{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,11]],"date-time":"2026-09-11T11:21:06Z","timestamp":1789125666810,"version":"build-2803163510"},"reference-count":44,"publisher":"MDPI AG","issue":"9","license":[{"start":{"date-parts":[[2026,9,11]],"date-time":"2026-09-11T00:00:00Z","timestamp":1789084800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2022YFA1404404"],"award-info":[{"award-number":["2022YFA1404404"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52322201"],"award-info":[{"award-number":["52322201"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"award":["52322201"],"award-info":[{"award-number":["52322201"]}],"id":[{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>This work presents the design and experimental demonstration of a micromachined edge reflection thin-film surface acoustic wave (SAW) resonator on an X-cut LiNbO3-on-SiC platform. Unlike conventional Bragg reflection resonators (BRRs), the demonstrated device employs etched free edges adjacent to the interdigital transducer (IDT) to provide lateral acoustic confinement without additional reflector arrays. Edge half electrodes are further used to tailor the lateral phase condition and suppress spurious modes. The representative Design I resonator exhibits an electromechanical coupling coefficient (kt2) of 37.6% and a maximum Bode-Q of 712 at 4.64 GHz, corresponding to a figure of merit (FoM) of 267.7. Compared with BRR counterparts fabricated in the same batch, the ERR reduces the effective resonator footprint by approximately 27\u201337% while maintaining a comparable kt2. Measurements further show that the ERR exhibits a higher Q in most paired designs, thereby yielding an improved FoM. These results establish micromachined edge boundary engineering as an effective route toward reflector-less thin-film SAW resonators with reduced effective resonator footprints and high-Q coupling performance while also clarifying the fabrication-related trade-offs associated with etched free edge confinement.<\/jats:p>","DOI":"10.3390\/mi17091075","type":"journal-article","created":{"date-parts":[[2026,9,11]],"date-time":"2026-09-11T10:51:37Z","timestamp":1789123897000},"page":"1075","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Micromachined Edge Reflection Thin-Film SAW Resonator on LiNbO3-on-SiC"],"prefix":"10.3390","volume":"17","author":[{"given":"Yu-Hao","family":"Wang","sequence":"first","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"conceptualization","vocabulary":"credit"},{"role":"methodology","vocabulary":"credit"},{"role":"software","vocabulary":"credit"},{"role":"validation","vocabulary":"credit"},{"role":"formal-analysis","vocabulary":"credit"},{"role":"investigation","vocabulary":"credit"},{"role":"data-curation","vocabulary":"credit"},{"role":"writing-original-draft","vocabulary":"credit"},{"role":"writing-review-editing","vocabulary":"credit"}]},{"given":"Zhen-Hui","family":"Qin","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"conceptualization","vocabulary":"credit"},{"role":"methodology","vocabulary":"credit"},{"role":"software","vocabulary":"credit"},{"role":"validation","vocabulary":"credit"},{"role":"formal-analysis","vocabulary":"credit"},{"role":"investigation","vocabulary":"credit"},{"role":"data-curation","vocabulary":"credit"},{"role":"writing-original-draft","vocabulary":"credit"},{"role":"writing-review-editing","vocabulary":"credit"}]},{"given":"Yi-Han","family":"He","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"software","vocabulary":"credit"},{"role":"investigation","vocabulary":"credit"},{"role":"data-curation","vocabulary":"credit"}]},{"given":"Hao","family":"Yan","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"validation","vocabulary":"credit"}]},{"given":"Nan-Xin","family":"Yu","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"investigation","vocabulary":"credit"},{"role":"data-curation","vocabulary":"credit"}]},{"given":"Cheng-Zhe","family":"Cao","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"investigation","vocabulary":"credit"}]},{"given":"Hua-Yang","family":"Chen","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"writing-original-draft","vocabulary":"credit"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5247-1240","authenticated-orcid":false,"given":"Si-Yuan","family":"Yu","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"},{"name":"Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"},{"name":"Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"conceptualization","vocabulary":"credit"},{"role":"resources","vocabulary":"credit"},{"role":"writing-original-draft","vocabulary":"credit"},{"role":"writing-review-editing","vocabulary":"credit"},{"role":"project-administration","vocabulary":"credit"}]},{"given":"Yan-Feng","family":"Chen","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China"},{"name":"Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China"},{"name":"Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing 210093, China"}],"role":[{"vocabulary":"crossref","role":"author"},{"role":"resources","vocabulary":"credit"},{"role":"project-administration","vocabulary":"credit"}]}],"member":"1968","published-online":{"date-parts":[[2026,9,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"2","DOI":"10.1109\/MBITS.2024.3504521","article-title":"6G Takes Shape","volume":"4","author":"Andrews","year":"2024","journal-title":"IEEE BITS Inf. Theory Mag."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1945","DOI":"10.1109\/JSAC.2023.3274175","article-title":"Sub-6 GHz to mmWave for 5G-Advanced and beyond: Channel Measurements, Characteristics and Impact on System Performance","volume":"41","author":"Miao","year":"2023","journal-title":"IEEE J. Sel. Areas Commun."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"5","DOI":"10.1109\/MCOMSTD.2021.9579392","article-title":"Considerations on 6 GHz Spectrum for 5G-Advanced and 6G","volume":"5","author":"Nan","year":"2021","journal-title":"IEEE Commun. Stand. Mag."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"484","DOI":"10.1109\/JMW.2022.3226415","article-title":"From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications","volume":"3","author":"Hagelauer","year":"2023","journal-title":"IEEE J. Microw."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1105","DOI":"10.1109\/LED.2022.3175572","article-title":"Ultra High Q Lithium Niobate Resonator at 15-Degree Three-Dimensional Euler Angle","volume":"43","author":"Dai","year":"2022","journal-title":"IEEE Electron Device Lett."},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Campbell, J., Anderson, I., Hsu, T.-H., Barrera, O.A., Kramer, J., Cho, S., Chulukhadze, V., Latham, G., Li, M.-H., and Lu, R. (2024, January 22\u201326). 21.4 GHz Surface Acoustic Wave Resonator with 11,400 m\/s Phase Velocity in Thin-Film Lithium Niobate on Silicon Carbide. Proceedings of the 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, Taiwan.","DOI":"10.1109\/UFFC-JS60046.2024.10793800"},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"275","DOI":"10.1109\/TUFFC.2024.3522042","article-title":"52-GHz Surface Acoustic Wave Resonators in Thin-Film Lithium Niobate on Silicon Carbide","volume":"72","author":"Campbell","year":"2025","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"813","DOI":"10.1109\/LED.2023.3258459","article-title":"Ultra-High Q of 11000 in Surface Acoustic Wave Resonators by Dispersive Modulation","volume":"44","author":"Zhang","year":"2023","journal-title":"IEEE Electron Device Lett."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"2241","DOI":"10.1109\/LED.2024.3459023","article-title":"Suppressed Transverse Mode Generation in TF-SAW Resonators Based on LiTaO3\/Sapphire","volume":"45","author":"Shen","year":"2024","journal-title":"IEEE Electron Device Lett."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1640","DOI":"10.1109\/LED.2025.3586647","article-title":"Ultrahigh Frequency SAW Devices Based on 128\u00b0Y-X LiNbO3\/SiO2\/Sapphire Structure","volume":"46","author":"Gao","year":"2025","journal-title":"IEEE Electron Device Lett."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"79","DOI":"10.1038\/s41378-025-00949-9","article-title":"SV-SAW RF Filters Based on Low-Cost 128\u00b0Y LiNbO3\/SiO2\/Poly-Si\/Si Substrate for 6G cmWave Wireless Communications","volume":"11","author":"Yang","year":"2025","journal-title":"Microsyst. Nanoeng."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"1796","DOI":"10.1109\/LED.2023.3309672","article-title":"A Spurious-Free SAW Resonator with near-Zero TCF Using LiNbO3\/SiO2\/Quartz","volume":"44","author":"Liu","year":"2023","journal-title":"IEEE Electron Device Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1416","DOI":"10.1109\/TMTT.2024.3447004","article-title":"High-Performance Surface Acoustic Wave Filters for X-Band Applications","volume":"73","author":"Zhang","year":"2025","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"604","DOI":"10.1109\/JMEMS.2024.3423768","article-title":"C-Band Lithium Niobate on Silicon Carbide SAW Resonator with Figure-of-Merit of 124 at 6.5 GHz","volume":"33","author":"Hsu","year":"2024","journal-title":"J. Microelectromech. Syst."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"720","DOI":"10.1109\/LED.2024.3368426","article-title":"Coupled Shear SAW Resonator with High Electromechanical Coupling Coefficient of 34% Using X-Cut LiNbO3-on-SiC Substrate","volume":"45","author":"Dai","year":"2024","journal-title":"IEEE Electron Device Lett."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1480","DOI":"10.1109\/TMTT.2023.3305078","article-title":"Near 5-GHz Longitudinal Leaky Surface Acoustic Wave Devices on LiNbO3\/SiC Substrates","volume":"72","author":"Zheng","year":"2024","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"3693","DOI":"10.1109\/TMTT.2021.3077261","article-title":"High-Performance Surface Acoustic Wave Devices Using LiNbO3\/SiO2\/SiC Multilayered Substrates","volume":"69","author":"Shen","year":"2021","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"241","DOI":"10.1109\/TUSON.2026.3665163","article-title":"Insights into High-Frequency Spurious Suppression of LLSAW Devices Based on Cu-Grating\/X-Cut LiNbO3\/SiC","volume":"73","author":"Liu","year":"2026","journal-title":"IEEE Trans. Ultrason."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"3653","DOI":"10.1109\/TMTT.2020.3006294","article-title":"Surface Acoustic Wave Devices Using Lithium Niobate on Silicon Carbide","volume":"68","author":"Zhang","year":"2020","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"7884","DOI":"10.1109\/TMTT.2025.3568452","article-title":"Compact Wideband High-Selectivity Bandpass Filter Based on Hybrid Design of Quasi-Lumped-Element Filtering Network and LiNbO3\/SiC SAW Resonators","volume":"73","author":"Zhang","year":"2025","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"1522","DOI":"10.1109\/TUFFC.2025.3611298","article-title":"Toward mmWave Surface Acoustic Wave Resonators in Lithium Niobate on Silicon Carbide","volume":"72","author":"Hsu","year":"2025","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"5653","DOI":"10.1109\/TMTT.2024.3383476","article-title":"Monolithic 1\u20136-GHz Multiband Acoustic Filters Using SH-SAW and LLSAW on LiNbO3\/SiO2\/SiC Platform","volume":"72","author":"Liu","year":"2024","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"4749","DOI":"10.1143\/JJAP.46.4749","article-title":"High-Frequency Edge Reflection Type Resonators with Excellent Temperature Characteristics","volume":"46","author":"Kadota","year":"2007","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"1269","DOI":"10.1109\/TUFFC.2002.1041544","article-title":"Very Small IF Resonator Filters Using Reflection of Shear Horizontal Wave at Free Edges of Substrate","volume":"49","author":"Kadota","year":"2002","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"3888","DOI":"10.1109\/TED.2013.2281734","article-title":"Figure-of-Merit Enhancement for Laterally Vibrating Lithium Niobate MEMS Resonators","volume":"60","author":"Gong","year":"2013","journal-title":"IEEE Trans. Electron Devices"},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Gollapudi, S.K.S., and Nemade, H.B. (2017, January 6\u20139). Edge Reflection Type SAW Resonators on Silicon Substrate Using ZnO Thin Films. Proceedings of the 2017 IEEE International Ultrasonics Symposium (IUS), Washington, DC, USA.","DOI":"10.1109\/ULTSYM.2017.8091530"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"e12713","DOI":"10.1049\/ell2.12713","article-title":"Collective Fabrication of Guided Longitudinal SAW Resonator without Bragg Grating Mirror","volume":"59","author":"Baron","year":"2023","journal-title":"Electron. Lett."},{"key":"ref_28","doi-asserted-by":"crossref","unstructured":"Kanazawa, T., Sugimori, T., Ishikawa, Y., and Nakai, T. (2025, January 15\u201318). Ultra-Compact\/Low-Loss DPX with Reflector-Less SAW Resonator. Proceedings of the 2025 IEEE International Ultrasonics Symposium (IUS), Utrecht, The Netherlands.","DOI":"10.1109\/IUS62464.2025.11201493"},{"key":"ref_29","doi-asserted-by":"crossref","unstructured":"Li, T., Du, B., Zhong, H., and Wang, H. (2022, January 27\u201329). Large Coupling Surface Acoustic Wave Resonator Based on SiO2\/5\u00b0Y-X LiNbO3 Structure. Proceedings of the 2022 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP), Guangzhou, China.","DOI":"10.1109\/IMWS-AMP54652.2022.10107348"},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"1324","DOI":"10.1109\/TUFFC.2024.3448217","article-title":"Gold as a Promising Electrode Material for LiNbO3-on-Insulator (LNOI) SH-SAW Resonators: An Experimental Study","volume":"71","author":"Hsu","year":"2024","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"272","DOI":"10.1109\/LED.2023.3345345","article-title":"Nanosheet Lithium Niobate Acoustic Resonator for mmWave Frequencies","volume":"45","author":"Yang","year":"2024","journal-title":"IEEE Electron Device Lett."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"300","DOI":"10.1109\/JMEMS.2014.2384916","article-title":"Design and Fabrication of S0 Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators","volume":"24","author":"Wang","year":"2015","journal-title":"J. Microelectromech. Syst."},{"key":"ref_33","doi-asserted-by":"crossref","unstructured":"Wang, R., Bhave, S.A., and Bhattacharjee, K. (2013). Modeling of Inter-Digitated Transducer for High-Order Contour Mode Resonators. Proceedings of the 2013 IEEE International Ultrasonics Symposium (IUS), Prague, Czech Republic, 21\u201325 July 2013, IEEE.","DOI":"10.1109\/ULTSYM.2013.0491"},{"key":"ref_34","doi-asserted-by":"crossref","unstructured":"Colombo, L., Ceran, M., and Rinaldi, M. (2022, January 10\u201313). Spurious Modes Metric Definition for Machine Learning Aided MEMS Design. Proceedings of the 2022 IEEE International Ultrasonics Symposium (IUS), Venice, Italy.","DOI":"10.1109\/IUS54386.2022.9957468"},{"key":"ref_35","doi-asserted-by":"crossref","unstructured":"Tong, X., Zhou, J., Wen, Z., Fan, Y., Liu, J., Liu, Y., Liu, W., Soon, B.W., Cai, Y., and Sun, C. (2022, January 27\u201329). A Laterally Excited Bulk Acoustic Wave Resonator towards High Figure-of-Merit in Radio-Frequency Applications. Proceedings of the 2022 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP), Guangzhou, China.","DOI":"10.1109\/IMWS-AMP54652.2022.10107320"},{"key":"ref_36","unstructured":"Wang, R., Bhave, S.A., and Bhattacharjee, K. (2013, January 20\u201324). High kt2\u00d7Q, Multi-Frequency Lithium Niobate Resonators. Proceedings of the 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"1943","DOI":"10.1109\/TUFFC.2007.487","article-title":"Suppression of Transverse Mode Responses in Ultra-Wideband SAW Resonators Fabricated on a Cu-Grating\/15\u00b0YX-LiNbO3 Structure","volume":"54","author":"Omori","year":"2007","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"ref_38","doi-asserted-by":"crossref","unstructured":"Shi, L., and Piazza, G. (2015, January 18\u201322). Active Reflectors for High Performance Lithium Niobate on Silicon Dioxide Resonators. Proceedings of the 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal.","DOI":"10.1109\/MEMSYS.2015.7051128"},{"key":"ref_39","doi-asserted-by":"crossref","unstructured":"Doberstein, S., and Veremeev, I. (2019, January 6\u20139). STW Resonators with the High Quality Factor and Reduced Sizes. Proceedings of the 2019 IEEE International Ultrasonics Symposium (IUS), Glasgow, UK.","DOI":"10.1109\/ULTSYM.2019.8926223"},{"key":"ref_40","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1109\/JMEMS.2019.2892708","article-title":"Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators","volume":"28","author":"Lu","year":"2019","journal-title":"J. Microelectromech. Syst."},{"key":"ref_41","doi-asserted-by":"crossref","unstructured":"Feld, D.A., Parker, R., Ruby, R., Bradley, P., and Dong, S. (2008, January 2\u20135). After 60 Years: A New Formula for Computing Quality Factor Is Warranted. Proceedings of the 2008 IEEE Ultrasonics Symposium, Beijing, China.","DOI":"10.1109\/ULTSYM.2008.0105"},{"key":"ref_42","doi-asserted-by":"crossref","unstructured":"Zhang, L., Zhang, S., Zhou, H., Wu, J., Zheng, P., Xu, H., An, Z., You, T., and Ou, X. (2021, January 11\u201316). High Frequency, Low Loss and Low TCF Acoustic Devices on LiTaO3-on-SiC Substrate. Proceedings of the 2021 IEEE International Ultrasonics Symposium (IUS), Xi\u2019an, China.","DOI":"10.1109\/IUS52206.2021.9593841"},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"1434","DOI":"10.1109\/LMWT.2023.3301229","article-title":"5.9 GHz Longitudinal Leaky SAW Filter with FBW of 9.2% and IL of 1.8 dB Using LN\/Quartz Structure","volume":"33","author":"Su","year":"2023","journal-title":"IEEE Microw. Wirel. Technol. Lett."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"1157","DOI":"10.1109\/TUFFC.2023.3299635","article-title":"SAW Filters on LiNbO3\/SiC Heterostructure for 5G N77 and N78 Band Applications","volume":"70","author":"Xu","year":"2023","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/17\/9\/1075\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,9,11]],"date-time":"2026-09-11T11:02:18Z","timestamp":1789124538000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/17\/9\/1075"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,9,11]]},"references-count":44,"journal-issue":{"issue":"9","published-online":{"date-parts":[[2026,9]]}},"alternative-id":["mi17091075"],"URL":"https:\/\/doi.org\/10.3390\/mi17091075","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,9,11]]}}}