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Single-factor experiments were conducted to evaluate the effects of graphite, MoS2, and Polytetrafluoroethylene (PTFE); CeO2, SiO2, and ZrO2; and NH4HCO3, NaHCO3, and NaCl on tool performance and silicon-surface quality. PTFE exhibited the best overall lubrication performance, reducing the temperature rise by 18.0% compared with the control. The addition of 1 wt.% CeO2 reduced the surface roughness Sa from 11.72 to 9.47 nm and decreased the residual compressive stress by approximately 86.5%. Moreover, 10 wt.% NH4HCO3 increased the apparent porosity from 6.76% to 32.42% and improved the sustainability of material removal. Based on the single-factor results, an L9 orthogonal experiment was performed using PTFE, CeO2, and NH4HCO3 as the control factors. Multi-response optimization identified a balanced formulation containing 1.5 wt.% PTFE, 1.0 wt.% CeO2, and 10 wt.% NH4HCO3. Validation experiments yielded a Sa of 8.46 nm, MRR = 58.85 nm\/min, a material removal-to-tool wear ratio (W-ratio) of 7.67, and a residual stress of \u221255.20 MPa, demonstrating a favorable balance among surface quality, material-removal efficiency, and tool durability.<\/jats:p>","DOI":"10.3390\/ma19194163","type":"journal-article","created":{"date-parts":[[2026,9,29]],"date-time":"2026-09-29T12:09:25Z","timestamp":1790683765000},"page":"4163","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Influence of Modifying Additives on Resin-Bonded Diamond Tool and Single-Crystal Silicon Lapping Performance"],"prefix":"10.3390","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-6214-7812","authenticated-orcid":false,"given":"Tianchen","family":"Zhao","sequence":"first","affiliation":[{"name":"The State Key Lab of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, 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