{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,17]],"date-time":"2026-06-17T06:54:24Z","timestamp":1781679264372,"version":"3.54.5"},"reference-count":24,"publisher":"MDPI AG","issue":"6","license":[{"start":{"date-parts":[[2026,6,16]],"date-time":"2026-06-16T00:00:00Z","timestamp":1781568000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>A high quality factor, denoted as the Q-factor, is crucial for micromachined disk resonator gyroscopes, commonly referred to as DRGs, to suppress thermomechanical noise and improve bias stability. However, the coupled energy dissipation mechanisms under low-pressure conditions impose significant limitations on further Q-factor enhancement. This paper establishes a rigorous multiphysics damping analysis framework for DRGs and quantitatively investigates the contributions of air damping, thermoelastic damping, and anchor loss. A free-molecular squeeze-film damping model is derived based on kinetic gas theory and molecular energy transfer mechanisms, avoiding the continuous fluid assumption of the classical Reynolds equation, which fails in low-pressure regimes. Due to the highly symmetric ring structure and central anchor design, finite element method simulations reveal an extremely high anchor-loss-limited quality factor, Q_anchor, of approximately 1.85 \u00d7 1012, indicating negligible anchor-induced dissipation. Under an operating pressure of 0.1 Pa, air damping is validated as the absolute dominant energy dissipation mechanism with a gas quality factor, Q_air, of approximately 1.105 \u00d7 105, which is significantly lower than the thermoelastic damping quality factor, Q_TED, evaluated at 8.98 \u00d7 105. To break the classical trade-off between squeeze-film damping suppression and capacitive drive efficiency, a decoupled gap optimization strategy is proposed. By maintaining the drive electrode gap, gap_e, at 7.2 \u00b5m while increasing only the parasitic ring-to-suspended-mass gap, gap_m, to 12 \u00b5m, the squeeze-film-damping-limited Q-factor is improved by approximately 25% to 1.381 \u00d7 105 without degrading electromechanical coupling efficiency. In addition, the optimal anchor radius is determined to be approximately 160 \u00b5m. The proposed framework provides practical design guidance for high-Q DRGs and other MEMS resonant inertial sensors.<\/jats:p>","DOI":"10.3390\/mi17060727","type":"journal-article","created":{"date-parts":[[2026,6,17]],"date-time":"2026-06-17T05:56:31Z","timestamp":1781675791000},"page":"727","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Multi-Damping Mechanism Analysis and Quality Factor Optimization of Micromachined Disk Resonator Gyroscopes"],"prefix":"10.3390","volume":"17","author":[{"given":"Ruotong","family":"Qi","sequence":"first","affiliation":[{"name":"School of Physics and Electronic Information, Guangxi Minzu University, Nanning 530000, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhirui","family":"Liao","sequence":"additional","affiliation":[{"name":"School of Physics and Electronic Information, Guangxi Minzu University, Nanning 530000, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2026,6,16]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"343","DOI":"10.1109\/JMEMS.2014.2330590","article-title":"Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon","volume":"24","author":"Ahn","year":"2015","journal-title":"J. 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