{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,2]],"date-time":"2025-11-02T05:01:28Z","timestamp":1762059688795,"version":"build-2065373602"},"reference-count":39,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2022,7,14]],"date-time":"2022-07-14T00:00:00Z","timestamp":1657756800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100002858","name":"Fellowship of China National Postdoctoral Program for Innovative Talents","doi-asserted-by":"publisher","award":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"],"award-info":[{"award-number":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"]}],"id":[{"id":"10.13039\/501100002858","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"],"award-info":[{"award-number":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Research Project of State Key Laboratory of Mechanical System and Vibration in China","award":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"],"award-info":[{"award-number":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"]}]},{"name":"Key Research and Development Projects of Shaanxi Province in China","award":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"],"award-info":[{"award-number":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"]}]},{"name":"Guangdong Specific Discipline Project","award":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"],"award-info":[{"award-number":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"]}]},{"name":"Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics Project","award":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"],"award-info":[{"award-number":["BX20200268","51720105016","MSV202103","2021GXLH-Z-051","2020ZDZX2006","ZDSYS20200810171201007"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>Subsurface damage of fused silica optics is one of the major factors restricting the performance of optical systems. The densification-affected deformation and fracture in fused silica under a sliding contact are investigated in this study, via three-dimensional finite element analysis (FEA). The finite element models of scratching with 70.3\u00b0 conical and Berkovich indenters are established. A refined elliptical constitutive model is used to consider the influence of densification. The finite element models are experimentally verified by elastic recovery, and theoretically verified by hardness ratio. Results of densification and plastic deformation distributions indicate that the accuracy of existent sliding stress field models may be improved if the spherical\/cylindrical yield region is replaced by an ellipsoid\/cylindroid, and the embedding of the yield region is considered. The initiation sequence, and the locations and stages of radial, median, and lateral cracks are discussed by analyzing the predicted sliding stress fields. Median and radial cracks along the sliding direction tend to be the first cracks that emerge in the sliding and unloading stages, respectively. They coalesce to form a big median\u2013radial crack that penetrates through the entire yield region. The fracture behavior of fused silica revealed in this study is essential in the low-damage machining of fused silica optics.<\/jats:p>","DOI":"10.3390\/mi13071106","type":"journal-article","created":{"date-parts":[[2022,7,15]],"date-time":"2022-07-15T01:57:11Z","timestamp":1657850231000},"page":"1106","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["An Investigation into the Densification-Affected Deformation and Fracture in Fused Silica under Contact Sliding"],"prefix":"10.3390","volume":"13","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4119-5823","authenticated-orcid":false,"given":"Changsheng","family":"Li","sequence":"first","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"},{"name":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yushan","family":"Ma","sequence":"additional","affiliation":[{"name":"Wuzhong Instrument Co., Ltd., Wuzhong 751199, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lin","family":"Sun","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Liangchi","family":"Zhang","sequence":"additional","affiliation":[{"name":"Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics, Southern University of Science and Technology, Shenzhen 518055, China"},{"name":"SUSTech Institute for Manufacturing Innovation, Southern University of Science and Technology, Shenzhen 518055, China"},{"name":"Department of Mechanics and Aerospace Engineering, Southern University of Science and Technology, Shenzhen 518055, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chuhan","family":"Wu","sequence":"additional","affiliation":[{"name":"School of Mechanical and Manufacturing Engineering, The University of New South Wales, Sydney, NSW 2052, Australia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jianjun","family":"Ding","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Duanzhi","family":"Duan","sequence":"additional","affiliation":[{"name":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Xuepeng","family":"Wang","sequence":"additional","affiliation":[{"name":"Wuzhong Instrument Co., Ltd., Wuzhong 751199, China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Zhandong","family":"Chang","sequence":"additional","affiliation":[{"name":"Wuzhong Instrument Co., Ltd., Wuzhong 751199, China"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2022,7,14]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","unstructured":"Campbell, J.H., Hawley-Fedder, R.A., Stolz, C.J., Menapace, J.A., Borden, M.R., Whitman, P.K., Yu, J., Runkel, M., Riley, M.O., and Feit, M.D. (2004, January 25\u201329). 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