{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,30]],"date-time":"2026-01-30T07:27:41Z","timestamp":1769758061662,"version":"3.49.0"},"reference-count":32,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2020,4,10]],"date-time":"2020-04-10T00:00:00Z","timestamp":1586476800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"the National Key R&amp;D Program of China","award":["2018YFF01011200"],"award-info":[{"award-number":["2018YFF01011200"]}]},{"name":"the Fundamental Research Funds for the Central Universities","award":["2019CDCG0007"],"award-info":[{"award-number":["2019CDCG0007"]}]},{"name":"the Special Funds of the National Natural Science Foundation of China","award":["61327002"],"award-info":[{"award-number":["61327002"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This paper presents a miniaturized, broadband near-infrared (NIR) spectrometer with a flame-retardant 4 (FR4)-based scanning micrograte. A 90\u00b0 off-axis parabolic mirror and a crossed Czerny\u2013Turner structure were used for creating an astigmatism-free optical system design. The optical system of the spectrometer consists of a 90\u00b0 off-axis parabolic mirror, an FR4-based scanning micrograte, and a two-color indium gallium arsenide (InGaAs) diode with a crossed Czerny\u2013Turner structure optical design. We used a wide exit slit and an off-axis parabolic mirror with a short focal length to improve the signal-to-noise ratio (SNR) of the full spectrum. We enabled a miniaturized design for the spectrometer by utilizing a novel FR4 micrograte for spectral dispersion and spatial scanning. The spectrometer can detect the full near-infrared spectrum while only using a two-color InGaAs diode, and thus, the grating scanning angle of this spectrometer is small when compared to a dual-detector-based spectrometer. In addition, the angle signal can be obtained through an angle sensor, which is integrated into the scanning micrograte. The real-time angle signal is used to form a closed-loop control over the scanning micrograte and calibrate the spectral signal. Finally, a series of tests was performed. The experimental results showed that the spectrometer has a working wavelength range of 800\u20132500 nm. The resolution is 10 nm at a wavelength range of 800\u20131650 nm and 15 nm at a wavelength range of 1650\u20132500 nm. Similarly, the stability of these two wavelength ranges is better than \u00b11 nm and \u00b12 nm, respectively. The spectrometer\u2019s volume is 80 \u00d7 75 \u00d7 65 mm3 and its weight is 0.5 kg. The maximum spectral fluctuation does not exceed 1.5% and the signal-to-noise ratio is 284 after only one instance of averaging.<\/jats:p>","DOI":"10.3390\/mi11040393","type":"journal-article","created":{"date-parts":[[2020,4,13]],"date-time":"2020-04-13T04:45:31Z","timestamp":1586753131000},"page":"393","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":8,"title":["Miniature Broadband NIR Spectrometer Based on FR4 Electromagnetic Scanning Micro-Grating"],"prefix":"10.3390","volume":"11","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7757-7375","authenticated-orcid":false,"given":"Liangkun","family":"Huang","sequence":"first","affiliation":[{"name":"Key Laboratory of Fundamental Science of Micro\/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China"},{"name":"Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Quan","family":"Wen","sequence":"additional","affiliation":[{"name":"Key Laboratory of Fundamental Science of Micro\/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China"},{"name":"Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jian","family":"Huang","sequence":"additional","affiliation":[{"name":"Key Laboratory of Fundamental Science of Micro\/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China"},{"name":"Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China"},{"name":"College of Information Engineering, Qujing Normal University, Qujing 655000, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9484-1561","authenticated-orcid":false,"given":"Fan","family":"Yu","sequence":"additional","affiliation":[{"name":"Key Laboratory of Fundamental Science of Micro\/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China"},{"name":"Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6494-9085","authenticated-orcid":false,"given":"Hongjie","family":"Lei","sequence":"additional","affiliation":[{"name":"Key Laboratory of Fundamental Science of Micro\/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China"},{"name":"Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhiyu","family":"Wen","sequence":"additional","affiliation":[{"name":"Key Laboratory of Fundamental Science of Micro\/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China"},{"name":"Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2020,4,10]]},"reference":[{"key":"ref_1","first-page":"12","article-title":"Micro-opto-electro-mechanical systems: Recent developments and LETI\u2019s activities. 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