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However, such sensors are difficult to achieve using conventional materials. Engineering the morphology of the electrodes and the topography of the dielectrics has been demonstrated to be effective in boosting the sensing performance of capacitive pressure sensors. In this study, a flexible capacitive pressure sensor with high sensitivity was fabricated by using three-dimensional vertical graphene (VG) as the electrode and micro-pyramidal polydimethylsiloxane (PDMS) as the dielectric layer. The engineering of the VG morphology, size, and interval of the micro-pyramids in the PDMS dielectric layer significantly boosted the sensor sensitivity. As a result, the sensors demonstrated an exceptional sensitivity of up to 6.04 kPa\u22121 in the pressure range of 0\u20131 kPa, and 0.69 kPa\u22121 under 1\u201310 kPa. Finite element analysis revealed that the micro-pyramid structure in the dielectric layer generated a significant deformation effect under pressure, thereby ameliorating the sensing properties. Finally, the sensor was used to monitor finger joint movement, knee motion, facial expression, and pressure distribution. The results indicate that the sensor exhibits great potential in various applications, including human motion detection and human-machine interaction.<\/jats:p>","DOI":"10.3390\/nano13040701","type":"journal-article","created":{"date-parts":[[2023,2,13]],"date-time":"2023-02-13T05:25:26Z","timestamp":1676265926000},"page":"701","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":44,"title":["Highly Sensitive and Flexible Capacitive Pressure Sensors Based on Vertical Graphene and Micro-Pyramidal Dielectric Layer"],"prefix":"10.3390","volume":"13","author":[{"given":"Ke","family":"Zhao","sequence":"first","affiliation":[{"name":"State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7680-8642","authenticated-orcid":false,"given":"Jiemin","family":"Han","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9319-0891","authenticated-orcid":false,"given":"Yifei","family":"Ma","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhaomin","family":"Tong","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jonghwan","family":"Suhr","sequence":"additional","affiliation":[{"name":"Department of Polymer Science and Engineering, School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4127-4983","authenticated-orcid":false,"given":"Mei","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Liantuan","family":"Xiao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Suotang","family":"Jia","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0526-0648","authenticated-orcid":false,"given":"Xuyuan","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China"},{"name":"Faculty of Technology, Natural Sciences and Maritime Sciences, Department of Microsystems, University of Southeast Norway, 3184 Borre, Norway"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2023,2,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"2206900","DOI":"10.1002\/adfm.202206900","article-title":"Integrated Self\u2013Powered Sensors Based on 2D Material Devices","volume":"32","author":"Huo","year":"2022","journal-title":"Adv. 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