{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,16]],"date-time":"2026-09-16T15:19:53Z","timestamp":1789571993890,"version":"build-2803163510"},"reference-count":87,"publisher":"MDPI AG","issue":"22","license":[{"start":{"date-parts":[[2022,11,15]],"date-time":"2022-11-15T00:00:00Z","timestamp":1668470400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004504","name":"European Regional Development Fund","doi-asserted-by":"publisher","award":["DOTSUT-184"],"award-info":[{"award-number":["DOTSUT-184"]}],"id":[{"id":"10.13039\/501100004504","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Nanomaterials"],"abstract":"<jats:p>To fabricate graphene-based high-frequency electronic and optoelectronic devices, there is a high demand for scalable low-contaminated graphene with high mobility. Graphene synthesized via chemical vapor deposition (CVD) on copper foil appears promising for this purpose, but residues from the polymethyl methacrylate (PMMA) layer, used for the wet transfer of CVD graphene, drastically affect the electrical properties of graphene. Here, we demonstrate a scalable and green PMMA removal technique that yields high-mobility graphene on the most common technologically relevant silicon (Si) substrate. As the first step, the polarity of the PMMA was modified under deep-UV irradiation at \u03bb = 254 nm, due to the formation of ketones and aldehydes of higher polarity, which simplifies hydrogen bonding in the step of its dissolution. Modification of PMMA polarity was confirmed by UV and FTIR spectrometry and contact angle measurements. Consecutive dissolution of DUV-exposed PMMA in an environmentally friendly, binary, high-polarity mixture of isopropyl alcohol\/water (more commonly alcohol\/water) resulted in the rapid and complete removal of DUV-exposed polymers without the degradation of graphene properties, as low-energy exposure does not form free radicals, and thus the released graphene remained intact. The high quality of graphene after PMMA removal was confirmed by SEM, AFM, Raman spectrometry, and by contact and non-contact electrical conductivity measurements. The removal of PMMA from graphene was also performed via other common methods for comparison. The charge carrier mobility in graphene films was found to be up to 6900 cm2\/(V\u00b7s), demonstrating a high potential of the proposed PMMA removal method in the scalable fabrication of high-performance electronic devices based on CVD graphene.<\/jats:p>","DOI":"10.3390\/nano12224017","type":"journal-article","created":{"date-parts":[[2022,11,16]],"date-time":"2022-11-16T02:33:48Z","timestamp":1668566028000},"page":"4017","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Green Removal of DUV-Polarity-Modified PMMA for Wet Transfer of CVD Graphene"],"prefix":"10.3390","volume":"12","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5629-8545","authenticated-orcid":false,"given":"Justinas","family":"Jorudas","sequence":"first","affiliation":[{"name":"THz Photonics Laboratory of Optoelectronics Department, Center for Physical Sciences and Technology (FTMC), Saul\u0117tekis Ave. 3, LT 10257 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4648-0957","authenticated-orcid":false,"given":"Daniil","family":"Pashnev","sequence":"additional","affiliation":[{"name":"THz Photonics Laboratory of Optoelectronics Department, Center for Physical Sciences and Technology (FTMC), Saul\u0117tekis Ave. 3, LT 10257 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1256-9424","authenticated-orcid":false,"given":"Irmantas","family":"Ka\u0161alynas","sequence":"additional","affiliation":[{"name":"THz Photonics Laboratory of Optoelectronics Department, Center for Physical Sciences and Technology (FTMC), Saul\u0117tekis Ave. 3, LT 10257 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ilja","family":"Ignatjev","sequence":"additional","affiliation":[{"name":"Department of Organic Chemistry, Center for Physical Sciences and Technology (FTMC), Saul\u0117tekis Ave. 3, LT 10257 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Gediminas","family":"Niaura","sequence":"additional","affiliation":[{"name":"Department of Organic Chemistry, Center for Physical Sciences and Technology (FTMC), Saul\u0117tekis Ave. 3, LT 10257 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Algirdas","family":"Selskis","sequence":"additional","affiliation":[{"name":"Department of Structural Analysis of Materials, Center for Physical Sciences and Technology (FTMC), Saul\u0117tekis Ave. 3, LT 10257 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Vladimir","family":"Astachov","sequence":"additional","affiliation":[{"name":"Department of Physical Technologies, Center for Physical Sciences and Technology (FTMC), Saul\u0117tekis Ave. 3, LT 10257 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Natalia","family":"Alexeeva","sequence":"additional","affiliation":[{"name":"THz Photonics Laboratory of Optoelectronics Department, Center for Physical Sciences and Technology (FTMC), Saul\u0117tekis Ave. 3, LT 10257 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2022,11,15]]},"reference":[{"key":"ref_1","first-page":"192","article-title":"Science and Technology Roadmap for Graphene, Related Two-Dimensional Crystals, and Hybrid Systems","volume":"7","author":"Geim","year":"2012","journal-title":"Nature"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"192","DOI":"10.1038\/nature11458","article-title":"A Roadmap for Graphene","volume":"490","author":"Novoselov","year":"2012","journal-title":"Nature"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"183","DOI":"10.1038\/nmat1849","article-title":"The Rise of Graphene","volume":"6","author":"Geim","year":"2007","journal-title":"Nat. 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