{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,15]],"date-time":"2026-07-15T01:48:44Z","timestamp":1784080124886,"version":"3.55.0"},"reference-count":26,"publisher":"MDPI AG","issue":"4","license":[{"start":{"date-parts":[[2018,3,27]],"date-time":"2018-03-27T00:00:00Z","timestamp":1522108800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Key technology innovation projects of key industries in Chongqing under Grant","award":["CSTC 2016 zdcy-ztzx0034"],"award-info":[{"award-number":["CSTC 2016 zdcy-ztzx0034"]}]},{"name":"Special Funds of the National Natural Science Foundation of China","award":["NSFC 61327002"],"award-info":[{"award-number":["NSFC 61327002"]}]},{"name":"Youth Science Fund of the National Natural Science Foundation of China","award":["NSFC 61704019"],"award-info":[{"award-number":["NSFC 61704019"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Micromachines"],"abstract":"<jats:p>Based on the scanning grating mirror we developed, this paper presents a method of the precise control of a scanning grating mirror and of high-speed spectrum data detection. In addition, the system circuit of the scanning grating mirror control and spectrum signal detecting is designed and manufactured in this paper. The mirror control system includes a drive generator module, an amplitude detection module, a feedback control module, and a variable gain amplification (VGA) module; the detecting system includes a field programmable gate array (FPGA) main control module, a synchronous trigger module, an analog-digital conversion (ADC) module, and a universal serial bus (USB) interface module. The final results of the experiment show that the control system has successfully realized the precision control of the swing of the scanning grating mirror and that the detecting system has successfully realized the high-speed acquisition and transmission of the spectral signal and the angle signals. The spectrum has been reconstructed according to the mathematical relationship between the wavelength \u03bb and the angle \u03b2 of the mirror. The resolution of the spectrometer reaches 10 nm in the wavelength range of 800\u20131800 nm, the signal-to-noise ratio (SNR) of the spectrometer is 4562 at full scale, the spectrum data drift is 0.9% in 24 h, and the precision of the closed loop control is 0.06%.<\/jats:p>","DOI":"10.3390\/mi9040152","type":"journal-article","created":{"date-parts":[[2018,3,27]],"date-time":"2018-03-27T12:17:24Z","timestamp":1522153044000},"page":"152","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["A Control and Detecting System of Micro-Near-Infrared Spectrometer Based on a MOEMS Scanning Grating Mirror"],"prefix":"10.3390","volume":"9","author":[{"given":"Haitao","family":"Liu","sequence":"first","affiliation":[{"name":"National Key Discipline Laboratory of Novel Micro\/Nano Devices and Systems Technologies of Chongqing University, Chongqing 400044, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhiyu","family":"Wen","sequence":"additional","affiliation":[{"name":"National Key Discipline Laboratory of Novel Micro\/Nano Devices and Systems Technologies of Chongqing University, Chongqing 400044, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dongling","family":"Li","sequence":"additional","affiliation":[{"name":"National Key Discipline Laboratory of Novel Micro\/Nano Devices and Systems Technologies of Chongqing University, Chongqing 400044, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jian","family":"Huang","sequence":"additional","affiliation":[{"name":"National Key Discipline Laboratory of Novel Micro\/Nano Devices and Systems Technologies of Chongqing University, Chongqing 400044, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ying","family":"Zhou","sequence":"additional","affiliation":[{"name":"National Key Discipline Laboratory of Novel Micro\/Nano Devices and Systems Technologies of Chongqing University, Chongqing 400044, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Pengfei","family":"Guo","sequence":"additional","affiliation":[{"name":"National Key Discipline Laboratory of Novel Micro\/Nano Devices and Systems Technologies of Chongqing University, Chongqing 400044, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2018,3,27]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"415","DOI":"10.1021\/jf0304876","article-title":"On-line multisensor monitoring of yogurt and filmjolk fermentations on production scale","volume":"52","author":"Christian","year":"2004","journal-title":"J. Agric. Food Chem."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1204","DOI":"10.1366\/000370206778664734","article-title":"On-line monitoring of the buffer capacity of particleboard furnish by near-infrared spectroscopy","volume":"60","author":"Andre","year":"2006","journal-title":"Appl. Spectrosc."},{"key":"ref_3","first-page":"211","article-title":"On-line application of near infrared (NIR) spectroscopy in food production Trends in Food","volume":"46","author":"Porep","year":"2015","journal-title":"Sci. Technol."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Mora-Ruiz, M.E., Salvador, M.D., Cancho-Grande, B., and Fregapane, G. (2017). Assessment of polar phenolic compounds of virgin olive oil by NIR and mid-IR spectroscopy and their impact on quality. Eur. J. Lipid Sci. Technol., 119.","DOI":"10.1002\/ejlt.201600099"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"88","DOI":"10.1016\/S0924-4247(01)00544-1","article-title":"Infrared micro-spectrometer based on a diffraction grating","volume":"92","author":"Kong","year":"2001","journal-title":"Sens. Actuators A"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"6943","DOI":"10.1143\/JJAP.47.6943","article-title":"Micro-electro-mechanical-systems-based infrared spectrometer composed of multi-slit grating and bolometer array","volume":"47","author":"Yang","year":"2008","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"1259","DOI":"10.1007\/s00216-006-0726-5","article-title":"Single-detector micro-electro-mechanical scanning grating spectrometer","volume":"386","author":"Kraft","year":"2006","journal-title":"Anal. Bioanal. Chem."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"556","DOI":"10.1016\/j.proche.2009.07.139","article-title":"Compact high-speed spectrometers based on MEMS devices with large amplitude in-plane actuators","volume":"1","author":"Kenda","year":"2009","journal-title":"Procedia Chem."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"144","DOI":"10.1016\/j.proeng.2011.12.036","article-title":"Advanced FT-IR high-speed spectrometer showing the feasibility of high performance optical MEMS based mid-IR Sensing","volume":"25","author":"Kenda","year":"2011","journal-title":"Procedia Eng."},{"key":"ref_10","doi-asserted-by":"crossref","unstructured":"Tortschanoff, A., Lenzhofer, M., Frank, A., Sandner, T., and Schenk, H. (2009, January 21\u201323). Improved MEMS based FT-IR spectrometer. Proceedings of the International Symposium on Optomechatronic Technologies, 2009, ISOT 2009, Istanbul, Turkey.","DOI":"10.1109\/ISOT.2009.5326109"},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"16792","DOI":"10.1364\/OE.23.016792","article-title":"Electromagnetic biaxial microscanner with mechanical amplification at resonance","volume":"23","author":"Cho","year":"2015","journal-title":"Opt. Express"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"628","DOI":"10.1364\/OL.28.000628","article-title":"Electrostatic micromachine scanning mirror for optical coherence tomography","volume":"28","author":"Zara","year":"2003","journal-title":"Opt. Lett."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"163901","DOI":"10.1063\/1.2195092","article-title":"Three-dimensional endoscopic optical coherence tomography by use of a two-axis microelectromechanical scanning mirror","volume":"88","author":"Jung","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1209","DOI":"10.1109\/JMEMS.2006.880291","article-title":"Design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array driven by a Leverage mechanism","volume":"15","author":"Tsai","year":"2006","journal-title":"J. Microelectromech. Syst."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"636","DOI":"10.1109\/JSTQE.2004.829194","article-title":"A two-axis electrothermal mirror for endoscopic optical coherence tomography","volume":"10","author":"Jain","year":"2004","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1004","DOI":"10.1109\/JMEMS.2009.2023838","article-title":"An electrothermal tip-tilt-piston mirror based on folded dual S-shaped bimorphs","volume":"18","author":"Jia","year":"2009","journal-title":"J. Microelectromech. Syst."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"156","DOI":"10.1016\/j.sna.2011.06.011","article-title":"A curved multimorph based electrothermal mirror with large scan range and low drive voltage","volume":"70","author":"Pal","year":"2011","journal-title":"Sens. Actuators A"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"483","DOI":"10.1016\/j.sna.2005.04.029","article-title":"Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning","volume":"123\u2013124","author":"Filhol","year":"2005","journal-title":"Sens. Actuators A Phys."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"12065","DOI":"10.1364\/OE.18.012065","article-title":"3D in vivo optical coherence tomography based on a low-voltage, large-scan-range 2D MEMS mirror","volume":"18","author":"Sorg","year":"2010","journal-title":"Opt. Express"},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"13812","DOI":"10.1364\/OE.19.013812","article-title":"A 2D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator","volume":"19","author":"Lee","year":"2011","journal-title":"Opt. Express"},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Zhang, C., Zhang, G.F., and You, Z. (2007, January 2\u20135). Piezoresistor Design for Deflection Angles Decoupling Measurement of Two-Dimensional MOEMS Scanning Mirror. Proceedings of the 7th IEEE International Conference on Nanotechnology, Hong Kong, China.","DOI":"10.1109\/NANO.2007.4601159"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"125009","DOI":"10.1088\/1361-6439\/aa85cd","article-title":"An electromagnetic scanning mirror integrated with blazed grating and angle sensor for a near infrared micro spectrometer","volume":"27","author":"Zhou","year":"2017","journal-title":"Micromech. Microeng."},{"key":"ref_23","first-page":"1","article-title":"Signal processing for a single detector MOEMS based NIR micro spectrometer","volume":"5964","author":"Heberer","year":"2005","journal-title":"Proc. SPIE"},{"key":"ref_24","first-page":"494","article-title":"Bob. Research on the application of NIR spectrometer based on MEMS technology","volume":"28","author":"Su","year":"2011","journal-title":"Chin. J. Spectrosc. Lab."},{"key":"ref_25","unstructured":"Wen, Z.Y., Zhou, Y., and Liu, H.T. (2017). The MOMES Scanning Grating Mirror System: China Patent. (Patent No. 2,528,363)."},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"1749","DOI":"10.1007\/s00542-014-2354-x","article-title":"A high-performance scanning grating based on tilted (111) silicon wafer for near infrared micro spectrometer application","volume":"21","author":"Nie","year":"2015","journal-title":"Microsyst. Technol."}],"container-title":["Micromachines"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2072-666X\/9\/4\/152\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T14:58:41Z","timestamp":1760194721000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2072-666X\/9\/4\/152"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,3,27]]},"references-count":26,"journal-issue":{"issue":"4","published-online":{"date-parts":[[2018,4]]}},"alternative-id":["mi9040152"],"URL":"https:\/\/doi.org\/10.3390\/mi9040152","relation":{},"ISSN":["2072-666X"],"issn-type":[{"value":"2072-666X","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,3,27]]}}}