{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,1]],"date-time":"2026-10-01T20:56:32Z","timestamp":1790888192460,"version":"4.1.0"},"reference-count":33,"publisher":"MDPI AG","issue":"8","license":[{"start":{"date-parts":[[2024,7,28]],"date-time":"2024-07-28T00:00:00Z","timestamp":1722124800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"SIREI, Universidad Veracruzana"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>Acetaldehyde is a volatile organic compound that can cause damage at the cellular and genomic levels. The monitoring of acetaldehyde gas at low concentrations requires fast-response and low-cost sensors. Herein, we propose the design of an acetaldehyde gas sensor based on a low-cost Microelectromechanical System (MEMS) process. This sensor is formed by a single-clamped piezoelectric multilayer resonator (3000 \u00d7 1000 \u00d7 52.2 \u00b5m) with a simple operating principle and easy signal processing. This resonator uses a zinc oxide piezoelectric layer (1 \u00b5m thick) and a sensing film of titanium oxide (1 \u00b5m thick). In addition, the resonator uses a support layer of 304 stainless steel (50 \u00b5m thick) and two aluminum layers (100 nm thick). Analytical and Finite-Element Method (FEM) models are developed to predict the mechanical behavior of the gas sensor, considering the influence of the different layers of the resonator. The analytical results agree well with respect to the FEM model results. The gas sensor has a first bending frequency of 4722.4 Hz and a sensitivity of 8.22 kHz\/g. A minimum detectable concentration of acetaldehyde of 102 ppm can be detected with the proposed sensor. This gas sensor has a linear behavior to detect different acetaldehyde concentrations using the frequency shifts of its multilayer resonator. The gas sensor design offers advantages such as small size, a light weight, and cost-efficient fabrication.<\/jats:p>","DOI":"10.3390\/mi15080962","type":"journal-article","created":{"date-parts":[[2024,8,1]],"date-time":"2024-08-01T15:26:53Z","timestamp":1722526013000},"page":"962","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Design of Acetaldehyde Gas Sensor Based on Piezoelectric Multilayer Microelectromechanical System Resonator"],"prefix":"10.3390","volume":"15","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-3460-1838","authenticated-orcid":false,"given":"Primavera","family":"Arg\u00fcelles-Lucho","sequence":"first","affiliation":[{"name":"Facultad de Ingenier\u00eda de la Construcci\u00f3n y el H\u00e1bitat, Universidad Veracruzana, Boca del R\u00edo 94294, Veracruz, Mexico"},{"name":"Tecnol\u00f3gico Nacional de M\u00e9xico, Campus Veracruz, Veracruz 91800, Veracruz, Mexico"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rosa M.","family":"Woo-Garc\u00eda","sequence":"additional","affiliation":[{"name":"Facultad de Ingenier\u00eda de la Construcci\u00f3n y el H\u00e1bitat, Universidad Veracruzana, Boca del R\u00edo 94294, Veracruz, Mexico"},{"name":"Faculty of Electrical and Electronic Engineering, University Veracruzana, Boca del R\u00edo 94294, Veracruz, Mexico"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0968-6745","authenticated-orcid":false,"given":"Leandro","family":"Garc\u00eda-Gonz\u00e1lez","sequence":"additional","affiliation":[{"name":"Micro and Nanotechnology Research Center, Universidad Veracruzana, Boca del R\u00edo 94294, Veracruz, Mexico"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rene","family":"P\u00e9rez-Cuapio","sequence":"additional","affiliation":[{"name":"Faculty of Chemical Engineering, Benemerite Autonomous University of Puebla, Puebla 72570, Puebla, Mexico"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3800-9003","authenticated-orcid":false,"given":"Natiely","family":"Hern\u00e1ndez-Sebastian","sequence":"additional","affiliation":[{"name":"Optical Research Center, Le\u00f3n 37150, Guanajuato, Mexico"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7373-9258","authenticated-orcid":false,"given":"Agust\u00edn L.","family":"Herrera-May","sequence":"additional","affiliation":[{"name":"Facultad de Ingenier\u00eda de la Construcci\u00f3n y el H\u00e1bitat, Universidad Veracruzana, Boca del R\u00edo 94294, Veracruz, Mexico"},{"name":"Micro and Nanotechnology Research Center, Universidad Veracruzana, Boca del R\u00edo 94294, Veracruz, Mexico"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3332-846X","authenticated-orcid":false,"given":"Francisco","family":"L\u00f3pez-Huerta","sequence":"additional","affiliation":[{"name":"Faculty of Electrical and Electronic Engineering, University Veracruzana, Boca del R\u00edo 94294, Veracruz, Mexico"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2024,7,28]]},"reference":[{"key":"ref_1","unstructured":"UNEP (2023, November 18). 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