00c5, snapshots of the stresses on the X\u2013Y, X\u2013Z and Y\u2013Z planes showed internal stress concentration. The results show that phase transformation occurred from \u03b1- silicon to \u03b2- silicon in the region with hydrostatic stress over 8 GPa. Moreover, lateral snapshots of the three-dimensional stress distribution are comprehensively discussed. It can be deduced from MD simulations of stress distribution in monocrystalline silicon with the designed new model that a curved tool trajectory leads to asymmetric distribution and concentration of stress during atomic-scale grinding. The analysis of stress distribution with varying curve geometries and cutting depths can aid fundamental mechanism development in nanomanufacturing and provide theoretical support for ultraprecision grinding.<\/jats:p>","DOI":"10.3390\/ma13071710","type":"journal-article","created":{"date-parts":[[2020,4,7]],"date-time":"2020-04-07T03:58:39Z","timestamp":1586231919000},"page":"1710","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":13,"title":["Stress Distribution in Silicon Subjected to Atomic Scale Grinding with a Curved Tool Path"],"prefix":"10.3390","volume":"13","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0956-3833","authenticated-orcid":false,"given":"Xudong","family":"Fang","sequence":"first","affiliation":[{"name":"School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"},{"name":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro\/Nano Manufacturing and Measurement Technology, Xi\u2019an Jiaotong University, Xi\u2019an 710056, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Qiang","family":"Kang","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"},{"name":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro\/Nano Manufacturing and Measurement Technology, Xi\u2019an Jiaotong University, Xi\u2019an 710056, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jianjun","family":"Ding","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro\/Nano Manufacturing and Measurement Technology, Xi\u2019an Jiaotong University, Xi\u2019an 710056, China"},{"name":"Shaanxi Key Laboratory of Non-traditional Machining, Xi\u2019an Technological University, Xi\u2019an 710021, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lin","family":"Sun","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"},{"name":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro\/Nano Manufacturing and Measurement Technology, Xi\u2019an Jiaotong University, Xi\u2019an 710056, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ryutaro","family":"Maeda","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"},{"name":"Institute of Mechanical System Engineering, The National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 3058564, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhuangde","family":"Jiang","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"},{"name":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro\/Nano Manufacturing and Measurement Technology, Xi\u2019an Jiaotong University, Xi\u2019an 710056, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,4,6]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"372","DOI":"10.1080\/10402000208982562","article-title":"Phase transformations in silicon under dry and lubricated sliding","volume":"45","author":"Kovalchenko","year":"2002","journal-title":"Tribol. 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