{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,8,24]],"date-time":"2026-08-24T18:20:35Z","timestamp":1787595635747,"version":"build-2736575974"},"reference-count":29,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2026,8,23]],"date-time":"2026-08-23T00:00:00Z","timestamp":1787443200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>The present work presents a new synthetic jet piezoelectric pump designed to address the airflow delivery needs arising from the increasing power density of high-performance microelectronics. Traditional miniaturized cooling techniques suffer from low efficiency, bulky size, and high cost, while microfluidic cooling has emerged as a vital chip thermal management method with outstanding miniature heat removal capacity. We systematically designed the vibration mode and pump structure, adopting the sixth-order resonant frequency as the operating frequency. A dual resonant layer with stiffness-guided fixed boundaries was employed to enhance vibration efficiency and energy conversion, together with an optimized flow channel layout and parametric design. Experiments conducted under 35 V square-wave excitation demonstrate that the 20 mm \u00d7 20 mm \u00d7 2.5 mm pump delivers a flow rate of 1.6 L\/min and a back pressure of 2.7 kPa. This work provides a feasible technical route for large-scale airflow delivery applications of synthetic jet piezoelectric pumps, with potential for thermal management in microelectronic devices, while balancing excellent performance and low manufacturing cost.<\/jats:p>","DOI":"10.3390\/mi17090994","type":"journal-article","created":{"date-parts":[[2026,8,24]],"date-time":"2026-08-24T17:20:28Z","timestamp":1787592028000},"page":"994","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Design and Performance Study of an Ultrasonic Synthetic Jet Piezoelectric Pump Based on Multi-Level Structural Optimization"],"prefix":"10.3390","volume":"17","author":[{"given":"Zixin","family":"Chen","sequence":"first","affiliation":[{"name":"School of Electronic Information, Hangzhou Dianzi University, No. 1158, Avenue 2, Qiantang District, Hangzhou 310018, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9000-3859","authenticated-orcid":false,"given":"Yilin","family":"Li","sequence":"additional","affiliation":[{"name":"School of Electronic Information, Hangzhou Dianzi University, No. 1158, Avenue 2, Qiantang District, Hangzhou 310018, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wenjun","family":"Li","sequence":"additional","affiliation":[{"name":"School of Electronic Information, Hangzhou Dianzi University, No. 1158, Avenue 2, Qiantang District, Hangzhou 310018, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0880-9798","authenticated-orcid":false,"given":"Keqiang","family":"Yue","sequence":"additional","affiliation":[{"name":"School of Electronic Information, Hangzhou Dianzi University, No. 1158, Avenue 2, Qiantang District, Hangzhou 310018, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ruixue","family":"Li","sequence":"additional","affiliation":[{"name":"School of Electronic Information, Hangzhou Dianzi University, No. 1158, Avenue 2, Qiantang District, Hangzhou 310018, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2026,8,23]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"085011","DOI":"10.1088\/1361-665X\/ad5cb0","article-title":"A piezoelectric pump with composite chamber: Using bluff body to improve its anti-clogging ability","volume":"33","author":"Chen","year":"2024","journal-title":"Smart Mater. 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