{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,11]],"date-time":"2026-10-11T13:30:20Z","timestamp":1791725420524,"version":"4.3.4"},"reference-count":40,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2025,6,25]],"date-time":"2025-06-25T00:00:00Z","timestamp":1750809600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Science and Technology on Electromechanical Dynamic Control Laboratory, China","award":["6142601CX2208"],"award-info":[{"award-number":["6142601CX2208"]}]},{"name":"Science and Technology on Electromechanical Dynamic Control Laboratory, China","award":["6142601032402"],"award-info":[{"award-number":["6142601032402"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>To examine the impact of the strain rate on the anisotropic mechanical characteristics of single-crystal silicon, nanoindentation and micro-tensile\u2013compression tests were performed. This study analyzed the effects of varying crystal orientations at different strain rates on load\u2013displacement behavior, elastic modulus, hardness, fracture toughness, and true stress\u2013strain responses. The nanoindentation results showed that at room temperature, single-crystal silicon exhibited an elastic recovery rate of approximately 42%. Notably, the elastic modulus remained unaffected by strain rate variations, whereas hardness increased with higher strain rates. Fracture toughness at room temperature displayed marked anisotropy, with the &lt;100&gt; orientation exhibiting the lowest value at 0.691 MPa\u00b7m1\/2 and the &lt;110&gt; orientation showing the highest one at 0.797 MPa\u00b7m1\/2. Additionally, tensile and compression experiments revealed that the fracture strength of &lt;100&gt;-oriented silicon increased from 117 MPa at a strain rate of 0.001 s\u22121 to 550 MPa at a strain rate of 0.01 s\u22121.<\/jats:p>","DOI":"10.3390\/mi16070744","type":"journal-article","created":{"date-parts":[[2025,6,27]],"date-time":"2025-06-27T05:29:58Z","timestamp":1751002198000},"page":"744","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["Study on Anisotropic Mechanical Properties of Single-Crystal Silicon at Different Strain Rates"],"prefix":"10.3390","volume":"16","author":[{"given":"Zhongwang","family":"Tian","sequence":"first","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"},{"name":"Xi\u2019an Institute of Electromechanical Information Technaology, Xi\u2019an 710065, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wei","family":"Xue","sequence":"additional","affiliation":[{"name":"Xi\u2019an Institute of Electromechanical Information Technaology, Xi\u2019an 710065, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wenzhong","family":"Lou","sequence":"additional","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Min","family":"Liu","sequence":"additional","affiliation":[{"name":"Xi\u2019an Institute of Electromechanical Information Technaology, Xi\u2019an 710065, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hengzhen","family":"Feng","sequence":"additional","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaoxia","family":"Wang","sequence":"additional","affiliation":[{"name":"Xi\u2019an Institute of Electromechanical Information Technaology, Xi\u2019an 710065, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shiteng","family":"Li","sequence":"additional","affiliation":[{"name":"School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shaokuan","family":"Wu","sequence":"additional","affiliation":[{"name":"Institute of Functional Nano & Soft Materials (FUNSOM), Soochow University, Suzhou 215123, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2025,6,25]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1679","DOI":"10.1007\/s00170-014-6095-x","article-title":"Reliability research on micro-and nano-electromechanical systems: A review","volume":"74","author":"Arab","year":"2014","journal-title":"Int. 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