{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,1]],"date-time":"2026-07-01T20:00:19Z","timestamp":1782936019399,"version":"3.54.5"},"reference-count":25,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2021,5,29]],"date-time":"2021-05-29T00:00:00Z","timestamp":1622246400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a large dynamic range of reading, which eliminates the off-chip clock and current generator. The resonant frequency can be adjusted by adjusting the bias voltage of the oscillator to further adjust the sensitivity of the magnetometer. With the mechanical Q value characteristic, a great dynamic range can be achieved. In addition, using the readout circuit of the nested chopper and correlated double-sampling (CDS) to reduce the noise and achieve a smaller resolution, the calibration circuit compensates for errors caused by the manufacturing process. The frequency of the tuning range of the proposed structure is 17,720\u201319,924 Hz, and the tuning range of the measurement result is 110,620.36 ppm. The sensitivities of the x-, y-, and z-axes of the magnetometer with driving current of 2 mA are 218.3, 74.33, and 7.5 \u03bcV\/\u03bcT for ambient pressure of 760 torr. The resolutions of the x-, y-, and z-axes of the magnetometer with driving current of 2 mA are 3.302, 9.69, and 96 nT\/\u221aHz for ambient pressure of 760 torr.<\/jats:p>","DOI":"10.3390\/mi12060635","type":"journal-article","created":{"date-parts":[[2021,5,31]],"date-time":"2021-05-31T01:51:37Z","timestamp":1622425897000},"page":"635","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 \u03bcm Process"],"prefix":"10.3390","volume":"12","author":[{"given":"Chih-Hsuan","family":"Lin","sequence":"first","affiliation":[{"name":"Department of Electronic Engineering, National Chiao Tung University, Hsinchu 300, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chao-Hung","family":"Song","sequence":"additional","affiliation":[{"name":"Department of Electronic Engineering, National Chiao Tung University, Hsinchu 300, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kuei-Ann","family":"Wen","sequence":"additional","affiliation":[{"name":"Department of Electronic Engineering, National Chiao Tung University, Hsinchu 300, Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2021,5,29]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Kunze, K., Bahle, G., Lukowicz, P., and Partridge, K. (2010, January 13). Can magnetic field sensors replace gyroscopes in wearable sensing applications?. Proceedings of the International Symposium on Wearable Computers (ISWC), Seoul, Korea.","DOI":"10.1109\/ISWC.2010.5665859"},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Lin, C.H., Song, C.H., and Wen, K.A. (2021). Multi-function microelectromechanical Systems Implementation with ASIC compatible CMOS 0.18 \u03bcm process. Micromachines, 12.","DOI":"10.3390\/mi12030314"},{"key":"ref_3","doi-asserted-by":"crossref","unstructured":"Serrano, D.E., Tabrizian, R., and Ayazi, F. (2011, January 8). Tunable piezoelectric MEMS resonators for real-time clock. Proceedings of the 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings, San Fransisco, CA, USA.","DOI":"10.1109\/FCS.2011.5977885"},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Chang, C., Tsai, M., Liu, Y., Sun, C., and Fang, W. (2013, January 20\u201324). Development of multi-axes CMOS-MEMS resonant magnetic sensor using Lorentz and electromagnetic forces Micro Electro Mechanical Systems (MEMS). Proceedings of the 2013 IEEE 26th International Conference on, Taipei, Taiwan.","DOI":"10.1109\/MEMSYS.2013.6474210"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Kumar, V., Mahdavi, M., Guo, X., Mehdizadeh, E., and Pourkamali, S. (2015, January 2). Ultra Sensitive Lorentz Force MEMS Magnetometer with Pico-Tesla Limit of Detection. Proceedings of the IEEE MEMS, Estoril, Portugal.","DOI":"10.1109\/MEMSYS.2015.7050922"},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Snoeij, M.F., Schaffer, V., Udayashankar, S., and Ivanov, M.V. (2016). Integrated Fluxgate Magnetometer for Use in Isolated Current Sensing. IEEE J. Solid-State Circuits, 51.","DOI":"10.1109\/JSSC.2016.2554147"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"3983","DOI":"10.1109\/TIE.2012.2210958","article-title":"Z-Axis Magnetometers for MEMS Inertial Measurement Units Using an Industrial Process","volume":"60","author":"Langfelder","year":"2013","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_8","doi-asserted-by":"crossref","unstructured":"Barrow, H.G., Naing, T.L., Schneider, R.A., Rocheleau, T.O., Yeh, V., Ren, Z., and Nguyen, C.T.C. (2012, January 19). A real-time 32.768-kHz clock oscillator using a 0.0154-mm2 micromechanical resonator frequency-setting element. Proceedings of the 2012 IEEE International Frequency Control Symposium Proceedings, Baltimore, MD, USA.","DOI":"10.1109\/FCS.2012.6243740"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"648","DOI":"10.1109\/LED.2016.2538772","article-title":"A Sub-150-\u03bcW BEOL-Embedded CMOS-MEMS Oscillator With a 138-dB\u03a9 Ultra-Low-Noise TIA","volume":"37","author":"Li","year":"2016","journal-title":"IEEE Electron Device Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"3047","DOI":"10.1109\/TCSI.2017.2758860","article-title":"Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation","volume":"64","author":"Uranga","year":"2017","journal-title":"IEEE Trans. Circuits Syst. I Regul. Pap."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Wang, C.-K., Chen, C.-S., and Wen, K.A. (2011, January 5). A monolithic CMOS MEMS accelerometer with chopper correlated double sampling readout circuit. Proceedings of the Circuits and Systems (ISCAS), 2011 IEEE International Symposium, Rio de Janeiro, Brazil.","DOI":"10.1109\/ISCAS.2011.5937993"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1367","DOI":"10.1007\/s00542-015-2758-2","article-title":"Elastic coefficient analysis on planar S-shaped micro spring under high impact load","volume":"23","author":"Nie","year":"2017","journal-title":"Microsyst. Technol."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"4474","DOI":"10.1109\/JSEN.2013.2264807","article-title":"Area-Efficient Three Axis MEMS Lorentz Force Magnetometer","volume":"13","author":"Vashwar","year":"2013","journal-title":"Sens. J. IEEE"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"702","DOI":"10.1109\/JMEMS.2011.2140355","article-title":"Parametrically Amplified Z-Axis Lorentz Force Magnetometer","volume":"20","author":"Thompson","year":"2011","journal-title":"J. Microelectromech. Syst."},{"key":"ref_15","unstructured":"Johnston, H.L., Mattox, R.W., and Powers, R.W. (2012, May 29). Viscosities of Air and Nitrogen at Low Pressures, Available online: https:\/\/digital.library.unt.edu\/ark:\/67531\/metadc55865\/."},{"key":"ref_16","unstructured":"CoventorWare Inc. (2012, May 29). Macromodel Extraction and System Simulation Ref. Guide. Available online: http:\/\/www.coventor.com."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Tan, S.S., Liu, C.Y., Yeh, L.K., Chiu, Y.H., Lu, M.S.-C., and Hsu, K.Y.J. (2010, January 1). Design of low-noise CMOS MEMS accelerometer with techniques for thermal stability and stable DC biasing. Proceedings of the IEEE Custom Integrated Circuits Conference, San Jose, CA, USA.","DOI":"10.1109\/CICC.2010.5617382"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"1002","DOI":"10.1109\/JMEMS.2012.2196493","article-title":"Three-Axis Lorentz-Force Magnetic Sensor for Electronic Compass Applications","volume":"21","author":"Mo","year":"2012","journal-title":"J. Microelectromech. Syst."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"440","DOI":"10.1109\/4.753677","article-title":"An integrated CMOS micromechanical resonator high-Q oscillator","volume":"34","author":"Nguyen","year":"1999","journal-title":"J. Solid-State Circuits IEEE"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"214","DOI":"10.1109\/JEDS.2017.2666821","article-title":"Monolithic Multi-Sensor Design with Resonator-Based MEMS Structures","volume":"5","author":"Kuo","year":"2017","journal-title":"IEEE J. Electron Devices Soc."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"131","DOI":"10.1016\/j.sna.2011.05.032","article-title":"Feed-through capacitance reduction for a micro-resonator with push\u2013pull configuration based on electrical characteristic analysis of resonator with direct drive","volume":"170","author":"Park","year":"2011","journal-title":"Sens. Actuators A Phys."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"512","DOI":"10.1109\/4.839911","article-title":"High-Q HF microelectromechanical filters","volume":"35","author":"Bannon","year":"2000","journal-title":"J. Solid-State Circuits IEEE"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1877","DOI":"10.1109\/4.890300","article-title":"A CMOS Nested-Chopper Instrumentation Amplifier with 100-nV Offset","volume":"35","author":"Bakker","year":"2000","journal-title":"IEEE J. Solid-State Circuits"},{"key":"ref_24","doi-asserted-by":"crossref","unstructured":"Sawigun, C., Mahattanakul, J., Demosthenous, A., and Pal, D. (2007, January 27\u201330). A Low-Power CMOS Analog Voltage Buffer Using Compact Adaptive Biasing. Proceedings of the 2007 18th European Conference on Circuit Theory and Design, Seville, Spain.","DOI":"10.1109\/ECCTD.2007.4529521"},{"key":"ref_25","doi-asserted-by":"crossref","unstructured":"Leo, C.J., Zhao, B., and Gao, Y. (2016, January 12\u201314). A fully integrated capacitance boosting offset calibration circuit for capacitive pressure sensor. Proceedings of the 2016 International Symposium on Integrated Circuits (ISIC), Singapore.","DOI":"10.1109\/ISICIR.2016.7829688"}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/12\/6\/635\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T06:08:54Z","timestamp":1760162934000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/12\/6\/635"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,5,29]]},"references-count":25,"journal-issue":{"issue":"6","published-online":{"date-parts":[[2021,6]]}},"alternative-id":["mi12060635"],"URL":"https:\/\/doi.org\/10.3390\/mi12060635","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,5,29]]}}}