{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,31]],"date-time":"2026-10-31T03:41:48Z","timestamp":1793418108712,"version":"4.5.0"},"reference-count":33,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2022,3,12]],"date-time":"2022-03-12T00:00:00Z","timestamp":1647043200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100006769","name":"Russian Science Foundation","doi-asserted-by":"publisher","award":["20-79-10059"],"award-info":[{"award-number":["20-79-10059"]}],"id":[{"id":"10.13039\/501100006769","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Membranes"],"abstract":"<jats:p>TiSiCN coatings have been obtained by anode evaporation of titanium and the decomposition of hexamethyldisilazane in an arc discharge, using a self-heated hollow cathode, at the pressure rate of 1 mTorr of the Ar+N2 gas mixture. The proposed method makes it possible to independently and widely change the amount of metal and precursor vapor flows, the pressure and composition of the vapor-gas mixture and the degree of ionic interaction on the surface of the growing coating within a single discharge system. The paper presents the method and the results of the effect of a current discharge (10\u201350 A), and the flux of precursor vapours (0\u20131 g\/h), on deposition rates, compositions, and properties of TiSiCN coatings deposited by an advanced combined PVD+PECVD method. Dense homogeneous TiSiCN coatings up to 6 \u00b5m thick and up to 27.5 GPa in hardness were obtained at 7.5 \u00b5m\/h. The composition of the obtained coatings has been studied by X-ray diffraction and X-ray photoelectron spectroscopy, and it has been shown that the presented methods can form nanocomposite coatings with nanocrystallites TiC, TiN, and TiCxN1\u2212x 3\u201310 nm in the amorphous matrix based on SiCN.<\/jats:p>","DOI":"10.3390\/membranes12030321","type":"journal-article","created":{"date-parts":[[2022,3,13]],"date-time":"2022-03-13T22:29:43Z","timestamp":1647210583000},"page":"321","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge"],"prefix":"10.3390","volume":"12","author":[{"given":"Andrey","family":"Menshakov","sequence":"first","affiliation":[{"name":"Institute of Electrophysics of the Ural Branch of the Russian Academy of Sciences, 106 Amundsen Street, 620016 Yekaterinburg, Russia"},{"name":"Institute of Physics and Technology, Ural Federal University, 19 Mira Street, 620002 Yekaterinburg, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yulia","family":"Bruhanova","sequence":"additional","affiliation":[{"name":"Institute of Electrophysics of the Ural Branch of the Russian Academy of Sciences, 106 Amundsen Street, 620016 Yekaterinburg, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Andrey","family":"Kukharenko","sequence":"additional","affiliation":[{"name":"Institute of Physics and Technology, Ural Federal University, 19 Mira Street, 620002 Yekaterinburg, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8727-4730","authenticated-orcid":false,"given":"Ivan","family":"Zhidkov","sequence":"additional","affiliation":[{"name":"Institute of Physics and Technology, Ural Federal University, 19 Mira Street, 620002 Yekaterinburg, Russia"},{"name":"M.N. Mikheev Institute of Metal Physics, Ural Branch of the Russian Academy of Sciences, 18 Sofia Kovalevskoi Street, 620990 Yekaterinburg, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2022,3,12]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"180","DOI":"10.1016\/j.surfcoat.2017.04.057","article-title":"Improving thermal stability of TiSiN nanocomposite coatings by multilayered epitaxial growth","volume":"321","author":"Xu","year":"2017","journal-title":"Surf. Coat. Technol."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"382","DOI":"10.1016\/j.surfcoat.2005.02.128","article-title":"Superhard nanocomposite Ti\u2013Si\u2013C\u2013N coatings prepared by pulsed-d.c plasma enhanced CVD","volume":"200","author":"Dayan","year":"2005","journal-title":"Surf. Coat. Technol."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"133","DOI":"10.1016\/j.surfcoat.2012.10.067","article-title":"Ternary and quarternary TiSiN and TiSiCN nanocomposite coatings obtained by Chemical Vapor Deposition","volume":"215","author":"Endler","year":"2013","journal-title":"Surf. Coat. Technol."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"5240","DOI":"10.1016\/j.surfcoat.2006.07.122","article-title":"Effects of carbon content and annealing temperature on the microstructure and hardness of super hard Ti\u2013Si\u2013C\u2013N nanocomposite coatings prepared by pulsed d.c. PCVD","volume":"201","author":"Guo","year":"2007","journal-title":"Surf. Coat. Technol."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"5068","DOI":"10.1016\/j.surfcoat.2011.05.009","article-title":"Microstructure and mechanical properties of hard Ti\u2013Si\u2013C\u2013N films deposited by dc magnetron sputtering of multicomponent Ti\/C\/Si target","volume":"205","author":"Onoprienko","year":"2011","journal-title":"Surf. Coat. Technol."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"4236","DOI":"10.1016\/j.surfcoat.2006.08.066","article-title":"Tribological behavior of a TiSiCN coating tested in air and coolant","volume":"201","author":"Xu","year":"2006","journal-title":"Surf. Coat. Technol."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"4453","DOI":"10.1016\/j.surfcoat.2006.08.091","article-title":"Deposition of thick nitrides and carbonitrides for sand erosion protection","volume":"201","author":"Wei","year":"2006","journal-title":"Surf. Coat. Technol."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.surfcoat.2018.04.049","article-title":"Tribocorrosion behavior of low friction TiSiCN nanocomposite coatings deposited on titanium alloy for biomedical applications","volume":"347","author":"Hatem","year":"2018","journal-title":"Surf. Coat. Technol."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"145","DOI":"10.1016\/j.surfcoat.2012.10.038","article-title":"Arc deposition of Ti\u2013Si\u2013C\u2013N thin films from binary and ternary cathodes \u2014 Comparing sources of C","volume":"213","author":"Eriksson","year":"2012","journal-title":"Surf. Coat. Technol."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"126413","DOI":"10.1016\/j.surfcoat.2020.126413","article-title":"Enhanced discharge and surface properties of TiSiCN coatings deposited by pulse-enhanced vacuum arc evaporation","volume":"403","author":"Ma","year":"2020","journal-title":"Surf. Coat. Technol."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1023\/A:1022663210694","article-title":"The Structure and Properties of Ti\u2013B\u2013N, Ti\u2013Si\u2013B\u2013N, Ti\u2013Si\u2013C\u2013N, and Ti\u2013Al\u2013C\u2013N Coatings Deposited by Magnetron Sputtering Using Composite Targets Produced by Self-Propagating High-Temperature Synthesis (SHS)","volume":"6","author":"Shtansky","year":"1998","journal-title":"J. Mater. Synth. Process."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"143","DOI":"10.1016\/S0263-4368(02)00013-6","article-title":"Chemical-vapor deposition of wear resistant hard coatings in the Ti\u2013B\u2013C\u2013N system: Properties and metal-cutting tests","volume":"20","author":"Holzschuh","year":"2002","journal-title":"Int. J. Refract. Met. Hard Mater."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"48","DOI":"10.1007\/s11837-011-0092-4","article-title":"Recent advances in modulated pulsed power magnetron sputtering for surface engineering","volume":"63","author":"Lin","year":"2011","journal-title":"JOM"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"74","DOI":"10.1016\/j.surfcoat.2013.08.049","article-title":"A comparative study of conventional magnetron sputter deposited and plasma enhanced magnetron sputter deposited Ti\u2013Si\u2013C\u2013N nanocomposite coatings","volume":"241","author":"Wei","year":"2014","journal-title":"Surf. Coat. Technol."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"400","DOI":"10.1016\/j.jnucmat.2015.06.016","article-title":"Vacuum-arc chromium-based coatings for protection of zirconium alloys from the high-temperature oxidation in air","volume":"465","author":"Kuprin","year":"2015","journal-title":"J. Nucl. Mater."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"294","DOI":"10.1016\/j.corsci.2015.02.032","article-title":"High vacuum arc ion plating NiCrAlY coatings: Microstructure and oxidation behavior","volume":"94","author":"Shen","year":"2015","journal-title":"Corros. Sci."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"87","DOI":"10.1016\/S0065-2539(08)60281-4","article-title":"Hollow Cathode Arcs","volume":"35","author":"Delcroix","year":"1974","journal-title":"Adv. Electron. Electron Phys."},{"key":"ref_18","first-page":"1797","article-title":"Ion-Assisted \u03b1-Al2O3 Coating Deposition by Anodic Arc Evaporation at 500\u2013550 \u00b0C","volume":"63","author":"Kamenetskikh","year":"2021","journal-title":"Sov. Phys. J."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Men\u2019Shakov, A.I., and Emlin, D.R. (2021). Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode. Tech. Phys. Lett., 1\u20134.","DOI":"10.1134\/S1063785021050254"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"012039","DOI":"10.1088\/1742-6596\/1134\/1\/012039","article-title":"Investigation of the conditions for the formation of SiCN-based coatings in arc discharge with self-heated hollow cathode","volume":"1134","author":"Emlin","year":"2018","journal-title":"J. Phys. Conf. Ser."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1031","DOI":"10.1134\/S1063785012110223","article-title":"Experimental study of the transition to high-current regime of discharge with a hollow self-heated titanium cathode in nitrogen","volume":"38","author":"Gavrilov","year":"2012","journal-title":"Tech. Phys. Lett."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"12053","DOI":"10.1088\/1742-6596\/830\/1\/012053","article-title":"Operational testing of self-heated cathode made from compacted TiN powder","volume":"830","author":"Gavrilov","year":"2017","journal-title":"J. Phys. Conf. Ser."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1126","DOI":"10.1116\/1.3463709","article-title":"Microstructure and tribological performance of nanocomposite Ti\u2013Si\u2013C\u2013N coatings deposited using hexamethyldisilazane precursor","volume":"28","author":"Wei","year":"2010","journal-title":"J. Vac. Sci. Technol. A Vacuum Surfaces Films"},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Tatarova, E., Guerra, V., Henriques, J., and Ferreira, C.M. (2007). Nitrogen dissociation in low-pressure microwave plasmas. J. Phys. Conf. Ser., 71.","DOI":"10.1088\/1742-6596\/71\/1\/012010"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"264","DOI":"10.1016\/j.surfcoat.2019.05.070","article-title":"Influence of hexamethyldisilazane vapor on the structure and mechanical properties of TiC-based coatings","volume":"374","author":"Thompson","year":"2019","journal-title":"Surf. Coat. Technol."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"014006","DOI":"10.1088\/0031-8949\/2008\/T131\/014006","article-title":"Synthesis of Ti\/TiN\/TiCN coatings grown in graded form by sputtering dc","volume":"T131","author":"Agudelo","year":"2008","journal-title":"Phys. Scr."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"415","DOI":"10.1016\/j.surfcoat.2004.08.042","article-title":"Synthesis and characterization of quaternary Ti\u2013Si\u2013C\u2013N coatings prepared by a hybrid deposition technique","volume":"188-189","author":"Jeon","year":"2004","journal-title":"Surf. Coat. Technol."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"307","DOI":"10.1016\/S0257-8972(00)00947-6","article-title":"Characterisation of Ti1\u2212xSixNy nanocomposite films","volume":"133\u2013134","author":"Vaz","year":"2000","journal-title":"Surf. Coat. Technol."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"371","DOI":"10.1016\/S0040-6090(03)01085-X","article-title":"Effects of bias voltage and temperature on mechanical properties of Ti\u2013Si\u2013N coatings deposited by a hybrid system of arc ion plating and sputtering techniques","volume":"447-448","author":"Choi","year":"2004","journal-title":"Thin Solid Films"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"538","DOI":"10.1016\/j.surfcoat.2008.05.019","article-title":"Plasma enhanced magnetron sputter deposition of Ti\u2013Si\u2013C\u2013N based nanocomposite coatings","volume":"203","author":"Wei","year":"2008","journal-title":"Surf. Coat. Technol."},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"285","DOI":"10.1016\/j.triboint.2017.01.002","article-title":"Influence of carbon contents on the structure and tribocorrosion properties of TiSiCN coatings on Ti6Al4V","volume":"109","author":"Wang","year":"2017","journal-title":"Tribol. Int."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"320","DOI":"10.1016\/j.surfcoat.2014.09.006","article-title":"Effect of ion bombardment on structural, mechanical, erosion and corrosion properties of Ti\u2013Si\u2013C\u2013N nanocomposite coatings","volume":"258","author":"Wei","year":"2014","journal-title":"Surf. Coat. Technol."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"076407","DOI":"10.1088\/2053-1591\/ab95d4","article-title":"Tribocorrosion behaviors of TiSiCN nanocomposite coatings deposited by high power impulse magnetron sputtering","volume":"7","author":"Wang","year":"2020","journal-title":"Mater. Res. Express"}],"container-title":["Membranes"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2077-0375\/12\/3\/321\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T22:35:36Z","timestamp":1760135736000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2077-0375\/12\/3\/321"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022,3,12]]},"references-count":33,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2022,3]]}},"alternative-id":["membranes12030321"],"URL":"https:\/\/doi.org\/10.3390\/membranes12030321","relation":{},"ISSN":["2077-0375"],"issn-type":[{"value":"2077-0375","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022,3,12]]}}}